1/13/2011	12:13:12 AM	H2 valve closed
1/13/2011	12:13:12 AM	BCl3 valve closed
1/13/2011	12:13:12 AM	PH3 valve closed
1/13/2011	12:13:12 AM	SiCl4 pre valve closed
1/13/2011	12:13:12 AM	SiCl4 post valve closed
1/13/2011	12:13:12 AM	Main Vac valve closed
1/13/2011	12:13:12 AM	Bypass valve closed
1/13/2011	12:13:12 AM	Helium valve opened
1/13/2011	12:13:12 AM	Bubbler valve opened
1/13/2011	12:13:12 AM	Helium MFC set to  500.000000
1/13/2011	12:13:12 AM	H2 MFC set to  0.000000
1/13/2011	12:13:12 AM	BCl3 MFC set to  0.000000
1/13/2011	12:13:12 AM	PHl3 MFC set to  0.000000
1/13/2011	12:13:12 AM	SiCl4 MFC set to  0.000000
1/13/2011	12:13:12 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	12:13:12 AM	Tube furnace set to 0
1/13/2011	12:49:52 AM	Helium valve closed
1/13/2011	12:49:52 AM	H2 valve closed
1/13/2011	12:49:52 AM	BCl3 valve closed
1/13/2011	12:49:52 AM	PH3 valve closed
1/13/2011	12:49:52 AM	SiCl4 pre valve closed
1/13/2011	12:49:52 AM	SiCl4 post valve closed
1/13/2011	12:49:52 AM	Main Vac valve closed
1/13/2011	12:49:52 AM	Bypass valve closed
1/13/2011	12:49:52 AM	Bubbler valve closed
1/13/2011	12:49:52 AM	Helium MFC set to  0.000000
1/13/2011	12:49:52 AM	H2 MFC set to  0.000000
1/13/2011	12:49:52 AM	BCl3 MFC set to  0.000000
1/13/2011	12:49:52 AM	PHl3 MFC set to  0.000000
1/13/2011	12:49:52 AM	SiCl4 MFC set to  0.000000
1/13/2011	12:49:52 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	12:49:52 AM	Tube furnace set to 0
1/13/2011	12:49:52 AM	Run finished at 12:49 AM
1/13/2011	1:17:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	1:17:22 AM	Recipe started at 1:17 AM
1/13/2011	1:17:22 AM	Helium valve closed
1/13/2011	1:17:22 AM	H2 valve closed
1/13/2011	1:17:22 AM	BCl3 valve closed
1/13/2011	1:17:22 AM	PH3 valve closed
1/13/2011	1:17:22 AM	SiCl4 pre valve closed
1/13/2011	1:17:22 AM	SiCl4 post valve closed
1/13/2011	1:17:22 AM	Main Vac valve closed
1/13/2011	1:17:22 AM	Bubbler valve closed
1/13/2011	1:17:22 AM	Bypass valve opened
1/13/2011	1:17:22 AM	Helium MFC set to  0.000000
1/13/2011	1:17:22 AM	H2 MFC set to  0.000000
1/13/2011	1:17:22 AM	BCl3 MFC set to  0.000000
1/13/2011	1:17:22 AM	PHl3 MFC set to  0.000000
1/13/2011	1:17:22 AM	SiCl4 MFC set to  0.000000
1/13/2011	1:17:22 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	1:17:22 AM	Tube furnace set to 0
1/13/2011	1:17:55 AM	Helium valve closed
1/13/2011	1:17:55 AM	H2 valve closed
1/13/2011	1:17:55 AM	BCl3 valve closed
1/13/2011	1:17:55 AM	PH3 valve closed
1/13/2011	1:17:55 AM	SiCl4 pre valve closed
1/13/2011	1:17:55 AM	SiCl4 post valve closed
1/13/2011	1:17:55 AM	Bubbler valve closed
1/13/2011	1:17:55 AM	Main Vac valve opened
1/13/2011	1:17:55 AM	Bypass valve opened
1/13/2011	1:17:55 AM	Helium MFC set to  0.000000
1/13/2011	1:17:55 AM	H2 MFC set to  0.000000
1/13/2011	1:17:55 AM	BCl3 MFC set to  0.000000
1/13/2011	1:17:55 AM	PHl3 MFC set to  0.000000
1/13/2011	1:17:55 AM	SiCl4 MFC set to  0.000000
1/13/2011	1:17:55 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	1:17:55 AM	Tube furnace set to 0
1/13/2011	1:17:55 AM	Run finished at 1:17 AM
1/13/2011	1:17:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	1:18:48 AM	Helium MFC set to  50.000000
1/13/2011	1:18:49 AM	Helium valve opened
1/13/2011	1:19:07 AM	Helium valve closed
1/13/2011	9:25:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2011	9:25:04 AM	Recipe started at 9:25 AM
1/13/2011	9:25:04 AM	H2 valve closed
1/13/2011	9:25:04 AM	BCl3 valve closed
1/13/2011	9:25:04 AM	PH3 valve closed
1/13/2011	9:25:04 AM	SiCl4 pre valve closed
1/13/2011	9:25:04 AM	SiCl4 post valve closed
1/13/2011	9:25:04 AM	Main Vac valve closed
1/13/2011	9:25:04 AM	Bypass valve closed
1/13/2011	9:25:04 AM	Bubbler valve closed
1/13/2011	9:25:04 AM	Helium valve opened
1/13/2011	9:25:04 AM	Helium MFC set to  500.000000
1/13/2011	9:25:04 AM	H2 MFC set to  0.000000
1/13/2011	9:25:04 AM	BCl3 MFC set to  0.000000
1/13/2011	9:25:04 AM	PHl3 MFC set to  0.000000
1/13/2011	9:25:04 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:25:04 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:25:04 AM	Tube furnace set to 0
1/13/2011	9:26:25 AM	Helium valve closed
1/13/2011	9:26:25 AM	H2 valve closed
1/13/2011	9:26:25 AM	BCl3 valve closed
1/13/2011	9:26:25 AM	PH3 valve closed
1/13/2011	9:26:25 AM	SiCl4 pre valve closed
1/13/2011	9:26:25 AM	SiCl4 post valve closed
1/13/2011	9:26:25 AM	Main Vac valve closed
1/13/2011	9:26:25 AM	Bypass valve closed
1/13/2011	9:26:25 AM	Bubbler valve closed
1/13/2011	9:26:25 AM	Helium MFC set to  0.000000
1/13/2011	9:26:25 AM	H2 MFC set to  0.000000
1/13/2011	9:26:25 AM	BCl3 MFC set to  0.000000
1/13/2011	9:26:25 AM	PHl3 MFC set to  0.000000
1/13/2011	9:26:25 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:26:25 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:26:25 AM	Tube furnace set to 0
1/13/2011	9:26:25 AM	Run finished at 9:26 AM
1/13/2011	9:26:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2011	9:33:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	9:33:50 AM	Recipe started at 9:33 AM
1/13/2011	9:33:50 AM	Helium valve closed
1/13/2011	9:33:50 AM	H2 valve closed
1/13/2011	9:33:50 AM	BCl3 valve closed
1/13/2011	9:33:50 AM	PH3 valve closed
1/13/2011	9:33:50 AM	SiCl4 pre valve closed
1/13/2011	9:33:50 AM	SiCl4 post valve closed
1/13/2011	9:33:50 AM	Main Vac valve closed
1/13/2011	9:33:50 AM	Bubbler valve closed
1/13/2011	9:33:50 AM	Bypass valve opened
1/13/2011	9:33:50 AM	Helium MFC set to  0.000000
1/13/2011	9:33:50 AM	H2 MFC set to  0.000000
1/13/2011	9:33:50 AM	BCl3 MFC set to  0.000000
1/13/2011	9:33:50 AM	PHl3 MFC set to  0.000000
1/13/2011	9:33:50 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:33:50 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:33:51 AM	Tube furnace set to 0
1/13/2011	9:34:22 AM	Helium valve closed
1/13/2011	9:34:22 AM	H2 valve closed
1/13/2011	9:34:22 AM	BCl3 valve closed
1/13/2011	9:34:22 AM	PH3 valve closed
1/13/2011	9:34:22 AM	SiCl4 pre valve closed
1/13/2011	9:34:22 AM	SiCl4 post valve closed
1/13/2011	9:34:22 AM	Bubbler valve closed
1/13/2011	9:34:22 AM	Main Vac valve opened
1/13/2011	9:34:22 AM	Bypass valve opened
1/13/2011	9:34:22 AM	Helium MFC set to  0.000000
1/13/2011	9:34:22 AM	H2 MFC set to  0.000000
1/13/2011	9:34:22 AM	BCl3 MFC set to  0.000000
1/13/2011	9:34:22 AM	PHl3 MFC set to  0.000000
1/13/2011	9:34:22 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:34:22 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:34:22 AM	Tube furnace set to 0
1/13/2011	9:34:22 AM	Run finished at 9:34 AM
1/13/2011	9:34:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	9:35:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	9:35:12 AM	Recipe started at 9:35 AM
1/13/2011	9:35:12 AM	Helium valve closed
1/13/2011	9:35:12 AM	H2 valve closed
1/13/2011	9:35:12 AM	BCl3 valve closed
1/13/2011	9:35:12 AM	PH3 valve closed
1/13/2011	9:35:12 AM	SiCl4 pre valve closed
1/13/2011	9:35:12 AM	SiCl4 post valve closed
1/13/2011	9:35:12 AM	Main Vac valve closed
1/13/2011	9:35:12 AM	Bubbler valve closed
1/13/2011	9:35:12 AM	Bypass valve opened
1/13/2011	9:35:12 AM	Helium MFC set to  0.000000
1/13/2011	9:35:12 AM	H2 MFC set to  0.000000
1/13/2011	9:35:12 AM	BCl3 MFC set to  0.000000
1/13/2011	9:35:12 AM	PHl3 MFC set to  0.000000
1/13/2011	9:35:12 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:35:12 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:35:12 AM	Tube furnace set to 0
1/13/2011	9:35:12 AM	Helium valve closed
1/13/2011	9:35:12 AM	H2 valve closed
1/13/2011	9:35:12 AM	BCl3 valve closed
1/13/2011	9:35:12 AM	PH3 valve closed
1/13/2011	9:35:12 AM	SiCl4 pre valve closed
1/13/2011	9:35:12 AM	SiCl4 post valve closed
1/13/2011	9:35:12 AM	Bubbler valve closed
1/13/2011	9:35:12 AM	Main Vac valve opened
1/13/2011	9:35:12 AM	Bypass valve opened
1/13/2011	9:35:12 AM	Helium MFC set to  0.000000
1/13/2011	9:35:12 AM	H2 MFC set to  0.000000
1/13/2011	9:35:12 AM	BCl3 MFC set to  0.000000
1/13/2011	9:35:12 AM	PHl3 MFC set to  0.000000
1/13/2011	9:35:12 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:35:12 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:35:12 AM	Tube furnace set to 0
1/13/2011	9:36:12 AM	H2 valve closed
1/13/2011	9:36:12 AM	BCl3 valve closed
1/13/2011	9:36:12 AM	PH3 valve closed
1/13/2011	9:36:12 AM	SiCl4 pre valve closed
1/13/2011	9:36:13 AM	SiCl4 post valve closed
1/13/2011	9:36:13 AM	Bubbler valve closed
1/13/2011	9:36:13 AM	Helium valve opened
1/13/2011	9:36:13 AM	Main Vac valve opened
1/13/2011	9:36:13 AM	Bypass valve opened
1/13/2011	9:36:13 AM	Helium MFC set to  100.000000
1/13/2011	9:36:13 AM	H2 MFC set to  0.000000
1/13/2011	9:36:13 AM	BCl3 MFC set to  0.000000
1/13/2011	9:36:13 AM	PHl3 MFC set to  0.000000
1/13/2011	9:36:13 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:36:13 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:36:13 AM	Tube furnace set to 0
1/13/2011	9:37:13 AM	Helium valve closed
1/13/2011	9:37:13 AM	H2 valve closed
1/13/2011	9:37:13 AM	BCl3 valve closed
1/13/2011	9:37:13 AM	PH3 valve closed
1/13/2011	9:37:13 AM	SiCl4 pre valve closed
1/13/2011	9:37:13 AM	SiCl4 post valve closed
1/13/2011	9:37:13 AM	Bubbler valve closed
1/13/2011	9:37:13 AM	Main Vac valve opened
1/13/2011	9:37:13 AM	Bypass valve opened
1/13/2011	9:37:13 AM	Helium MFC set to  0.000000
1/13/2011	9:37:13 AM	H2 MFC set to  0.000000
1/13/2011	9:37:13 AM	BCl3 MFC set to  0.000000
1/13/2011	9:37:13 AM	PHl3 MFC set to  0.000000
1/13/2011	9:37:13 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:37:13 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:37:13 AM	Tube furnace set to 0
1/13/2011	9:38:13 AM	H2 valve closed
1/13/2011	9:38:13 AM	BCl3 valve closed
1/13/2011	9:38:13 AM	PH3 valve closed
1/13/2011	9:38:13 AM	SiCl4 pre valve closed
1/13/2011	9:38:13 AM	SiCl4 post valve closed
1/13/2011	9:38:13 AM	Bubbler valve closed
1/13/2011	9:38:13 AM	Helium valve opened
1/13/2011	9:38:13 AM	Main Vac valve opened
1/13/2011	9:38:13 AM	Bypass valve opened
1/13/2011	9:38:13 AM	Helium MFC set to  100.000000
1/13/2011	9:38:13 AM	H2 MFC set to  0.000000
1/13/2011	9:38:13 AM	BCl3 MFC set to  0.000000
1/13/2011	9:38:13 AM	PHl3 MFC set to  0.000000
1/13/2011	9:38:13 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:38:13 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:38:13 AM	Tube furnace set to 0
1/13/2011	9:39:13 AM	Helium valve closed
1/13/2011	9:39:13 AM	H2 valve closed
1/13/2011	9:39:13 AM	BCl3 valve closed
1/13/2011	9:39:13 AM	PH3 valve closed
1/13/2011	9:39:13 AM	SiCl4 pre valve closed
1/13/2011	9:39:13 AM	SiCl4 post valve closed
1/13/2011	9:39:13 AM	Bubbler valve closed
1/13/2011	9:39:13 AM	Main Vac valve opened
1/13/2011	9:39:13 AM	Bypass valve opened
1/13/2011	9:39:13 AM	Helium MFC set to  0.000000
1/13/2011	9:39:13 AM	H2 MFC set to  0.000000
1/13/2011	9:39:13 AM	BCl3 MFC set to  0.000000
1/13/2011	9:39:13 AM	PHl3 MFC set to  0.000000
1/13/2011	9:39:13 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:39:13 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:39:13 AM	Tube furnace set to 0
1/13/2011	9:40:13 AM	H2 valve closed
1/13/2011	9:40:13 AM	BCl3 valve closed
1/13/2011	9:40:13 AM	PH3 valve closed
1/13/2011	9:40:13 AM	SiCl4 pre valve closed
1/13/2011	9:40:13 AM	SiCl4 post valve closed
1/13/2011	9:40:13 AM	Bubbler valve closed
1/13/2011	9:40:13 AM	Helium valve opened
1/13/2011	9:40:13 AM	Main Vac valve opened
1/13/2011	9:40:13 AM	Bypass valve opened
1/13/2011	9:40:13 AM	Helium MFC set to  100.000000
1/13/2011	9:40:13 AM	H2 MFC set to  0.000000
1/13/2011	9:40:13 AM	BCl3 MFC set to  0.000000
1/13/2011	9:40:13 AM	PHl3 MFC set to  0.000000
1/13/2011	9:40:13 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:40:13 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:40:13 AM	Tube furnace set to 0
1/13/2011	9:41:14 AM	Helium valve closed
1/13/2011	9:41:14 AM	H2 valve closed
1/13/2011	9:41:14 AM	BCl3 valve closed
1/13/2011	9:41:14 AM	PH3 valve closed
1/13/2011	9:41:14 AM	SiCl4 pre valve closed
1/13/2011	9:41:14 AM	SiCl4 post valve closed
1/13/2011	9:41:14 AM	Bubbler valve closed
1/13/2011	9:41:14 AM	Main Vac valve opened
1/13/2011	9:41:14 AM	Bypass valve opened
1/13/2011	9:41:14 AM	Helium MFC set to  0.000000
1/13/2011	9:41:14 AM	H2 MFC set to  0.000000
1/13/2011	9:41:14 AM	BCl3 MFC set to  0.000000
1/13/2011	9:41:14 AM	PHl3 MFC set to  0.000000
1/13/2011	9:41:14 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:41:14 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:41:14 AM	Tube furnace set to 0
1/13/2011	9:42:14 AM	H2 valve closed
1/13/2011	9:42:14 AM	BCl3 valve closed
1/13/2011	9:42:14 AM	PH3 valve closed
1/13/2011	9:42:14 AM	SiCl4 pre valve closed
1/13/2011	9:42:14 AM	SiCl4 post valve closed
1/13/2011	9:42:14 AM	Bubbler valve closed
1/13/2011	9:42:14 AM	Helium valve opened
1/13/2011	9:42:14 AM	Main Vac valve opened
1/13/2011	9:42:14 AM	Bypass valve opened
1/13/2011	9:42:14 AM	Helium MFC set to  100.000000
1/13/2011	9:42:14 AM	H2 MFC set to  0.000000
1/13/2011	9:42:14 AM	BCl3 MFC set to  0.000000
1/13/2011	9:42:14 AM	PHl3 MFC set to  0.000000
1/13/2011	9:42:14 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:42:14 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:42:14 AM	Tube furnace set to 0
1/13/2011	9:43:14 AM	Helium valve closed
1/13/2011	9:43:14 AM	H2 valve closed
1/13/2011	9:43:14 AM	BCl3 valve closed
1/13/2011	9:43:14 AM	PH3 valve closed
1/13/2011	9:43:14 AM	SiCl4 pre valve closed
1/13/2011	9:43:14 AM	SiCl4 post valve closed
1/13/2011	9:43:14 AM	Bubbler valve closed
1/13/2011	9:43:14 AM	Main Vac valve opened
1/13/2011	9:43:14 AM	Bypass valve opened
1/13/2011	9:43:14 AM	Helium MFC set to  0.000000
1/13/2011	9:43:14 AM	H2 MFC set to  0.000000
1/13/2011	9:43:14 AM	BCl3 MFC set to  0.000000
1/13/2011	9:43:14 AM	PHl3 MFC set to  0.000000
1/13/2011	9:43:14 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:43:14 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:43:14 AM	Tube furnace set to 0
1/13/2011	9:44:14 AM	H2 valve closed
1/13/2011	9:44:14 AM	BCl3 valve closed
1/13/2011	9:44:14 AM	PH3 valve closed
1/13/2011	9:44:14 AM	SiCl4 pre valve closed
1/13/2011	9:44:14 AM	SiCl4 post valve closed
1/13/2011	9:44:14 AM	Bubbler valve closed
1/13/2011	9:44:14 AM	Helium valve opened
1/13/2011	9:44:14 AM	Main Vac valve opened
1/13/2011	9:44:14 AM	Bypass valve opened
1/13/2011	9:44:14 AM	Helium MFC set to  100.000000
1/13/2011	9:44:14 AM	H2 MFC set to  0.000000
1/13/2011	9:44:14 AM	BCl3 MFC set to  0.000000
1/13/2011	9:44:14 AM	PHl3 MFC set to  0.000000
1/13/2011	9:44:14 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:44:14 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:44:14 AM	Tube furnace set to 0
1/13/2011	9:45:14 AM	Helium valve closed
1/13/2011	9:45:14 AM	H2 valve closed
1/13/2011	9:45:14 AM	BCl3 valve closed
1/13/2011	9:45:14 AM	PH3 valve closed
1/13/2011	9:45:14 AM	SiCl4 pre valve closed
1/13/2011	9:45:14 AM	SiCl4 post valve closed
1/13/2011	9:45:14 AM	Bubbler valve closed
1/13/2011	9:45:14 AM	Main Vac valve opened
1/13/2011	9:45:14 AM	Bypass valve opened
1/13/2011	9:45:14 AM	Helium MFC set to  0.000000
1/13/2011	9:45:14 AM	H2 MFC set to  0.000000
1/13/2011	9:45:14 AM	BCl3 MFC set to  0.000000
1/13/2011	9:45:14 AM	PHl3 MFC set to  0.000000
1/13/2011	9:45:14 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:45:14 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:45:14 AM	Tube furnace set to 0
1/13/2011	9:46:15 AM	H2 valve closed
1/13/2011	9:46:15 AM	BCl3 valve closed
1/13/2011	9:46:15 AM	PH3 valve closed
1/13/2011	9:46:15 AM	SiCl4 pre valve closed
1/13/2011	9:46:15 AM	SiCl4 post valve closed
1/13/2011	9:46:15 AM	Bubbler valve closed
1/13/2011	9:46:15 AM	Helium valve opened
1/13/2011	9:46:15 AM	Main Vac valve opened
1/13/2011	9:46:15 AM	Bypass valve opened
1/13/2011	9:46:15 AM	Helium MFC set to  100.000000
1/13/2011	9:46:15 AM	H2 MFC set to  0.000000
1/13/2011	9:46:15 AM	BCl3 MFC set to  0.000000
1/13/2011	9:46:15 AM	PHl3 MFC set to  0.000000
1/13/2011	9:46:15 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:46:15 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:46:15 AM	Tube furnace set to 0
1/13/2011	9:47:15 AM	Helium valve closed
1/13/2011	9:47:15 AM	H2 valve closed
1/13/2011	9:47:15 AM	BCl3 valve closed
1/13/2011	9:47:15 AM	PH3 valve closed
1/13/2011	9:47:15 AM	SiCl4 pre valve closed
1/13/2011	9:47:15 AM	SiCl4 post valve closed
1/13/2011	9:47:15 AM	Bubbler valve closed
1/13/2011	9:47:15 AM	Main Vac valve opened
1/13/2011	9:47:15 AM	Bypass valve opened
1/13/2011	9:47:15 AM	Helium MFC set to  0.000000
1/13/2011	9:47:15 AM	H2 MFC set to  0.000000
1/13/2011	9:47:15 AM	BCl3 MFC set to  0.000000
1/13/2011	9:47:15 AM	PHl3 MFC set to  0.000000
1/13/2011	9:47:15 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:47:15 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:47:15 AM	Tube furnace set to 0
1/13/2011	9:48:15 AM	H2 valve closed
1/13/2011	9:48:15 AM	BCl3 valve closed
1/13/2011	9:48:15 AM	PH3 valve closed
1/13/2011	9:48:15 AM	SiCl4 pre valve closed
1/13/2011	9:48:15 AM	SiCl4 post valve closed
1/13/2011	9:48:15 AM	Bubbler valve closed
1/13/2011	9:48:15 AM	Helium valve opened
1/13/2011	9:48:15 AM	Main Vac valve opened
1/13/2011	9:48:15 AM	Bypass valve opened
1/13/2011	9:48:15 AM	Helium MFC set to  100.000000
1/13/2011	9:48:15 AM	H2 MFC set to  0.000000
1/13/2011	9:48:15 AM	BCl3 MFC set to  0.000000
1/13/2011	9:48:15 AM	PHl3 MFC set to  0.000000
1/13/2011	9:48:15 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:48:15 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:48:15 AM	Tube furnace set to 0
1/13/2011	9:49:15 AM	Helium valve closed
1/13/2011	9:49:15 AM	H2 valve closed
1/13/2011	9:49:15 AM	BCl3 valve closed
1/13/2011	9:49:15 AM	PH3 valve closed
1/13/2011	9:49:15 AM	SiCl4 pre valve closed
1/13/2011	9:49:15 AM	SiCl4 post valve closed
1/13/2011	9:49:15 AM	Bubbler valve closed
1/13/2011	9:49:15 AM	Main Vac valve opened
1/13/2011	9:49:15 AM	Bypass valve opened
1/13/2011	9:49:15 AM	Helium MFC set to  0.000000
1/13/2011	9:49:15 AM	H2 MFC set to  0.000000
1/13/2011	9:49:15 AM	BCl3 MFC set to  0.000000
1/13/2011	9:49:15 AM	PHl3 MFC set to  0.000000
1/13/2011	9:49:15 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:49:15 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:49:15 AM	Tube furnace set to 0
1/13/2011	9:50:15 AM	H2 valve closed
1/13/2011	9:50:15 AM	BCl3 valve closed
1/13/2011	9:50:15 AM	PH3 valve closed
1/13/2011	9:50:15 AM	SiCl4 pre valve closed
1/13/2011	9:50:15 AM	SiCl4 post valve closed
1/13/2011	9:50:15 AM	Bubbler valve closed
1/13/2011	9:50:15 AM	Helium valve opened
1/13/2011	9:50:15 AM	Main Vac valve opened
1/13/2011	9:50:15 AM	Bypass valve opened
1/13/2011	9:50:15 AM	Helium MFC set to  100.000000
1/13/2011	9:50:15 AM	H2 MFC set to  0.000000
1/13/2011	9:50:15 AM	BCl3 MFC set to  0.000000
1/13/2011	9:50:15 AM	PHl3 MFC set to  0.000000
1/13/2011	9:50:15 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:50:15 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:50:16 AM	Tube furnace set to 0
1/13/2011	9:51:16 AM	Helium valve closed
1/13/2011	9:51:16 AM	H2 valve closed
1/13/2011	9:51:16 AM	BCl3 valve closed
1/13/2011	9:51:16 AM	PH3 valve closed
1/13/2011	9:51:16 AM	SiCl4 pre valve closed
1/13/2011	9:51:16 AM	SiCl4 post valve closed
1/13/2011	9:51:16 AM	Bubbler valve closed
1/13/2011	9:51:16 AM	Main Vac valve opened
1/13/2011	9:51:16 AM	Bypass valve opened
1/13/2011	9:51:16 AM	Helium MFC set to  0.000000
1/13/2011	9:51:16 AM	H2 MFC set to  0.000000
1/13/2011	9:51:16 AM	BCl3 MFC set to  0.000000
1/13/2011	9:51:16 AM	PHl3 MFC set to  0.000000
1/13/2011	9:51:16 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:51:16 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:51:16 AM	Tube furnace set to 0
1/13/2011	9:52:16 AM	H2 valve closed
1/13/2011	9:52:16 AM	BCl3 valve closed
1/13/2011	9:52:16 AM	PH3 valve closed
1/13/2011	9:52:16 AM	SiCl4 pre valve closed
1/13/2011	9:52:16 AM	SiCl4 post valve closed
1/13/2011	9:52:16 AM	Bubbler valve closed
1/13/2011	9:52:16 AM	Helium valve opened
1/13/2011	9:52:16 AM	Main Vac valve opened
1/13/2011	9:52:16 AM	Bypass valve opened
1/13/2011	9:52:16 AM	Helium MFC set to  100.000000
1/13/2011	9:52:16 AM	H2 MFC set to  0.000000
1/13/2011	9:52:16 AM	BCl3 MFC set to  0.000000
1/13/2011	9:52:16 AM	PHl3 MFC set to  0.000000
1/13/2011	9:52:16 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:52:16 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:52:16 AM	Tube furnace set to 0
1/13/2011	9:53:16 AM	Helium valve closed
1/13/2011	9:53:16 AM	H2 valve closed
1/13/2011	9:53:16 AM	BCl3 valve closed
1/13/2011	9:53:16 AM	PH3 valve closed
1/13/2011	9:53:16 AM	SiCl4 pre valve closed
1/13/2011	9:53:16 AM	SiCl4 post valve closed
1/13/2011	9:53:16 AM	Bubbler valve closed
1/13/2011	9:53:16 AM	Main Vac valve opened
1/13/2011	9:53:16 AM	Bypass valve opened
1/13/2011	9:53:16 AM	Helium MFC set to  0.000000
1/13/2011	9:53:16 AM	H2 MFC set to  0.000000
1/13/2011	9:53:16 AM	BCl3 MFC set to  0.000000
1/13/2011	9:53:16 AM	PHl3 MFC set to  0.000000
1/13/2011	9:53:16 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:53:16 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:53:16 AM	Tube furnace set to 0
1/13/2011	9:54:16 AM	H2 valve closed
1/13/2011	9:54:16 AM	BCl3 valve closed
1/13/2011	9:54:16 AM	PH3 valve closed
1/13/2011	9:54:16 AM	SiCl4 pre valve closed
1/13/2011	9:54:16 AM	SiCl4 post valve closed
1/13/2011	9:54:16 AM	Bubbler valve closed
1/13/2011	9:54:16 AM	Helium valve opened
1/13/2011	9:54:16 AM	Main Vac valve opened
1/13/2011	9:54:16 AM	Bypass valve opened
1/13/2011	9:54:16 AM	Helium MFC set to  100.000000
1/13/2011	9:54:16 AM	H2 MFC set to  0.000000
1/13/2011	9:54:16 AM	BCl3 MFC set to  0.000000
1/13/2011	9:54:16 AM	PHl3 MFC set to  0.000000
1/13/2011	9:54:16 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:54:16 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:54:16 AM	Tube furnace set to 0
1/13/2011	9:55:16 AM	Helium valve closed
1/13/2011	9:55:16 AM	H2 valve closed
1/13/2011	9:55:16 AM	BCl3 valve closed
1/13/2011	9:55:16 AM	PH3 valve closed
1/13/2011	9:55:16 AM	SiCl4 pre valve closed
1/13/2011	9:55:16 AM	SiCl4 post valve closed
1/13/2011	9:55:16 AM	Bubbler valve closed
1/13/2011	9:55:16 AM	Main Vac valve opened
1/13/2011	9:55:16 AM	Bypass valve opened
1/13/2011	9:55:16 AM	Helium MFC set to  0.000000
1/13/2011	9:55:16 AM	H2 MFC set to  0.000000
1/13/2011	9:55:16 AM	BCl3 MFC set to  0.000000
1/13/2011	9:55:16 AM	PHl3 MFC set to  0.000000
1/13/2011	9:55:16 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:55:16 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:55:17 AM	Tube furnace set to 0
1/13/2011	9:55:18 AM	Run finished at 9:55 AM
1/13/2011	9:55:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	9:59:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/13/2011	9:59:17 AM	Recipe started at 9:59 AM
1/13/2011	9:59:17 AM	Helium valve closed
1/13/2011	9:59:17 AM	H2 valve closed
1/13/2011	9:59:17 AM	BCl3 valve closed
1/13/2011	9:59:17 AM	PH3 valve closed
1/13/2011	9:59:17 AM	SiCl4 pre valve closed
1/13/2011	9:59:17 AM	SiCl4 post valve closed
1/13/2011	9:59:17 AM	Main Vac valve closed
1/13/2011	9:59:17 AM	Bypass valve closed
1/13/2011	9:59:17 AM	Bubbler valve closed
1/13/2011	9:59:17 AM	Helium MFC set to  0.000000
1/13/2011	9:59:17 AM	H2 MFC set to  0.000000
1/13/2011	9:59:17 AM	BCl3 MFC set to  0.000000
1/13/2011	9:59:17 AM	PHl3 MFC set to  0.000000
1/13/2011	9:59:17 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:59:17 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:59:17 AM	Tube furnace set to 0
1/13/2011	9:59:17 AM	Run finished at 9:59 AM
1/13/2011	9:59:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/13/2011	9:59:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	9:59:45 AM	Recipe started at 9:59 AM
1/13/2011	9:59:45 AM	Helium valve closed
1/13/2011	9:59:45 AM	H2 valve closed
1/13/2011	9:59:45 AM	BCl3 valve closed
1/13/2011	9:59:45 AM	PH3 valve closed
1/13/2011	9:59:45 AM	SiCl4 pre valve closed
1/13/2011	9:59:45 AM	SiCl4 post valve closed
1/13/2011	9:59:45 AM	Main Vac valve closed
1/13/2011	9:59:45 AM	Bubbler valve closed
1/13/2011	9:59:45 AM	Bypass valve opened
1/13/2011	9:59:45 AM	Helium MFC set to  0.000000
1/13/2011	9:59:45 AM	H2 MFC set to  0.000000
1/13/2011	9:59:45 AM	BCl3 MFC set to  0.000000
1/13/2011	9:59:45 AM	PHl3 MFC set to  0.000000
1/13/2011	9:59:45 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:59:45 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:59:45 AM	Tube furnace set to 0
1/13/2011	9:59:46 AM	Helium valve closed
1/13/2011	9:59:46 AM	H2 valve closed
1/13/2011	9:59:46 AM	BCl3 valve closed
1/13/2011	9:59:46 AM	PH3 valve closed
1/13/2011	9:59:46 AM	SiCl4 pre valve closed
1/13/2011	9:59:46 AM	SiCl4 post valve closed
1/13/2011	9:59:46 AM	Bubbler valve closed
1/13/2011	9:59:46 AM	Main Vac valve opened
1/13/2011	9:59:46 AM	Bypass valve opened
1/13/2011	9:59:46 AM	Helium MFC set to  0.000000
1/13/2011	9:59:46 AM	H2 MFC set to  0.000000
1/13/2011	9:59:46 AM	BCl3 MFC set to  0.000000
1/13/2011	9:59:46 AM	PHl3 MFC set to  0.000000
1/13/2011	9:59:46 AM	SiCl4 MFC set to  0.000000
1/13/2011	9:59:46 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:59:46 AM	Tube furnace set to 0
1/13/2011	9:59:46 AM	Run finished at 9:59 AM
1/13/2011	9:59:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	10:01:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/13/2011	10:01:35 AM	Recipe started at 10:01 AM
1/13/2011	10:01:35 AM	Helium valve closed
1/13/2011	10:01:35 AM	H2 valve closed
1/13/2011	10:01:35 AM	BCl3 valve closed
1/13/2011	10:01:35 AM	PH3 valve closed
1/13/2011	10:01:35 AM	SiCl4 pre valve closed
1/13/2011	10:01:35 AM	SiCl4 post valve closed
1/13/2011	10:01:35 AM	Main Vac valve closed
1/13/2011	10:01:35 AM	Bypass valve closed
1/13/2011	10:01:35 AM	Bubbler valve closed
1/13/2011	10:01:35 AM	Helium MFC set to  0.000000
1/13/2011	10:01:35 AM	H2 MFC set to  0.000000
1/13/2011	10:01:35 AM	BCl3 MFC set to  0.000000
1/13/2011	10:01:35 AM	PHl3 MFC set to  0.000000
1/13/2011	10:01:35 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:01:35 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:01:36 AM	Tube furnace set to 0
1/13/2011	10:01:36 AM	Run finished at 10:01 AM
1/13/2011	10:01:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/13/2011	10:02:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	10:02:05 AM	Recipe started at 10:02 AM
1/13/2011	10:02:05 AM	Helium valve closed
1/13/2011	10:02:05 AM	H2 valve closed
1/13/2011	10:02:05 AM	BCl3 valve closed
1/13/2011	10:02:05 AM	PH3 valve closed
1/13/2011	10:02:05 AM	SiCl4 pre valve closed
1/13/2011	10:02:05 AM	SiCl4 post valve closed
1/13/2011	10:02:05 AM	Main Vac valve closed
1/13/2011	10:02:05 AM	Bubbler valve closed
1/13/2011	10:02:05 AM	Bypass valve opened
1/13/2011	10:02:05 AM	Helium MFC set to  0.000000
1/13/2011	10:02:05 AM	H2 MFC set to  0.000000
1/13/2011	10:02:05 AM	BCl3 MFC set to  0.000000
1/13/2011	10:02:05 AM	PHl3 MFC set to  0.000000
1/13/2011	10:02:05 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:02:05 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:02:05 AM	Tube furnace set to 0
1/13/2011	10:02:05 AM	Helium valve closed
1/13/2011	10:02:05 AM	H2 valve closed
1/13/2011	10:02:05 AM	BCl3 valve closed
1/13/2011	10:02:05 AM	PH3 valve closed
1/13/2011	10:02:05 AM	SiCl4 pre valve closed
1/13/2011	10:02:05 AM	SiCl4 post valve closed
1/13/2011	10:02:05 AM	Bubbler valve closed
1/13/2011	10:02:05 AM	Main Vac valve opened
1/13/2011	10:02:05 AM	Bypass valve opened
1/13/2011	10:02:05 AM	Helium MFC set to  0.000000
1/13/2011	10:02:05 AM	H2 MFC set to  0.000000
1/13/2011	10:02:05 AM	BCl3 MFC set to  0.000000
1/13/2011	10:02:05 AM	PHl3 MFC set to  0.000000
1/13/2011	10:02:06 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:02:06 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:02:06 AM	Tube furnace set to 0
1/13/2011	10:02:06 AM	Run finished at 10:02 AM
1/13/2011	10:02:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	10:02:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2011	10:02:45 AM	Recipe started at 10:02 AM
1/13/2011	10:02:45 AM	H2 valve closed
1/13/2011	10:02:45 AM	BCl3 valve closed
1/13/2011	10:02:45 AM	PH3 valve closed
1/13/2011	10:02:45 AM	SiCl4 pre valve closed
1/13/2011	10:02:45 AM	SiCl4 post valve closed
1/13/2011	10:02:45 AM	Main Vac valve closed
1/13/2011	10:02:45 AM	Bypass valve closed
1/13/2011	10:02:45 AM	Bubbler valve closed
1/13/2011	10:02:45 AM	Helium valve opened
1/13/2011	10:02:45 AM	Helium MFC set to  500.000000
1/13/2011	10:02:45 AM	H2 MFC set to  0.000000
1/13/2011	10:02:45 AM	BCl3 MFC set to  0.000000
1/13/2011	10:02:45 AM	PHl3 MFC set to  0.000000
1/13/2011	10:02:45 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:02:45 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:02:46 AM	Tube furnace set to 0
1/13/2011	10:04:07 AM	Helium valve closed
1/13/2011	10:04:07 AM	H2 valve closed
1/13/2011	10:04:07 AM	BCl3 valve closed
1/13/2011	10:04:07 AM	PH3 valve closed
1/13/2011	10:04:07 AM	SiCl4 pre valve closed
1/13/2011	10:04:07 AM	SiCl4 post valve closed
1/13/2011	10:04:07 AM	Main Vac valve closed
1/13/2011	10:04:07 AM	Bypass valve closed
1/13/2011	10:04:07 AM	Bubbler valve closed
1/13/2011	10:04:07 AM	Helium MFC set to  0.000000
1/13/2011	10:04:07 AM	H2 MFC set to  0.000000
1/13/2011	10:04:07 AM	BCl3 MFC set to  0.000000
1/13/2011	10:04:07 AM	PHl3 MFC set to  0.000000
1/13/2011	10:04:07 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:04:07 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:04:07 AM	Tube furnace set to 0
1/13/2011	10:04:07 AM	Run finished at 10:04 AM
1/13/2011	10:04:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2011	10:12:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	10:12:48 AM	Recipe started at 10:12 AM
1/13/2011	10:12:48 AM	Helium valve closed
1/13/2011	10:12:48 AM	H2 valve closed
1/13/2011	10:12:48 AM	BCl3 valve closed
1/13/2011	10:12:48 AM	PH3 valve closed
1/13/2011	10:12:48 AM	SiCl4 pre valve closed
1/13/2011	10:12:48 AM	SiCl4 post valve closed
1/13/2011	10:12:48 AM	Main Vac valve closed
1/13/2011	10:12:48 AM	Bubbler valve closed
1/13/2011	10:12:48 AM	Bypass valve opened
1/13/2011	10:12:48 AM	Helium MFC set to  0.000000
1/13/2011	10:12:48 AM	H2 MFC set to  0.000000
1/13/2011	10:12:48 AM	BCl3 MFC set to  0.000000
1/13/2011	10:12:48 AM	PHl3 MFC set to  0.000000
1/13/2011	10:12:48 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:12:48 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:12:48 AM	Tube furnace set to 0
1/13/2011	10:13:20 AM	Helium valve closed
1/13/2011	10:13:20 AM	H2 valve closed
1/13/2011	10:13:20 AM	BCl3 valve closed
1/13/2011	10:13:20 AM	PH3 valve closed
1/13/2011	10:13:20 AM	SiCl4 pre valve closed
1/13/2011	10:13:20 AM	SiCl4 post valve closed
1/13/2011	10:13:20 AM	Bubbler valve closed
1/13/2011	10:13:20 AM	Main Vac valve opened
1/13/2011	10:13:20 AM	Bypass valve opened
1/13/2011	10:13:20 AM	Helium MFC set to  0.000000
1/13/2011	10:13:20 AM	H2 MFC set to  0.000000
1/13/2011	10:13:20 AM	BCl3 MFC set to  0.000000
1/13/2011	10:13:20 AM	PHl3 MFC set to  0.000000
1/13/2011	10:13:20 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:13:20 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:13:20 AM	Tube furnace set to 0
1/13/2011	10:13:20 AM	Run finished at 10:13 AM
1/13/2011	10:13:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	10:13:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	10:13:38 AM	Recipe started at 10:13 AM
1/13/2011	10:13:38 AM	Helium valve closed
1/13/2011	10:13:38 AM	H2 valve closed
1/13/2011	10:13:38 AM	BCl3 valve closed
1/13/2011	10:13:38 AM	PH3 valve closed
1/13/2011	10:13:38 AM	SiCl4 pre valve closed
1/13/2011	10:13:38 AM	SiCl4 post valve closed
1/13/2011	10:13:38 AM	Main Vac valve closed
1/13/2011	10:13:38 AM	Bubbler valve closed
1/13/2011	10:13:38 AM	Bypass valve opened
1/13/2011	10:13:38 AM	Helium MFC set to  0.000000
1/13/2011	10:13:38 AM	H2 MFC set to  0.000000
1/13/2011	10:13:38 AM	BCl3 MFC set to  0.000000
1/13/2011	10:13:38 AM	PHl3 MFC set to  0.000000
1/13/2011	10:13:38 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:13:38 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:13:39 AM	Tube furnace set to 0
1/13/2011	10:13:39 AM	Helium valve closed
1/13/2011	10:13:39 AM	H2 valve closed
1/13/2011	10:13:39 AM	BCl3 valve closed
1/13/2011	10:13:39 AM	PH3 valve closed
1/13/2011	10:13:39 AM	SiCl4 pre valve closed
1/13/2011	10:13:39 AM	SiCl4 post valve closed
1/13/2011	10:13:39 AM	Bubbler valve closed
1/13/2011	10:13:39 AM	Main Vac valve opened
1/13/2011	10:13:39 AM	Bypass valve opened
1/13/2011	10:13:39 AM	Helium MFC set to  0.000000
1/13/2011	10:13:39 AM	H2 MFC set to  0.000000
1/13/2011	10:13:39 AM	BCl3 MFC set to  0.000000
1/13/2011	10:13:39 AM	PHl3 MFC set to  0.000000
1/13/2011	10:13:39 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:13:39 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:13:39 AM	Tube furnace set to 0
1/13/2011	10:14:39 AM	H2 valve closed
1/13/2011	10:14:39 AM	BCl3 valve closed
1/13/2011	10:14:39 AM	PH3 valve closed
1/13/2011	10:14:39 AM	SiCl4 pre valve closed
1/13/2011	10:14:39 AM	SiCl4 post valve closed
1/13/2011	10:14:39 AM	Bubbler valve closed
1/13/2011	10:14:39 AM	Helium valve opened
1/13/2011	10:14:39 AM	Main Vac valve opened
1/13/2011	10:14:39 AM	Bypass valve opened
1/13/2011	10:14:39 AM	Helium MFC set to  100.000000
1/13/2011	10:14:39 AM	H2 MFC set to  0.000000
1/13/2011	10:14:39 AM	BCl3 MFC set to  0.000000
1/13/2011	10:14:39 AM	PHl3 MFC set to  0.000000
1/13/2011	10:14:39 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:14:39 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:14:39 AM	Tube furnace set to 0
1/13/2011	10:15:39 AM	Helium valve closed
1/13/2011	10:15:39 AM	H2 valve closed
1/13/2011	10:15:39 AM	BCl3 valve closed
1/13/2011	10:15:39 AM	PH3 valve closed
1/13/2011	10:15:39 AM	SiCl4 pre valve closed
1/13/2011	10:15:39 AM	SiCl4 post valve closed
1/13/2011	10:15:39 AM	Bubbler valve closed
1/13/2011	10:15:39 AM	Main Vac valve opened
1/13/2011	10:15:39 AM	Bypass valve opened
1/13/2011	10:15:39 AM	Helium MFC set to  0.000000
1/13/2011	10:15:39 AM	H2 MFC set to  0.000000
1/13/2011	10:15:39 AM	BCl3 MFC set to  0.000000
1/13/2011	10:15:39 AM	PHl3 MFC set to  0.000000
1/13/2011	10:15:39 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:15:39 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:15:39 AM	Tube furnace set to 0
1/13/2011	10:16:40 AM	H2 valve closed
1/13/2011	10:16:40 AM	BCl3 valve closed
1/13/2011	10:16:40 AM	PH3 valve closed
1/13/2011	10:16:40 AM	SiCl4 pre valve closed
1/13/2011	10:16:40 AM	SiCl4 post valve closed
1/13/2011	10:16:40 AM	Bubbler valve closed
1/13/2011	10:16:40 AM	Helium valve opened
1/13/2011	10:16:40 AM	Main Vac valve opened
1/13/2011	10:16:40 AM	Bypass valve opened
1/13/2011	10:16:40 AM	Helium MFC set to  100.000000
1/13/2011	10:16:40 AM	H2 MFC set to  0.000000
1/13/2011	10:16:40 AM	BCl3 MFC set to  0.000000
1/13/2011	10:16:40 AM	PHl3 MFC set to  0.000000
1/13/2011	10:16:40 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:16:40 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:16:40 AM	Tube furnace set to 0
1/13/2011	10:17:40 AM	Helium valve closed
1/13/2011	10:17:40 AM	H2 valve closed
1/13/2011	10:17:40 AM	BCl3 valve closed
1/13/2011	10:17:40 AM	PH3 valve closed
1/13/2011	10:17:40 AM	SiCl4 pre valve closed
1/13/2011	10:17:40 AM	SiCl4 post valve closed
1/13/2011	10:17:40 AM	Bubbler valve closed
1/13/2011	10:17:40 AM	Main Vac valve opened
1/13/2011	10:17:40 AM	Bypass valve opened
1/13/2011	10:17:40 AM	Helium MFC set to  0.000000
1/13/2011	10:17:40 AM	H2 MFC set to  0.000000
1/13/2011	10:17:40 AM	BCl3 MFC set to  0.000000
1/13/2011	10:17:40 AM	PHl3 MFC set to  0.000000
1/13/2011	10:17:40 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:17:40 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:17:40 AM	Tube furnace set to 0
1/13/2011	10:18:40 AM	H2 valve closed
1/13/2011	10:18:40 AM	BCl3 valve closed
1/13/2011	10:18:40 AM	PH3 valve closed
1/13/2011	10:18:40 AM	SiCl4 pre valve closed
1/13/2011	10:18:40 AM	SiCl4 post valve closed
1/13/2011	10:18:40 AM	Bubbler valve closed
1/13/2011	10:18:40 AM	Helium valve opened
1/13/2011	10:18:40 AM	Main Vac valve opened
1/13/2011	10:18:40 AM	Bypass valve opened
1/13/2011	10:18:40 AM	Helium MFC set to  100.000000
1/13/2011	10:18:40 AM	H2 MFC set to  0.000000
1/13/2011	10:18:40 AM	BCl3 MFC set to  0.000000
1/13/2011	10:18:40 AM	PHl3 MFC set to  0.000000
1/13/2011	10:18:40 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:18:40 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:18:40 AM	Tube furnace set to 0
1/13/2011	10:19:40 AM	Helium valve closed
1/13/2011	10:19:40 AM	H2 valve closed
1/13/2011	10:19:40 AM	BCl3 valve closed
1/13/2011	10:19:40 AM	PH3 valve closed
1/13/2011	10:19:40 AM	SiCl4 pre valve closed
1/13/2011	10:19:40 AM	SiCl4 post valve closed
1/13/2011	10:19:40 AM	Bubbler valve closed
1/13/2011	10:19:40 AM	Main Vac valve opened
1/13/2011	10:19:40 AM	Bypass valve opened
1/13/2011	10:19:40 AM	Helium MFC set to  0.000000
1/13/2011	10:19:40 AM	H2 MFC set to  0.000000
1/13/2011	10:19:40 AM	BCl3 MFC set to  0.000000
1/13/2011	10:19:40 AM	PHl3 MFC set to  0.000000
1/13/2011	10:19:40 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:19:40 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:19:40 AM	Tube furnace set to 0
1/13/2011	10:20:40 AM	H2 valve closed
1/13/2011	10:20:40 AM	BCl3 valve closed
1/13/2011	10:20:40 AM	PH3 valve closed
1/13/2011	10:20:40 AM	SiCl4 pre valve closed
1/13/2011	10:20:40 AM	SiCl4 post valve closed
1/13/2011	10:20:40 AM	Bubbler valve closed
1/13/2011	10:20:40 AM	Helium valve opened
1/13/2011	10:20:40 AM	Main Vac valve opened
1/13/2011	10:20:40 AM	Bypass valve opened
1/13/2011	10:20:40 AM	Helium MFC set to  100.000000
1/13/2011	10:20:40 AM	H2 MFC set to  0.000000
1/13/2011	10:20:40 AM	BCl3 MFC set to  0.000000
1/13/2011	10:20:40 AM	PHl3 MFC set to  0.000000
1/13/2011	10:20:40 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:20:40 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:20:41 AM	Tube furnace set to 0
1/13/2011	10:21:41 AM	Helium valve closed
1/13/2011	10:21:41 AM	H2 valve closed
1/13/2011	10:21:41 AM	BCl3 valve closed
1/13/2011	10:21:41 AM	PH3 valve closed
1/13/2011	10:21:41 AM	SiCl4 pre valve closed
1/13/2011	10:21:41 AM	SiCl4 post valve closed
1/13/2011	10:21:41 AM	Bubbler valve closed
1/13/2011	10:21:41 AM	Main Vac valve opened
1/13/2011	10:21:41 AM	Bypass valve opened
1/13/2011	10:21:41 AM	Helium MFC set to  0.000000
1/13/2011	10:21:41 AM	H2 MFC set to  0.000000
1/13/2011	10:21:41 AM	BCl3 MFC set to  0.000000
1/13/2011	10:21:41 AM	PHl3 MFC set to  0.000000
1/13/2011	10:21:41 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:21:41 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:21:41 AM	Tube furnace set to 0
1/13/2011	10:22:41 AM	H2 valve closed
1/13/2011	10:22:41 AM	BCl3 valve closed
1/13/2011	10:22:41 AM	PH3 valve closed
1/13/2011	10:22:41 AM	SiCl4 pre valve closed
1/13/2011	10:22:41 AM	SiCl4 post valve closed
1/13/2011	10:22:41 AM	Bubbler valve closed
1/13/2011	10:22:41 AM	Helium valve opened
1/13/2011	10:22:41 AM	Main Vac valve opened
1/13/2011	10:22:41 AM	Bypass valve opened
1/13/2011	10:22:41 AM	Helium MFC set to  100.000000
1/13/2011	10:22:41 AM	H2 MFC set to  0.000000
1/13/2011	10:22:41 AM	BCl3 MFC set to  0.000000
1/13/2011	10:22:41 AM	PHl3 MFC set to  0.000000
1/13/2011	10:22:41 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:22:41 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:22:41 AM	Tube furnace set to 0
1/13/2011	10:23:41 AM	Helium valve closed
1/13/2011	10:23:41 AM	H2 valve closed
1/13/2011	10:23:41 AM	BCl3 valve closed
1/13/2011	10:23:41 AM	PH3 valve closed
1/13/2011	10:23:41 AM	SiCl4 pre valve closed
1/13/2011	10:23:41 AM	SiCl4 post valve closed
1/13/2011	10:23:41 AM	Bubbler valve closed
1/13/2011	10:23:41 AM	Main Vac valve opened
1/13/2011	10:23:41 AM	Bypass valve opened
1/13/2011	10:23:41 AM	Helium MFC set to  0.000000
1/13/2011	10:23:41 AM	H2 MFC set to  0.000000
1/13/2011	10:23:41 AM	BCl3 MFC set to  0.000000
1/13/2011	10:23:41 AM	PHl3 MFC set to  0.000000
1/13/2011	10:23:41 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:23:41 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:23:41 AM	Tube furnace set to 0
1/13/2011	10:24:41 AM	H2 valve closed
1/13/2011	10:24:41 AM	BCl3 valve closed
1/13/2011	10:24:41 AM	PH3 valve closed
1/13/2011	10:24:41 AM	SiCl4 pre valve closed
1/13/2011	10:24:41 AM	SiCl4 post valve closed
1/13/2011	10:24:41 AM	Bubbler valve closed
1/13/2011	10:24:41 AM	Helium valve opened
1/13/2011	10:24:41 AM	Main Vac valve opened
1/13/2011	10:24:41 AM	Bypass valve opened
1/13/2011	10:24:41 AM	Helium MFC set to  100.000000
1/13/2011	10:24:41 AM	H2 MFC set to  0.000000
1/13/2011	10:24:41 AM	BCl3 MFC set to  0.000000
1/13/2011	10:24:41 AM	PHl3 MFC set to  0.000000
1/13/2011	10:24:41 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:24:41 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:24:41 AM	Tube furnace set to 0
1/13/2011	10:25:41 AM	Helium valve closed
1/13/2011	10:25:41 AM	H2 valve closed
1/13/2011	10:25:41 AM	BCl3 valve closed
1/13/2011	10:25:41 AM	PH3 valve closed
1/13/2011	10:25:41 AM	SiCl4 pre valve closed
1/13/2011	10:25:41 AM	SiCl4 post valve closed
1/13/2011	10:25:41 AM	Bubbler valve closed
1/13/2011	10:25:41 AM	Main Vac valve opened
1/13/2011	10:25:41 AM	Bypass valve opened
1/13/2011	10:25:41 AM	Helium MFC set to  0.000000
1/13/2011	10:25:41 AM	H2 MFC set to  0.000000
1/13/2011	10:25:41 AM	BCl3 MFC set to  0.000000
1/13/2011	10:25:41 AM	PHl3 MFC set to  0.000000
1/13/2011	10:25:41 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:25:41 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:25:42 AM	Tube furnace set to 0
1/13/2011	10:26:42 AM	H2 valve closed
1/13/2011	10:26:42 AM	BCl3 valve closed
1/13/2011	10:26:42 AM	PH3 valve closed
1/13/2011	10:26:42 AM	SiCl4 pre valve closed
1/13/2011	10:26:42 AM	SiCl4 post valve closed
1/13/2011	10:26:42 AM	Bubbler valve closed
1/13/2011	10:26:42 AM	Helium valve opened
1/13/2011	10:26:42 AM	Main Vac valve opened
1/13/2011	10:26:42 AM	Bypass valve opened
1/13/2011	10:26:42 AM	Helium MFC set to  100.000000
1/13/2011	10:26:42 AM	H2 MFC set to  0.000000
1/13/2011	10:26:42 AM	BCl3 MFC set to  0.000000
1/13/2011	10:26:42 AM	PHl3 MFC set to  0.000000
1/13/2011	10:26:42 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:26:42 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:26:42 AM	Tube furnace set to 0
1/13/2011	10:27:42 AM	Helium valve closed
1/13/2011	10:27:42 AM	H2 valve closed
1/13/2011	10:27:42 AM	BCl3 valve closed
1/13/2011	10:27:42 AM	PH3 valve closed
1/13/2011	10:27:42 AM	SiCl4 pre valve closed
1/13/2011	10:27:42 AM	SiCl4 post valve closed
1/13/2011	10:27:42 AM	Bubbler valve closed
1/13/2011	10:27:42 AM	Main Vac valve opened
1/13/2011	10:27:42 AM	Bypass valve opened
1/13/2011	10:27:42 AM	Helium MFC set to  0.000000
1/13/2011	10:27:42 AM	H2 MFC set to  0.000000
1/13/2011	10:27:42 AM	BCl3 MFC set to  0.000000
1/13/2011	10:27:42 AM	PHl3 MFC set to  0.000000
1/13/2011	10:27:42 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:27:42 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:27:42 AM	Tube furnace set to 0
1/13/2011	10:28:42 AM	H2 valve closed
1/13/2011	10:28:42 AM	BCl3 valve closed
1/13/2011	10:28:42 AM	PH3 valve closed
1/13/2011	10:28:42 AM	SiCl4 pre valve closed
1/13/2011	10:28:42 AM	SiCl4 post valve closed
1/13/2011	10:28:42 AM	Bubbler valve closed
1/13/2011	10:28:42 AM	Helium valve opened
1/13/2011	10:28:42 AM	Main Vac valve opened
1/13/2011	10:28:42 AM	Bypass valve opened
1/13/2011	10:28:42 AM	Helium MFC set to  100.000000
1/13/2011	10:28:42 AM	H2 MFC set to  0.000000
1/13/2011	10:28:42 AM	BCl3 MFC set to  0.000000
1/13/2011	10:28:42 AM	PHl3 MFC set to  0.000000
1/13/2011	10:28:42 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:28:42 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:28:42 AM	Tube furnace set to 0
1/13/2011	10:29:42 AM	Helium valve closed
1/13/2011	10:29:42 AM	H2 valve closed
1/13/2011	10:29:42 AM	BCl3 valve closed
1/13/2011	10:29:42 AM	PH3 valve closed
1/13/2011	10:29:42 AM	SiCl4 pre valve closed
1/13/2011	10:29:42 AM	SiCl4 post valve closed
1/13/2011	10:29:42 AM	Bubbler valve closed
1/13/2011	10:29:42 AM	Main Vac valve opened
1/13/2011	10:29:42 AM	Bypass valve opened
1/13/2011	10:29:42 AM	Helium MFC set to  0.000000
1/13/2011	10:29:42 AM	H2 MFC set to  0.000000
1/13/2011	10:29:42 AM	BCl3 MFC set to  0.000000
1/13/2011	10:29:42 AM	PHl3 MFC set to  0.000000
1/13/2011	10:29:42 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:29:42 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:29:42 AM	Tube furnace set to 0
1/13/2011	10:30:42 AM	H2 valve closed
1/13/2011	10:30:42 AM	BCl3 valve closed
1/13/2011	10:30:42 AM	PH3 valve closed
1/13/2011	10:30:42 AM	SiCl4 pre valve closed
1/13/2011	10:30:42 AM	SiCl4 post valve closed
1/13/2011	10:30:42 AM	Bubbler valve closed
1/13/2011	10:30:42 AM	Helium valve opened
1/13/2011	10:30:42 AM	Main Vac valve opened
1/13/2011	10:30:42 AM	Bypass valve opened
1/13/2011	10:30:42 AM	Helium MFC set to  100.000000
1/13/2011	10:30:42 AM	H2 MFC set to  0.000000
1/13/2011	10:30:42 AM	BCl3 MFC set to  0.000000
1/13/2011	10:30:42 AM	PHl3 MFC set to  0.000000
1/13/2011	10:30:42 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:30:42 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:30:43 AM	Tube furnace set to 0
1/13/2011	10:31:43 AM	Helium valve closed
1/13/2011	10:31:43 AM	H2 valve closed
1/13/2011	10:31:43 AM	BCl3 valve closed
1/13/2011	10:31:43 AM	PH3 valve closed
1/13/2011	10:31:43 AM	SiCl4 pre valve closed
1/13/2011	10:31:43 AM	SiCl4 post valve closed
1/13/2011	10:31:43 AM	Bubbler valve closed
1/13/2011	10:31:43 AM	Main Vac valve opened
1/13/2011	10:31:43 AM	Bypass valve opened
1/13/2011	10:31:43 AM	Helium MFC set to  0.000000
1/13/2011	10:31:43 AM	H2 MFC set to  0.000000
1/13/2011	10:31:43 AM	BCl3 MFC set to  0.000000
1/13/2011	10:31:43 AM	PHl3 MFC set to  0.000000
1/13/2011	10:31:43 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:31:43 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:31:43 AM	Tube furnace set to 0
1/13/2011	10:32:43 AM	H2 valve closed
1/13/2011	10:32:43 AM	BCl3 valve closed
1/13/2011	10:32:43 AM	PH3 valve closed
1/13/2011	10:32:43 AM	SiCl4 pre valve closed
1/13/2011	10:32:43 AM	SiCl4 post valve closed
1/13/2011	10:32:43 AM	Bubbler valve closed
1/13/2011	10:32:43 AM	Helium valve opened
1/13/2011	10:32:43 AM	Main Vac valve opened
1/13/2011	10:32:43 AM	Bypass valve opened
1/13/2011	10:32:43 AM	Helium MFC set to  100.000000
1/13/2011	10:32:43 AM	H2 MFC set to  0.000000
1/13/2011	10:32:43 AM	BCl3 MFC set to  0.000000
1/13/2011	10:32:43 AM	PHl3 MFC set to  0.000000
1/13/2011	10:32:43 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:32:43 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:32:43 AM	Tube furnace set to 0
1/13/2011	10:33:43 AM	Helium valve closed
1/13/2011	10:33:43 AM	H2 valve closed
1/13/2011	10:33:43 AM	BCl3 valve closed
1/13/2011	10:33:43 AM	PH3 valve closed
1/13/2011	10:33:43 AM	SiCl4 pre valve closed
1/13/2011	10:33:43 AM	SiCl4 post valve closed
1/13/2011	10:33:43 AM	Bubbler valve closed
1/13/2011	10:33:43 AM	Main Vac valve opened
1/13/2011	10:33:43 AM	Bypass valve opened
1/13/2011	10:33:43 AM	Helium MFC set to  0.000000
1/13/2011	10:33:43 AM	H2 MFC set to  0.000000
1/13/2011	10:33:43 AM	BCl3 MFC set to  0.000000
1/13/2011	10:33:43 AM	PHl3 MFC set to  0.000000
1/13/2011	10:33:43 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:33:43 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:33:43 AM	Tube furnace set to 0
1/13/2011	10:33:44 AM	Run finished at 10:33 AM
1/13/2011	10:33:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	10:44:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	10:44:47 AM	Recipe started at 10:44 AM
1/13/2011	10:44:47 AM	Helium valve closed
1/13/2011	10:44:47 AM	H2 valve closed
1/13/2011	10:44:47 AM	BCl3 valve closed
1/13/2011	10:44:47 AM	PH3 valve closed
1/13/2011	10:44:47 AM	SiCl4 pre valve closed
1/13/2011	10:44:47 AM	SiCl4 post valve closed
1/13/2011	10:44:47 AM	Main Vac valve closed
1/13/2011	10:44:47 AM	Bubbler valve closed
1/13/2011	10:44:47 AM	Bypass valve opened
1/13/2011	10:44:47 AM	Helium MFC set to  0.000000
1/13/2011	10:44:47 AM	H2 MFC set to  0.000000
1/13/2011	10:44:47 AM	BCl3 MFC set to  0.000000
1/13/2011	10:44:47 AM	PHl3 MFC set to  0.000000
1/13/2011	10:44:47 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:44:47 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:44:47 AM	Tube furnace set to 0
1/13/2011	10:44:47 AM	Helium valve closed
1/13/2011	10:44:47 AM	H2 valve closed
1/13/2011	10:44:47 AM	BCl3 valve closed
1/13/2011	10:44:47 AM	PH3 valve closed
1/13/2011	10:44:47 AM	SiCl4 pre valve closed
1/13/2011	10:44:47 AM	SiCl4 post valve closed
1/13/2011	10:44:47 AM	Bubbler valve closed
1/13/2011	10:44:47 AM	Main Vac valve opened
1/13/2011	10:44:47 AM	Bypass valve opened
1/13/2011	10:44:47 AM	Helium MFC set to  0.000000
1/13/2011	10:44:47 AM	H2 MFC set to  0.000000
1/13/2011	10:44:47 AM	BCl3 MFC set to  0.000000
1/13/2011	10:44:47 AM	PHl3 MFC set to  0.000000
1/13/2011	10:44:47 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:44:47 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:44:47 AM	Tube furnace set to 0
1/13/2011	10:45:08 AM	H2 valve closed
1/13/2011	10:45:08 AM	BCl3 valve closed
1/13/2011	10:45:08 AM	PH3 valve closed
1/13/2011	10:45:08 AM	SiCl4 pre valve closed
1/13/2011	10:45:08 AM	SiCl4 post valve closed
1/13/2011	10:45:08 AM	Bubbler valve closed
1/13/2011	10:45:08 AM	Helium valve opened
1/13/2011	10:45:08 AM	Main Vac valve opened
1/13/2011	10:45:08 AM	Bypass valve opened
1/13/2011	10:45:08 AM	Helium MFC set to  100.000000
1/13/2011	10:45:08 AM	H2 MFC set to  0.000000
1/13/2011	10:45:08 AM	BCl3 MFC set to  0.000000
1/13/2011	10:45:08 AM	PHl3 MFC set to  0.000000
1/13/2011	10:45:08 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:45:08 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:45:08 AM	Tube furnace set to 0
1/13/2011	10:45:08 AM	Helium valve closed
1/13/2011	10:45:08 AM	H2 valve closed
1/13/2011	10:45:08 AM	BCl3 valve closed
1/13/2011	10:45:08 AM	PH3 valve closed
1/13/2011	10:45:08 AM	SiCl4 pre valve closed
1/13/2011	10:45:08 AM	SiCl4 post valve closed
1/13/2011	10:45:08 AM	Bubbler valve closed
1/13/2011	10:45:08 AM	Main Vac valve opened
1/13/2011	10:45:08 AM	Bypass valve opened
1/13/2011	10:45:08 AM	Helium MFC set to  0.000000
1/13/2011	10:45:08 AM	H2 MFC set to  0.000000
1/13/2011	10:45:08 AM	BCl3 MFC set to  0.000000
1/13/2011	10:45:08 AM	PHl3 MFC set to  0.000000
1/13/2011	10:45:08 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:45:08 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:45:08 AM	Tube furnace set to 0
1/13/2011	10:45:09 AM	H2 valve closed
1/13/2011	10:45:09 AM	BCl3 valve closed
1/13/2011	10:45:09 AM	PH3 valve closed
1/13/2011	10:45:09 AM	SiCl4 pre valve closed
1/13/2011	10:45:09 AM	SiCl4 post valve closed
1/13/2011	10:45:09 AM	Bubbler valve closed
1/13/2011	10:45:09 AM	Helium valve opened
1/13/2011	10:45:09 AM	Main Vac valve opened
1/13/2011	10:45:09 AM	Bypass valve opened
1/13/2011	10:45:09 AM	Helium MFC set to  100.000000
1/13/2011	10:45:09 AM	H2 MFC set to  0.000000
1/13/2011	10:45:09 AM	BCl3 MFC set to  0.000000
1/13/2011	10:45:09 AM	PHl3 MFC set to  0.000000
1/13/2011	10:45:09 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:45:09 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:45:09 AM	Tube furnace set to 0
1/13/2011	10:45:10 AM	Helium valve closed
1/13/2011	10:45:10 AM	H2 valve closed
1/13/2011	10:45:10 AM	BCl3 valve closed
1/13/2011	10:45:10 AM	PH3 valve closed
1/13/2011	10:45:10 AM	SiCl4 pre valve closed
1/13/2011	10:45:10 AM	SiCl4 post valve closed
1/13/2011	10:45:10 AM	Bubbler valve closed
1/13/2011	10:45:10 AM	Main Vac valve opened
1/13/2011	10:45:10 AM	Bypass valve opened
1/13/2011	10:45:10 AM	Helium MFC set to  0.000000
1/13/2011	10:45:10 AM	H2 MFC set to  0.000000
1/13/2011	10:45:10 AM	BCl3 MFC set to  0.000000
1/13/2011	10:45:10 AM	PHl3 MFC set to  0.000000
1/13/2011	10:45:10 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:45:10 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:45:10 AM	Tube furnace set to 0
1/13/2011	10:45:10 AM	H2 valve closed
1/13/2011	10:45:10 AM	BCl3 valve closed
1/13/2011	10:45:10 AM	PH3 valve closed
1/13/2011	10:45:10 AM	SiCl4 pre valve closed
1/13/2011	10:45:10 AM	SiCl4 post valve closed
1/13/2011	10:45:10 AM	Bubbler valve closed
1/13/2011	10:45:10 AM	Helium valve opened
1/13/2011	10:45:10 AM	Main Vac valve opened
1/13/2011	10:45:10 AM	Bypass valve opened
1/13/2011	10:45:10 AM	Helium MFC set to  100.000000
1/13/2011	10:45:10 AM	H2 MFC set to  0.000000
1/13/2011	10:45:10 AM	BCl3 MFC set to  0.000000
1/13/2011	10:45:10 AM	PHl3 MFC set to  0.000000
1/13/2011	10:45:10 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:45:10 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:45:11 AM	Tube furnace set to 0
1/13/2011	10:45:14 AM	Run aborted at 10:45 AM
1/13/2011	10:45:14 AM	Helium valve closed
1/13/2011	10:45:14 AM	H2 valve closed
1/13/2011	10:45:14 AM	BCl3 valve closed
1/13/2011	10:45:14 AM	PH3 valve closed
1/13/2011	10:45:14 AM	SiCl4 pre valve closed
1/13/2011	10:45:14 AM	SiCl4 post valve closed
1/13/2011	10:45:14 AM	Bypass valve closed
1/13/2011	10:45:14 AM	Main Vac valve closed
1/13/2011	10:45:14 AM	Bubbler valve closed
1/13/2011	10:45:14 AM	Helium MFC set to  0.000000
1/13/2011	10:45:14 AM	H2 MFC set to  0.000000
1/13/2011	10:45:14 AM	BCl3 MFC set to  0.000000
1/13/2011	10:45:14 AM	PHl3 MFC set to  0.000000
1/13/2011	10:45:14 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:45:14 AM	Tube furnace set to 0
1/13/2011	10:45:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	10:45:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	10:45:18 AM	Recipe started at 10:45 AM
1/13/2011	10:45:18 AM	Helium valve closed
1/13/2011	10:45:18 AM	H2 valve closed
1/13/2011	10:45:18 AM	BCl3 valve closed
1/13/2011	10:45:18 AM	PH3 valve closed
1/13/2011	10:45:18 AM	SiCl4 pre valve closed
1/13/2011	10:45:18 AM	SiCl4 post valve closed
1/13/2011	10:45:18 AM	Main Vac valve closed
1/13/2011	10:45:18 AM	Bubbler valve closed
1/13/2011	10:45:18 AM	Bypass valve opened
1/13/2011	10:45:18 AM	Helium MFC set to  0.000000
1/13/2011	10:45:18 AM	H2 MFC set to  0.000000
1/13/2011	10:45:18 AM	BCl3 MFC set to  0.000000
1/13/2011	10:45:18 AM	PHl3 MFC set to  0.000000
1/13/2011	10:45:18 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:45:18 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:45:19 AM	Tube furnace set to 0
1/13/2011	10:45:19 AM	Helium valve closed
1/13/2011	10:45:19 AM	H2 valve closed
1/13/2011	10:45:19 AM	BCl3 valve closed
1/13/2011	10:45:19 AM	PH3 valve closed
1/13/2011	10:45:19 AM	SiCl4 pre valve closed
1/13/2011	10:45:19 AM	SiCl4 post valve closed
1/13/2011	10:45:19 AM	Bubbler valve closed
1/13/2011	10:45:19 AM	Main Vac valve opened
1/13/2011	10:45:19 AM	Bypass valve opened
1/13/2011	10:45:19 AM	Helium MFC set to  0.000000
1/13/2011	10:45:19 AM	H2 MFC set to  0.000000
1/13/2011	10:45:19 AM	BCl3 MFC set to  0.000000
1/13/2011	10:45:19 AM	PHl3 MFC set to  0.000000
1/13/2011	10:45:19 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:45:19 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:45:19 AM	Tube furnace set to 0
1/13/2011	10:45:19 AM	Run finished at 10:45 AM
1/13/2011	10:45:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	10:45:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/13/2011	10:45:57 AM	Recipe started at 10:45 AM
1/13/2011	10:45:57 AM	Helium valve closed
1/13/2011	10:45:57 AM	H2 valve closed
1/13/2011	10:45:57 AM	BCl3 valve closed
1/13/2011	10:45:57 AM	PH3 valve closed
1/13/2011	10:45:57 AM	SiCl4 pre valve closed
1/13/2011	10:45:57 AM	SiCl4 post valve closed
1/13/2011	10:45:57 AM	Main Vac valve closed
1/13/2011	10:45:57 AM	Bypass valve closed
1/13/2011	10:45:57 AM	Bubbler valve closed
1/13/2011	10:45:57 AM	Helium MFC set to  0.000000
1/13/2011	10:45:57 AM	H2 MFC set to  0.000000
1/13/2011	10:45:57 AM	BCl3 MFC set to  0.000000
1/13/2011	10:45:57 AM	PHl3 MFC set to  0.000000
1/13/2011	10:45:57 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:45:57 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:45:57 AM	Tube furnace set to 0
1/13/2011	10:45:57 AM	Run finished at 10:45 AM
1/13/2011	10:45:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/13/2011	10:46:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	10:46:29 AM	Recipe started at 10:46 AM
1/13/2011	10:46:29 AM	Helium valve closed
1/13/2011	10:46:29 AM	H2 valve closed
1/13/2011	10:46:29 AM	BCl3 valve closed
1/13/2011	10:46:29 AM	PH3 valve closed
1/13/2011	10:46:29 AM	SiCl4 pre valve closed
1/13/2011	10:46:29 AM	SiCl4 post valve closed
1/13/2011	10:46:29 AM	Main Vac valve closed
1/13/2011	10:46:29 AM	Bubbler valve closed
1/13/2011	10:46:29 AM	Bypass valve opened
1/13/2011	10:46:29 AM	Helium MFC set to  0.000000
1/13/2011	10:46:29 AM	H2 MFC set to  0.000000
1/13/2011	10:46:29 AM	BCl3 MFC set to  0.000000
1/13/2011	10:46:29 AM	PHl3 MFC set to  0.000000
1/13/2011	10:46:29 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:46:29 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:46:29 AM	Tube furnace set to 0
1/13/2011	10:46:29 AM	Helium valve closed
1/13/2011	10:46:29 AM	H2 valve closed
1/13/2011	10:46:29 AM	BCl3 valve closed
1/13/2011	10:46:29 AM	PH3 valve closed
1/13/2011	10:46:29 AM	SiCl4 pre valve closed
1/13/2011	10:46:29 AM	SiCl4 post valve closed
1/13/2011	10:46:29 AM	Bubbler valve closed
1/13/2011	10:46:29 AM	Main Vac valve opened
1/13/2011	10:46:29 AM	Bypass valve opened
1/13/2011	10:46:29 AM	Helium MFC set to  0.000000
1/13/2011	10:46:29 AM	H2 MFC set to  0.000000
1/13/2011	10:46:29 AM	BCl3 MFC set to  0.000000
1/13/2011	10:46:29 AM	PHl3 MFC set to  0.000000
1/13/2011	10:46:29 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:46:29 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:46:29 AM	Tube furnace set to 0
1/13/2011	10:46:30 AM	Run finished at 10:46 AM
1/13/2011	10:46:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	10:48:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	10:48:51 AM	Recipe started at 10:48 AM
1/13/2011	10:48:51 AM	Helium valve closed
1/13/2011	10:48:51 AM	H2 valve closed
1/13/2011	10:48:51 AM	BCl3 valve closed
1/13/2011	10:48:51 AM	PH3 valve closed
1/13/2011	10:48:51 AM	SiCl4 pre valve closed
1/13/2011	10:48:51 AM	SiCl4 post valve closed
1/13/2011	10:48:51 AM	Main Vac valve closed
1/13/2011	10:48:51 AM	Bubbler valve closed
1/13/2011	10:48:51 AM	Bypass valve opened
1/13/2011	10:48:51 AM	Helium MFC set to  0.000000
1/13/2011	10:48:51 AM	H2 MFC set to  0.000000
1/13/2011	10:48:51 AM	BCl3 MFC set to  0.000000
1/13/2011	10:48:51 AM	PHl3 MFC set to  0.000000
1/13/2011	10:48:51 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:48:51 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:48:52 AM	Tube furnace set to 0
1/13/2011	10:48:52 AM	Helium valve closed
1/13/2011	10:48:52 AM	H2 valve closed
1/13/2011	10:48:52 AM	BCl3 valve closed
1/13/2011	10:48:52 AM	PH3 valve closed
1/13/2011	10:48:52 AM	SiCl4 pre valve closed
1/13/2011	10:48:52 AM	SiCl4 post valve closed
1/13/2011	10:48:52 AM	Bubbler valve closed
1/13/2011	10:48:52 AM	Main Vac valve opened
1/13/2011	10:48:52 AM	Bypass valve opened
1/13/2011	10:48:52 AM	Helium MFC set to  0.000000
1/13/2011	10:48:52 AM	H2 MFC set to  0.000000
1/13/2011	10:48:52 AM	BCl3 MFC set to  0.000000
1/13/2011	10:48:52 AM	PHl3 MFC set to  0.000000
1/13/2011	10:48:52 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:48:52 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:48:52 AM	Tube furnace set to 0
1/13/2011	10:49:52 AM	H2 valve closed
1/13/2011	10:49:52 AM	BCl3 valve closed
1/13/2011	10:49:52 AM	PH3 valve closed
1/13/2011	10:49:52 AM	SiCl4 pre valve closed
1/13/2011	10:49:52 AM	SiCl4 post valve closed
1/13/2011	10:49:52 AM	Bubbler valve closed
1/13/2011	10:49:52 AM	Helium valve opened
1/13/2011	10:49:52 AM	Main Vac valve opened
1/13/2011	10:49:52 AM	Bypass valve opened
1/13/2011	10:49:52 AM	Helium MFC set to  100.000000
1/13/2011	10:49:52 AM	H2 MFC set to  0.000000
1/13/2011	10:49:52 AM	BCl3 MFC set to  0.000000
1/13/2011	10:49:52 AM	PHl3 MFC set to  0.000000
1/13/2011	10:49:52 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:49:52 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:49:52 AM	Tube furnace set to 0
1/13/2011	10:50:52 AM	Helium valve closed
1/13/2011	10:50:52 AM	H2 valve closed
1/13/2011	10:50:52 AM	BCl3 valve closed
1/13/2011	10:50:52 AM	PH3 valve closed
1/13/2011	10:50:52 AM	SiCl4 pre valve closed
1/13/2011	10:50:52 AM	SiCl4 post valve closed
1/13/2011	10:50:52 AM	Bubbler valve closed
1/13/2011	10:50:52 AM	Main Vac valve opened
1/13/2011	10:50:52 AM	Bypass valve opened
1/13/2011	10:50:52 AM	Helium MFC set to  0.000000
1/13/2011	10:50:52 AM	H2 MFC set to  0.000000
1/13/2011	10:50:52 AM	BCl3 MFC set to  0.000000
1/13/2011	10:50:52 AM	PHl3 MFC set to  0.000000
1/13/2011	10:50:52 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:50:52 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:50:52 AM	Tube furnace set to 0
1/13/2011	10:51:52 AM	H2 valve closed
1/13/2011	10:51:52 AM	BCl3 valve closed
1/13/2011	10:51:52 AM	PH3 valve closed
1/13/2011	10:51:52 AM	SiCl4 pre valve closed
1/13/2011	10:51:52 AM	SiCl4 post valve closed
1/13/2011	10:51:52 AM	Bubbler valve closed
1/13/2011	10:51:52 AM	Helium valve opened
1/13/2011	10:51:52 AM	Main Vac valve opened
1/13/2011	10:51:52 AM	Bypass valve opened
1/13/2011	10:51:52 AM	Helium MFC set to  100.000000
1/13/2011	10:51:52 AM	H2 MFC set to  0.000000
1/13/2011	10:51:52 AM	BCl3 MFC set to  0.000000
1/13/2011	10:51:52 AM	PHl3 MFC set to  0.000000
1/13/2011	10:51:52 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:51:52 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:51:53 AM	Tube furnace set to 0
1/13/2011	10:52:53 AM	Helium valve closed
1/13/2011	10:52:53 AM	H2 valve closed
1/13/2011	10:52:53 AM	BCl3 valve closed
1/13/2011	10:52:53 AM	PH3 valve closed
1/13/2011	10:52:53 AM	SiCl4 pre valve closed
1/13/2011	10:52:53 AM	SiCl4 post valve closed
1/13/2011	10:52:53 AM	Bubbler valve closed
1/13/2011	10:52:53 AM	Main Vac valve opened
1/13/2011	10:52:53 AM	Bypass valve opened
1/13/2011	10:52:53 AM	Helium MFC set to  0.000000
1/13/2011	10:52:53 AM	H2 MFC set to  0.000000
1/13/2011	10:52:53 AM	BCl3 MFC set to  0.000000
1/13/2011	10:52:53 AM	PHl3 MFC set to  0.000000
1/13/2011	10:52:53 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:52:53 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:52:53 AM	Tube furnace set to 0
1/13/2011	10:53:53 AM	H2 valve closed
1/13/2011	10:53:53 AM	BCl3 valve closed
1/13/2011	10:53:53 AM	PH3 valve closed
1/13/2011	10:53:53 AM	SiCl4 pre valve closed
1/13/2011	10:53:53 AM	SiCl4 post valve closed
1/13/2011	10:53:53 AM	Bubbler valve closed
1/13/2011	10:53:53 AM	Helium valve opened
1/13/2011	10:53:53 AM	Main Vac valve opened
1/13/2011	10:53:53 AM	Bypass valve opened
1/13/2011	10:53:53 AM	Helium MFC set to  100.000000
1/13/2011	10:53:53 AM	H2 MFC set to  0.000000
1/13/2011	10:53:53 AM	BCl3 MFC set to  0.000000
1/13/2011	10:53:53 AM	PHl3 MFC set to  0.000000
1/13/2011	10:53:53 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:53:53 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:53:53 AM	Tube furnace set to 0
1/13/2011	10:54:53 AM	Helium valve closed
1/13/2011	10:54:53 AM	H2 valve closed
1/13/2011	10:54:53 AM	BCl3 valve closed
1/13/2011	10:54:53 AM	PH3 valve closed
1/13/2011	10:54:53 AM	SiCl4 pre valve closed
1/13/2011	10:54:53 AM	SiCl4 post valve closed
1/13/2011	10:54:53 AM	Bubbler valve closed
1/13/2011	10:54:53 AM	Main Vac valve opened
1/13/2011	10:54:53 AM	Bypass valve opened
1/13/2011	10:54:53 AM	Helium MFC set to  0.000000
1/13/2011	10:54:53 AM	H2 MFC set to  0.000000
1/13/2011	10:54:53 AM	BCl3 MFC set to  0.000000
1/13/2011	10:54:53 AM	PHl3 MFC set to  0.000000
1/13/2011	10:54:53 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:54:53 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:54:53 AM	Tube furnace set to 0
1/13/2011	10:55:53 AM	H2 valve closed
1/13/2011	10:55:53 AM	BCl3 valve closed
1/13/2011	10:55:53 AM	PH3 valve closed
1/13/2011	10:55:53 AM	SiCl4 pre valve closed
1/13/2011	10:55:53 AM	SiCl4 post valve closed
1/13/2011	10:55:53 AM	Bubbler valve closed
1/13/2011	10:55:53 AM	Helium valve opened
1/13/2011	10:55:53 AM	Main Vac valve opened
1/13/2011	10:55:53 AM	Bypass valve opened
1/13/2011	10:55:53 AM	Helium MFC set to  100.000000
1/13/2011	10:55:53 AM	H2 MFC set to  0.000000
1/13/2011	10:55:53 AM	BCl3 MFC set to  0.000000
1/13/2011	10:55:53 AM	PHl3 MFC set to  0.000000
1/13/2011	10:55:53 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:55:53 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:55:53 AM	Tube furnace set to 0
1/13/2011	10:56:53 AM	Helium valve closed
1/13/2011	10:56:53 AM	H2 valve closed
1/13/2011	10:56:53 AM	BCl3 valve closed
1/13/2011	10:56:53 AM	PH3 valve closed
1/13/2011	10:56:53 AM	SiCl4 pre valve closed
1/13/2011	10:56:53 AM	SiCl4 post valve closed
1/13/2011	10:56:53 AM	Bubbler valve closed
1/13/2011	10:56:53 AM	Main Vac valve opened
1/13/2011	10:56:53 AM	Bypass valve opened
1/13/2011	10:56:53 AM	Helium MFC set to  0.000000
1/13/2011	10:56:53 AM	H2 MFC set to  0.000000
1/13/2011	10:56:54 AM	BCl3 MFC set to  0.000000
1/13/2011	10:56:54 AM	PHl3 MFC set to  0.000000
1/13/2011	10:56:54 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:56:54 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:56:54 AM	Tube furnace set to 0
1/13/2011	10:57:54 AM	H2 valve closed
1/13/2011	10:57:54 AM	BCl3 valve closed
1/13/2011	10:57:54 AM	PH3 valve closed
1/13/2011	10:57:54 AM	SiCl4 pre valve closed
1/13/2011	10:57:54 AM	SiCl4 post valve closed
1/13/2011	10:57:54 AM	Bubbler valve closed
1/13/2011	10:57:54 AM	Helium valve opened
1/13/2011	10:57:54 AM	Main Vac valve opened
1/13/2011	10:57:54 AM	Bypass valve opened
1/13/2011	10:57:54 AM	Helium MFC set to  100.000000
1/13/2011	10:57:54 AM	H2 MFC set to  0.000000
1/13/2011	10:57:54 AM	BCl3 MFC set to  0.000000
1/13/2011	10:57:54 AM	PHl3 MFC set to  0.000000
1/13/2011	10:57:54 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:57:54 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:57:54 AM	Tube furnace set to 0
1/13/2011	10:58:54 AM	Helium valve closed
1/13/2011	10:58:54 AM	H2 valve closed
1/13/2011	10:58:54 AM	BCl3 valve closed
1/13/2011	10:58:54 AM	PH3 valve closed
1/13/2011	10:58:54 AM	SiCl4 pre valve closed
1/13/2011	10:58:54 AM	SiCl4 post valve closed
1/13/2011	10:58:54 AM	Bubbler valve closed
1/13/2011	10:58:54 AM	Main Vac valve opened
1/13/2011	10:58:54 AM	Bypass valve opened
1/13/2011	10:58:54 AM	Helium MFC set to  0.000000
1/13/2011	10:58:54 AM	H2 MFC set to  0.000000
1/13/2011	10:58:54 AM	BCl3 MFC set to  0.000000
1/13/2011	10:58:54 AM	PHl3 MFC set to  0.000000
1/13/2011	10:58:54 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:58:54 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:58:54 AM	Tube furnace set to 0
1/13/2011	10:59:54 AM	H2 valve closed
1/13/2011	10:59:54 AM	BCl3 valve closed
1/13/2011	10:59:54 AM	PH3 valve closed
1/13/2011	10:59:54 AM	SiCl4 pre valve closed
1/13/2011	10:59:54 AM	SiCl4 post valve closed
1/13/2011	10:59:54 AM	Bubbler valve closed
1/13/2011	10:59:54 AM	Helium valve opened
1/13/2011	10:59:54 AM	Main Vac valve opened
1/13/2011	10:59:54 AM	Bypass valve opened
1/13/2011	10:59:54 AM	Helium MFC set to  100.000000
1/13/2011	10:59:54 AM	H2 MFC set to  0.000000
1/13/2011	10:59:54 AM	BCl3 MFC set to  0.000000
1/13/2011	10:59:54 AM	PHl3 MFC set to  0.000000
1/13/2011	10:59:54 AM	SiCl4 MFC set to  0.000000
1/13/2011	10:59:54 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:59:54 AM	Tube furnace set to 0
1/13/2011	11:00:54 AM	Helium valve closed
1/13/2011	11:00:54 AM	H2 valve closed
1/13/2011	11:00:54 AM	BCl3 valve closed
1/13/2011	11:00:54 AM	PH3 valve closed
1/13/2011	11:00:54 AM	SiCl4 pre valve closed
1/13/2011	11:00:54 AM	SiCl4 post valve closed
1/13/2011	11:00:54 AM	Bubbler valve closed
1/13/2011	11:00:54 AM	Main Vac valve opened
1/13/2011	11:00:54 AM	Bypass valve opened
1/13/2011	11:00:54 AM	Helium MFC set to  0.000000
1/13/2011	11:00:54 AM	H2 MFC set to  0.000000
1/13/2011	11:00:54 AM	BCl3 MFC set to  0.000000
1/13/2011	11:00:54 AM	PHl3 MFC set to  0.000000
1/13/2011	11:00:54 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:00:54 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:00:54 AM	Tube furnace set to 0
1/13/2011	11:01:54 AM	H2 valve closed
1/13/2011	11:01:54 AM	BCl3 valve closed
1/13/2011	11:01:54 AM	PH3 valve closed
1/13/2011	11:01:54 AM	SiCl4 pre valve closed
1/13/2011	11:01:54 AM	SiCl4 post valve closed
1/13/2011	11:01:54 AM	Bubbler valve closed
1/13/2011	11:01:54 AM	Helium valve opened
1/13/2011	11:01:54 AM	Main Vac valve opened
1/13/2011	11:01:54 AM	Bypass valve opened
1/13/2011	11:01:54 AM	Helium MFC set to  100.000000
1/13/2011	11:01:54 AM	H2 MFC set to  0.000000
1/13/2011	11:01:54 AM	BCl3 MFC set to  0.000000
1/13/2011	11:01:54 AM	PHl3 MFC set to  0.000000
1/13/2011	11:01:54 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:01:55 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:01:55 AM	Tube furnace set to 0
1/13/2011	11:02:55 AM	Helium valve closed
1/13/2011	11:02:55 AM	H2 valve closed
1/13/2011	11:02:55 AM	BCl3 valve closed
1/13/2011	11:02:55 AM	PH3 valve closed
1/13/2011	11:02:55 AM	SiCl4 pre valve closed
1/13/2011	11:02:55 AM	SiCl4 post valve closed
1/13/2011	11:02:55 AM	Bubbler valve closed
1/13/2011	11:02:55 AM	Main Vac valve opened
1/13/2011	11:02:55 AM	Bypass valve opened
1/13/2011	11:02:55 AM	Helium MFC set to  0.000000
1/13/2011	11:02:55 AM	H2 MFC set to  0.000000
1/13/2011	11:02:55 AM	BCl3 MFC set to  0.000000
1/13/2011	11:02:55 AM	PHl3 MFC set to  0.000000
1/13/2011	11:02:55 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:02:55 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:02:55 AM	Tube furnace set to 0
1/13/2011	11:03:55 AM	H2 valve closed
1/13/2011	11:03:55 AM	BCl3 valve closed
1/13/2011	11:03:55 AM	PH3 valve closed
1/13/2011	11:03:55 AM	SiCl4 pre valve closed
1/13/2011	11:03:55 AM	SiCl4 post valve closed
1/13/2011	11:03:55 AM	Bubbler valve closed
1/13/2011	11:03:55 AM	Helium valve opened
1/13/2011	11:03:55 AM	Main Vac valve opened
1/13/2011	11:03:55 AM	Bypass valve opened
1/13/2011	11:03:55 AM	Helium MFC set to  100.000000
1/13/2011	11:03:55 AM	H2 MFC set to  0.000000
1/13/2011	11:03:55 AM	BCl3 MFC set to  0.000000
1/13/2011	11:03:55 AM	PHl3 MFC set to  0.000000
1/13/2011	11:03:55 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:03:55 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:03:55 AM	Tube furnace set to 0
1/13/2011	11:04:55 AM	Helium valve closed
1/13/2011	11:04:55 AM	H2 valve closed
1/13/2011	11:04:55 AM	BCl3 valve closed
1/13/2011	11:04:55 AM	PH3 valve closed
1/13/2011	11:04:55 AM	SiCl4 pre valve closed
1/13/2011	11:04:55 AM	SiCl4 post valve closed
1/13/2011	11:04:55 AM	Bubbler valve closed
1/13/2011	11:04:55 AM	Main Vac valve opened
1/13/2011	11:04:55 AM	Bypass valve opened
1/13/2011	11:04:55 AM	Helium MFC set to  0.000000
1/13/2011	11:04:55 AM	H2 MFC set to  0.000000
1/13/2011	11:04:55 AM	BCl3 MFC set to  0.000000
1/13/2011	11:04:55 AM	PHl3 MFC set to  0.000000
1/13/2011	11:04:55 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:04:55 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:04:55 AM	Tube furnace set to 0
1/13/2011	11:05:55 AM	H2 valve closed
1/13/2011	11:05:55 AM	BCl3 valve closed
1/13/2011	11:05:55 AM	PH3 valve closed
1/13/2011	11:05:55 AM	SiCl4 pre valve closed
1/13/2011	11:05:55 AM	SiCl4 post valve closed
1/13/2011	11:05:55 AM	Bubbler valve closed
1/13/2011	11:05:55 AM	Helium valve opened
1/13/2011	11:05:55 AM	Main Vac valve opened
1/13/2011	11:05:55 AM	Bypass valve opened
1/13/2011	11:05:55 AM	Helium MFC set to  100.000000
1/13/2011	11:05:55 AM	H2 MFC set to  0.000000
1/13/2011	11:05:55 AM	BCl3 MFC set to  0.000000
1/13/2011	11:05:55 AM	PHl3 MFC set to  0.000000
1/13/2011	11:05:55 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:05:55 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:05:55 AM	Tube furnace set to 0
1/13/2011	11:06:55 AM	Helium valve closed
1/13/2011	11:06:56 AM	H2 valve closed
1/13/2011	11:06:56 AM	BCl3 valve closed
1/13/2011	11:06:56 AM	PH3 valve closed
1/13/2011	11:06:56 AM	SiCl4 pre valve closed
1/13/2011	11:06:56 AM	SiCl4 post valve closed
1/13/2011	11:06:56 AM	Bubbler valve closed
1/13/2011	11:06:56 AM	Main Vac valve opened
1/13/2011	11:06:56 AM	Bypass valve opened
1/13/2011	11:06:56 AM	Helium MFC set to  0.000000
1/13/2011	11:06:56 AM	H2 MFC set to  0.000000
1/13/2011	11:06:56 AM	BCl3 MFC set to  0.000000
1/13/2011	11:06:56 AM	PHl3 MFC set to  0.000000
1/13/2011	11:06:56 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:06:56 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:06:56 AM	Tube furnace set to 0
1/13/2011	11:07:56 AM	H2 valve closed
1/13/2011	11:07:56 AM	BCl3 valve closed
1/13/2011	11:07:56 AM	PH3 valve closed
1/13/2011	11:07:56 AM	SiCl4 pre valve closed
1/13/2011	11:07:56 AM	SiCl4 post valve closed
1/13/2011	11:07:56 AM	Bubbler valve closed
1/13/2011	11:07:56 AM	Helium valve opened
1/13/2011	11:07:56 AM	Main Vac valve opened
1/13/2011	11:07:56 AM	Bypass valve opened
1/13/2011	11:07:56 AM	Helium MFC set to  100.000000
1/13/2011	11:07:56 AM	H2 MFC set to  0.000000
1/13/2011	11:07:56 AM	BCl3 MFC set to  0.000000
1/13/2011	11:07:56 AM	PHl3 MFC set to  0.000000
1/13/2011	11:07:56 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:07:56 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:07:56 AM	Tube furnace set to 0
1/13/2011	11:08:56 AM	Helium valve closed
1/13/2011	11:08:56 AM	H2 valve closed
1/13/2011	11:08:56 AM	BCl3 valve closed
1/13/2011	11:08:56 AM	PH3 valve closed
1/13/2011	11:08:56 AM	SiCl4 pre valve closed
1/13/2011	11:08:56 AM	SiCl4 post valve closed
1/13/2011	11:08:56 AM	Bubbler valve closed
1/13/2011	11:08:56 AM	Main Vac valve opened
1/13/2011	11:08:56 AM	Bypass valve opened
1/13/2011	11:08:56 AM	Helium MFC set to  0.000000
1/13/2011	11:08:56 AM	H2 MFC set to  0.000000
1/13/2011	11:08:56 AM	BCl3 MFC set to  0.000000
1/13/2011	11:08:56 AM	PHl3 MFC set to  0.000000
1/13/2011	11:08:56 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:08:56 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:08:56 AM	Tube furnace set to 0
1/13/2011	11:08:57 AM	Run finished at 11:08 AM
1/13/2011	11:08:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	11:11:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/13/2011	11:11:16 AM	Recipe started at 11:11 AM
1/13/2011	11:11:16 AM	Helium valve closed
1/13/2011	11:11:16 AM	H2 valve closed
1/13/2011	11:11:16 AM	BCl3 valve closed
1/13/2011	11:11:16 AM	PH3 valve closed
1/13/2011	11:11:16 AM	SiCl4 pre valve closed
1/13/2011	11:11:16 AM	SiCl4 post valve closed
1/13/2011	11:11:16 AM	Main Vac valve closed
1/13/2011	11:11:16 AM	Bypass valve closed
1/13/2011	11:11:16 AM	Bubbler valve closed
1/13/2011	11:11:16 AM	Helium MFC set to  0.000000
1/13/2011	11:11:16 AM	H2 MFC set to  0.000000
1/13/2011	11:11:16 AM	BCl3 MFC set to  0.000000
1/13/2011	11:11:16 AM	PHl3 MFC set to  0.000000
1/13/2011	11:11:16 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:11:16 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:11:16 AM	Tube furnace set to 0
1/13/2011	11:11:16 AM	Run finished at 11:11 AM
1/13/2011	11:11:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/13/2011	11:12:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	11:12:02 AM	Recipe started at 11:12 AM
1/13/2011	11:12:02 AM	Helium valve closed
1/13/2011	11:12:02 AM	H2 valve closed
1/13/2011	11:12:02 AM	BCl3 valve closed
1/13/2011	11:12:02 AM	PH3 valve closed
1/13/2011	11:12:02 AM	SiCl4 pre valve closed
1/13/2011	11:12:02 AM	SiCl4 post valve closed
1/13/2011	11:12:02 AM	Main Vac valve closed
1/13/2011	11:12:02 AM	Bubbler valve closed
1/13/2011	11:12:02 AM	Bypass valve opened
1/13/2011	11:12:02 AM	Helium MFC set to  0.000000
1/13/2011	11:12:02 AM	H2 MFC set to  0.000000
1/13/2011	11:12:02 AM	BCl3 MFC set to  0.000000
1/13/2011	11:12:02 AM	PHl3 MFC set to  0.000000
1/13/2011	11:12:02 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:12:02 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:12:02 AM	Tube furnace set to 0
1/13/2011	11:12:03 AM	Helium valve closed
1/13/2011	11:12:03 AM	H2 valve closed
1/13/2011	11:12:03 AM	BCl3 valve closed
1/13/2011	11:12:03 AM	PH3 valve closed
1/13/2011	11:12:03 AM	SiCl4 pre valve closed
1/13/2011	11:12:03 AM	SiCl4 post valve closed
1/13/2011	11:12:03 AM	Bubbler valve closed
1/13/2011	11:12:03 AM	Main Vac valve opened
1/13/2011	11:12:03 AM	Bypass valve opened
1/13/2011	11:12:03 AM	Helium MFC set to  0.000000
1/13/2011	11:12:03 AM	H2 MFC set to  0.000000
1/13/2011	11:12:03 AM	BCl3 MFC set to  0.000000
1/13/2011	11:12:03 AM	PHl3 MFC set to  0.000000
1/13/2011	11:12:03 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:12:03 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:12:03 AM	Tube furnace set to 0
1/13/2011	11:12:03 AM	Run finished at 11:12 AM
1/13/2011	11:12:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	11:16:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2011	11:16:32 AM	Recipe started at 11:16 AM
1/13/2011	11:16:32 AM	H2 valve closed
1/13/2011	11:16:32 AM	BCl3 valve closed
1/13/2011	11:16:32 AM	PH3 valve closed
1/13/2011	11:16:32 AM	SiCl4 pre valve closed
1/13/2011	11:16:32 AM	SiCl4 post valve closed
1/13/2011	11:16:32 AM	Main Vac valve closed
1/13/2011	11:16:32 AM	Bypass valve closed
1/13/2011	11:16:32 AM	Bubbler valve closed
1/13/2011	11:16:32 AM	Helium valve opened
1/13/2011	11:16:32 AM	Helium MFC set to  500.000000
1/13/2011	11:16:32 AM	H2 MFC set to  0.000000
1/13/2011	11:16:32 AM	BCl3 MFC set to  0.000000
1/13/2011	11:16:32 AM	PHl3 MFC set to  0.000000
1/13/2011	11:16:32 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:16:32 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:16:32 AM	Tube furnace set to 0
1/13/2011	11:17:52 AM	Helium valve closed
1/13/2011	11:17:52 AM	H2 valve closed
1/13/2011	11:17:52 AM	BCl3 valve closed
1/13/2011	11:17:52 AM	PH3 valve closed
1/13/2011	11:17:52 AM	SiCl4 pre valve closed
1/13/2011	11:17:52 AM	SiCl4 post valve closed
1/13/2011	11:17:52 AM	Main Vac valve closed
1/13/2011	11:17:52 AM	Bypass valve closed
1/13/2011	11:17:52 AM	Bubbler valve closed
1/13/2011	11:17:52 AM	Helium MFC set to  0.000000
1/13/2011	11:17:52 AM	H2 MFC set to  0.000000
1/13/2011	11:17:52 AM	BCl3 MFC set to  0.000000
1/13/2011	11:17:52 AM	PHl3 MFC set to  0.000000
1/13/2011	11:17:52 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:17:52 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:17:53 AM	Tube furnace set to 0
1/13/2011	11:17:53 AM	Run finished at 11:17 AM
1/13/2011	11:17:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2011	11:30:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	11:30:05 AM	Recipe started at 11:30 AM
1/13/2011	11:30:05 AM	Helium valve closed
1/13/2011	11:30:05 AM	H2 valve closed
1/13/2011	11:30:05 AM	BCl3 valve closed
1/13/2011	11:30:05 AM	PH3 valve closed
1/13/2011	11:30:05 AM	SiCl4 pre valve closed
1/13/2011	11:30:05 AM	SiCl4 post valve closed
1/13/2011	11:30:05 AM	Main Vac valve closed
1/13/2011	11:30:05 AM	Bubbler valve closed
1/13/2011	11:30:05 AM	Bypass valve opened
1/13/2011	11:30:05 AM	Helium MFC set to  0.000000
1/13/2011	11:30:05 AM	H2 MFC set to  0.000000
1/13/2011	11:30:05 AM	BCl3 MFC set to  0.000000
1/13/2011	11:30:05 AM	PHl3 MFC set to  0.000000
1/13/2011	11:30:05 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:30:05 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:30:06 AM	Tube furnace set to 0
1/13/2011	11:30:37 AM	Helium valve closed
1/13/2011	11:30:37 AM	H2 valve closed
1/13/2011	11:30:37 AM	BCl3 valve closed
1/13/2011	11:30:37 AM	PH3 valve closed
1/13/2011	11:30:37 AM	SiCl4 pre valve closed
1/13/2011	11:30:37 AM	SiCl4 post valve closed
1/13/2011	11:30:37 AM	Bubbler valve closed
1/13/2011	11:30:37 AM	Main Vac valve opened
1/13/2011	11:30:37 AM	Bypass valve opened
1/13/2011	11:30:37 AM	Helium MFC set to  0.000000
1/13/2011	11:30:37 AM	H2 MFC set to  0.000000
1/13/2011	11:30:37 AM	BCl3 MFC set to  0.000000
1/13/2011	11:30:37 AM	PHl3 MFC set to  0.000000
1/13/2011	11:30:37 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:30:37 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:30:38 AM	Tube furnace set to 0
1/13/2011	11:30:38 AM	Run finished at 11:30 AM
1/13/2011	11:30:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	11:31:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	11:31:57 AM	Recipe started at 11:31 AM
1/13/2011	11:31:57 AM	Helium valve closed
1/13/2011	11:31:57 AM	H2 valve closed
1/13/2011	11:31:57 AM	BCl3 valve closed
1/13/2011	11:31:57 AM	PH3 valve closed
1/13/2011	11:31:57 AM	SiCl4 pre valve closed
1/13/2011	11:31:57 AM	SiCl4 post valve closed
1/13/2011	11:31:57 AM	Main Vac valve closed
1/13/2011	11:31:57 AM	Bubbler valve closed
1/13/2011	11:31:57 AM	Bypass valve opened
1/13/2011	11:31:57 AM	Helium MFC set to  0.000000
1/13/2011	11:31:57 AM	H2 MFC set to  0.000000
1/13/2011	11:31:57 AM	BCl3 MFC set to  0.000000
1/13/2011	11:31:57 AM	PHl3 MFC set to  0.000000
1/13/2011	11:31:57 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:31:57 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:31:58 AM	Tube furnace set to 0
1/13/2011	11:31:58 AM	Helium valve closed
1/13/2011	11:31:58 AM	H2 valve closed
1/13/2011	11:31:58 AM	BCl3 valve closed
1/13/2011	11:31:58 AM	PH3 valve closed
1/13/2011	11:31:58 AM	SiCl4 pre valve closed
1/13/2011	11:31:58 AM	SiCl4 post valve closed
1/13/2011	11:31:58 AM	Bubbler valve closed
1/13/2011	11:31:58 AM	Main Vac valve opened
1/13/2011	11:31:58 AM	Bypass valve opened
1/13/2011	11:31:58 AM	Helium MFC set to  0.000000
1/13/2011	11:31:58 AM	H2 MFC set to  0.000000
1/13/2011	11:31:58 AM	BCl3 MFC set to  0.000000
1/13/2011	11:31:58 AM	PHl3 MFC set to  0.000000
1/13/2011	11:31:58 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:31:58 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:31:58 AM	Tube furnace set to 0
1/13/2011	11:32:58 AM	H2 valve closed
1/13/2011	11:32:58 AM	BCl3 valve closed
1/13/2011	11:32:58 AM	PH3 valve closed
1/13/2011	11:32:58 AM	SiCl4 pre valve closed
1/13/2011	11:32:58 AM	SiCl4 post valve closed
1/13/2011	11:32:58 AM	Bubbler valve closed
1/13/2011	11:32:58 AM	Helium valve opened
1/13/2011	11:32:58 AM	Main Vac valve opened
1/13/2011	11:32:58 AM	Bypass valve opened
1/13/2011	11:32:58 AM	Helium MFC set to  100.000000
1/13/2011	11:32:58 AM	H2 MFC set to  0.000000
1/13/2011	11:32:58 AM	BCl3 MFC set to  0.000000
1/13/2011	11:32:58 AM	PHl3 MFC set to  0.000000
1/13/2011	11:32:58 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:32:58 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:32:58 AM	Tube furnace set to 0
1/13/2011	11:33:58 AM	Helium valve closed
1/13/2011	11:33:58 AM	H2 valve closed
1/13/2011	11:33:58 AM	BCl3 valve closed
1/13/2011	11:33:58 AM	PH3 valve closed
1/13/2011	11:33:58 AM	SiCl4 pre valve closed
1/13/2011	11:33:58 AM	SiCl4 post valve closed
1/13/2011	11:33:58 AM	Bubbler valve closed
1/13/2011	11:33:58 AM	Main Vac valve opened
1/13/2011	11:33:58 AM	Bypass valve opened
1/13/2011	11:33:58 AM	Helium MFC set to  0.000000
1/13/2011	11:33:58 AM	H2 MFC set to  0.000000
1/13/2011	11:33:58 AM	BCl3 MFC set to  0.000000
1/13/2011	11:33:58 AM	PHl3 MFC set to  0.000000
1/13/2011	11:33:58 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:33:58 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:33:58 AM	Tube furnace set to 0
1/13/2011	11:34:58 AM	H2 valve closed
1/13/2011	11:34:58 AM	BCl3 valve closed
1/13/2011	11:34:58 AM	PH3 valve closed
1/13/2011	11:34:58 AM	SiCl4 pre valve closed
1/13/2011	11:34:58 AM	SiCl4 post valve closed
1/13/2011	11:34:58 AM	Bubbler valve closed
1/13/2011	11:34:58 AM	Helium valve opened
1/13/2011	11:34:58 AM	Main Vac valve opened
1/13/2011	11:34:58 AM	Bypass valve opened
1/13/2011	11:34:58 AM	Helium MFC set to  100.000000
1/13/2011	11:34:58 AM	H2 MFC set to  0.000000
1/13/2011	11:34:58 AM	BCl3 MFC set to  0.000000
1/13/2011	11:34:58 AM	PHl3 MFC set to  0.000000
1/13/2011	11:34:58 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:34:58 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:34:59 AM	Tube furnace set to 0
1/13/2011	11:35:59 AM	Helium valve closed
1/13/2011	11:35:59 AM	H2 valve closed
1/13/2011	11:35:59 AM	BCl3 valve closed
1/13/2011	11:35:59 AM	PH3 valve closed
1/13/2011	11:35:59 AM	SiCl4 pre valve closed
1/13/2011	11:35:59 AM	SiCl4 post valve closed
1/13/2011	11:35:59 AM	Bubbler valve closed
1/13/2011	11:35:59 AM	Main Vac valve opened
1/13/2011	11:35:59 AM	Bypass valve opened
1/13/2011	11:35:59 AM	Helium MFC set to  0.000000
1/13/2011	11:35:59 AM	H2 MFC set to  0.000000
1/13/2011	11:35:59 AM	BCl3 MFC set to  0.000000
1/13/2011	11:35:59 AM	PHl3 MFC set to  0.000000
1/13/2011	11:35:59 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:35:59 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:35:59 AM	Tube furnace set to 0
1/13/2011	11:36:59 AM	H2 valve closed
1/13/2011	11:36:59 AM	BCl3 valve closed
1/13/2011	11:36:59 AM	PH3 valve closed
1/13/2011	11:36:59 AM	SiCl4 pre valve closed
1/13/2011	11:36:59 AM	SiCl4 post valve closed
1/13/2011	11:36:59 AM	Bubbler valve closed
1/13/2011	11:36:59 AM	Helium valve opened
1/13/2011	11:36:59 AM	Main Vac valve opened
1/13/2011	11:36:59 AM	Bypass valve opened
1/13/2011	11:36:59 AM	Helium MFC set to  100.000000
1/13/2011	11:36:59 AM	H2 MFC set to  0.000000
1/13/2011	11:36:59 AM	BCl3 MFC set to  0.000000
1/13/2011	11:36:59 AM	PHl3 MFC set to  0.000000
1/13/2011	11:36:59 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:36:59 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:36:59 AM	Tube furnace set to 0
1/13/2011	11:37:59 AM	Helium valve closed
1/13/2011	11:37:59 AM	H2 valve closed
1/13/2011	11:37:59 AM	BCl3 valve closed
1/13/2011	11:37:59 AM	PH3 valve closed
1/13/2011	11:37:59 AM	SiCl4 pre valve closed
1/13/2011	11:37:59 AM	SiCl4 post valve closed
1/13/2011	11:37:59 AM	Bubbler valve closed
1/13/2011	11:37:59 AM	Main Vac valve opened
1/13/2011	11:37:59 AM	Bypass valve opened
1/13/2011	11:37:59 AM	Helium MFC set to  0.000000
1/13/2011	11:37:59 AM	H2 MFC set to  0.000000
1/13/2011	11:37:59 AM	BCl3 MFC set to  0.000000
1/13/2011	11:37:59 AM	PHl3 MFC set to  0.000000
1/13/2011	11:37:59 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:37:59 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:37:59 AM	Tube furnace set to 0
1/13/2011	11:38:59 AM	H2 valve closed
1/13/2011	11:38:59 AM	BCl3 valve closed
1/13/2011	11:38:59 AM	PH3 valve closed
1/13/2011	11:38:59 AM	SiCl4 pre valve closed
1/13/2011	11:38:59 AM	SiCl4 post valve closed
1/13/2011	11:38:59 AM	Bubbler valve closed
1/13/2011	11:38:59 AM	Helium valve opened
1/13/2011	11:38:59 AM	Main Vac valve opened
1/13/2011	11:38:59 AM	Bypass valve opened
1/13/2011	11:38:59 AM	Helium MFC set to  100.000000
1/13/2011	11:38:59 AM	H2 MFC set to  0.000000
1/13/2011	11:38:59 AM	BCl3 MFC set to  0.000000
1/13/2011	11:38:59 AM	PHl3 MFC set to  0.000000
1/13/2011	11:38:59 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:38:59 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:38:59 AM	Tube furnace set to 0
1/13/2011	11:39:59 AM	Helium valve closed
1/13/2011	11:39:59 AM	H2 valve closed
1/13/2011	11:39:59 AM	BCl3 valve closed
1/13/2011	11:39:59 AM	PH3 valve closed
1/13/2011	11:39:59 AM	SiCl4 pre valve closed
1/13/2011	11:39:59 AM	SiCl4 post valve closed
1/13/2011	11:39:59 AM	Bubbler valve closed
1/13/2011	11:39:59 AM	Main Vac valve opened
1/13/2011	11:39:59 AM	Bypass valve opened
1/13/2011	11:39:59 AM	Helium MFC set to  0.000000
1/13/2011	11:39:59 AM	H2 MFC set to  0.000000
1/13/2011	11:39:59 AM	BCl3 MFC set to  0.000000
1/13/2011	11:39:59 AM	PHl3 MFC set to  0.000000
1/13/2011	11:39:59 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:39:59 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:40:00 AM	Tube furnace set to 0
1/13/2011	11:41:00 AM	H2 valve closed
1/13/2011	11:41:00 AM	BCl3 valve closed
1/13/2011	11:41:00 AM	PH3 valve closed
1/13/2011	11:41:00 AM	SiCl4 pre valve closed
1/13/2011	11:41:00 AM	SiCl4 post valve closed
1/13/2011	11:41:00 AM	Bubbler valve closed
1/13/2011	11:41:00 AM	Helium valve opened
1/13/2011	11:41:00 AM	Main Vac valve opened
1/13/2011	11:41:00 AM	Bypass valve opened
1/13/2011	11:41:00 AM	Helium MFC set to  100.000000
1/13/2011	11:41:00 AM	H2 MFC set to  0.000000
1/13/2011	11:41:00 AM	BCl3 MFC set to  0.000000
1/13/2011	11:41:00 AM	PHl3 MFC set to  0.000000
1/13/2011	11:41:00 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:41:00 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:41:00 AM	Tube furnace set to 0
1/13/2011	11:42:00 AM	Helium valve closed
1/13/2011	11:42:00 AM	H2 valve closed
1/13/2011	11:42:00 AM	BCl3 valve closed
1/13/2011	11:42:00 AM	PH3 valve closed
1/13/2011	11:42:00 AM	SiCl4 pre valve closed
1/13/2011	11:42:00 AM	SiCl4 post valve closed
1/13/2011	11:42:00 AM	Bubbler valve closed
1/13/2011	11:42:00 AM	Main Vac valve opened
1/13/2011	11:42:00 AM	Bypass valve opened
1/13/2011	11:42:00 AM	Helium MFC set to  0.000000
1/13/2011	11:42:00 AM	H2 MFC set to  0.000000
1/13/2011	11:42:00 AM	BCl3 MFC set to  0.000000
1/13/2011	11:42:00 AM	PHl3 MFC set to  0.000000
1/13/2011	11:42:00 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:42:00 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:42:00 AM	Tube furnace set to 0
1/13/2011	11:43:00 AM	H2 valve closed
1/13/2011	11:43:00 AM	BCl3 valve closed
1/13/2011	11:43:00 AM	PH3 valve closed
1/13/2011	11:43:00 AM	SiCl4 pre valve closed
1/13/2011	11:43:00 AM	SiCl4 post valve closed
1/13/2011	11:43:00 AM	Bubbler valve closed
1/13/2011	11:43:00 AM	Helium valve opened
1/13/2011	11:43:00 AM	Main Vac valve opened
1/13/2011	11:43:00 AM	Bypass valve opened
1/13/2011	11:43:00 AM	Helium MFC set to  100.000000
1/13/2011	11:43:00 AM	H2 MFC set to  0.000000
1/13/2011	11:43:00 AM	BCl3 MFC set to  0.000000
1/13/2011	11:43:00 AM	PHl3 MFC set to  0.000000
1/13/2011	11:43:00 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:43:00 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:43:00 AM	Tube furnace set to 0
1/13/2011	11:44:00 AM	Helium valve closed
1/13/2011	11:44:00 AM	H2 valve closed
1/13/2011	11:44:00 AM	BCl3 valve closed
1/13/2011	11:44:00 AM	PH3 valve closed
1/13/2011	11:44:00 AM	SiCl4 pre valve closed
1/13/2011	11:44:00 AM	SiCl4 post valve closed
1/13/2011	11:44:00 AM	Bubbler valve closed
1/13/2011	11:44:00 AM	Main Vac valve opened
1/13/2011	11:44:00 AM	Bypass valve opened
1/13/2011	11:44:00 AM	Helium MFC set to  0.000000
1/13/2011	11:44:00 AM	H2 MFC set to  0.000000
1/13/2011	11:44:00 AM	BCl3 MFC set to  0.000000
1/13/2011	11:44:00 AM	PHl3 MFC set to  0.000000
1/13/2011	11:44:00 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:44:00 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:44:00 AM	Tube furnace set to 0
1/13/2011	11:45:00 AM	H2 valve closed
1/13/2011	11:45:00 AM	BCl3 valve closed
1/13/2011	11:45:00 AM	PH3 valve closed
1/13/2011	11:45:00 AM	SiCl4 pre valve closed
1/13/2011	11:45:00 AM	SiCl4 post valve closed
1/13/2011	11:45:00 AM	Bubbler valve closed
1/13/2011	11:45:00 AM	Helium valve opened
1/13/2011	11:45:00 AM	Main Vac valve opened
1/13/2011	11:45:00 AM	Bypass valve opened
1/13/2011	11:45:00 AM	Helium MFC set to  100.000000
1/13/2011	11:45:00 AM	H2 MFC set to  0.000000
1/13/2011	11:45:00 AM	BCl3 MFC set to  0.000000
1/13/2011	11:45:00 AM	PHl3 MFC set to  0.000000
1/13/2011	11:45:00 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:45:01 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:45:01 AM	Tube furnace set to 0
1/13/2011	11:46:01 AM	Helium valve closed
1/13/2011	11:46:01 AM	H2 valve closed
1/13/2011	11:46:01 AM	BCl3 valve closed
1/13/2011	11:46:01 AM	PH3 valve closed
1/13/2011	11:46:01 AM	SiCl4 pre valve closed
1/13/2011	11:46:01 AM	SiCl4 post valve closed
1/13/2011	11:46:01 AM	Bubbler valve closed
1/13/2011	11:46:01 AM	Main Vac valve opened
1/13/2011	11:46:01 AM	Bypass valve opened
1/13/2011	11:46:01 AM	Helium MFC set to  0.000000
1/13/2011	11:46:01 AM	H2 MFC set to  0.000000
1/13/2011	11:46:01 AM	BCl3 MFC set to  0.000000
1/13/2011	11:46:01 AM	PHl3 MFC set to  0.000000
1/13/2011	11:46:01 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:46:01 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:46:01 AM	Tube furnace set to 0
1/13/2011	11:47:01 AM	H2 valve closed
1/13/2011	11:47:01 AM	BCl3 valve closed
1/13/2011	11:47:01 AM	PH3 valve closed
1/13/2011	11:47:01 AM	SiCl4 pre valve closed
1/13/2011	11:47:01 AM	SiCl4 post valve closed
1/13/2011	11:47:01 AM	Bubbler valve closed
1/13/2011	11:47:01 AM	Helium valve opened
1/13/2011	11:47:01 AM	Main Vac valve opened
1/13/2011	11:47:01 AM	Bypass valve opened
1/13/2011	11:47:01 AM	Helium MFC set to  100.000000
1/13/2011	11:47:01 AM	H2 MFC set to  0.000000
1/13/2011	11:47:01 AM	BCl3 MFC set to  0.000000
1/13/2011	11:47:01 AM	PHl3 MFC set to  0.000000
1/13/2011	11:47:01 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:47:01 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:47:01 AM	Tube furnace set to 0
1/13/2011	11:48:01 AM	Helium valve closed
1/13/2011	11:48:01 AM	H2 valve closed
1/13/2011	11:48:01 AM	BCl3 valve closed
1/13/2011	11:48:01 AM	PH3 valve closed
1/13/2011	11:48:01 AM	SiCl4 pre valve closed
1/13/2011	11:48:01 AM	SiCl4 post valve closed
1/13/2011	11:48:01 AM	Bubbler valve closed
1/13/2011	11:48:01 AM	Main Vac valve opened
1/13/2011	11:48:01 AM	Bypass valve opened
1/13/2011	11:48:01 AM	Helium MFC set to  0.000000
1/13/2011	11:48:01 AM	H2 MFC set to  0.000000
1/13/2011	11:48:01 AM	BCl3 MFC set to  0.000000
1/13/2011	11:48:01 AM	PHl3 MFC set to  0.000000
1/13/2011	11:48:01 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:48:01 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:48:01 AM	Tube furnace set to 0
1/13/2011	11:49:01 AM	H2 valve closed
1/13/2011	11:49:01 AM	BCl3 valve closed
1/13/2011	11:49:01 AM	PH3 valve closed
1/13/2011	11:49:01 AM	SiCl4 pre valve closed
1/13/2011	11:49:01 AM	SiCl4 post valve closed
1/13/2011	11:49:01 AM	Bubbler valve closed
1/13/2011	11:49:01 AM	Helium valve opened
1/13/2011	11:49:01 AM	Main Vac valve opened
1/13/2011	11:49:01 AM	Bypass valve opened
1/13/2011	11:49:01 AM	Helium MFC set to  100.000000
1/13/2011	11:49:01 AM	H2 MFC set to  0.000000
1/13/2011	11:49:01 AM	BCl3 MFC set to  0.000000
1/13/2011	11:49:01 AM	PHl3 MFC set to  0.000000
1/13/2011	11:49:01 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:49:01 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:49:01 AM	Tube furnace set to 0
1/13/2011	11:50:01 AM	Helium valve closed
1/13/2011	11:50:01 AM	H2 valve closed
1/13/2011	11:50:01 AM	BCl3 valve closed
1/13/2011	11:50:02 AM	PH3 valve closed
1/13/2011	11:50:02 AM	SiCl4 pre valve closed
1/13/2011	11:50:02 AM	SiCl4 post valve closed
1/13/2011	11:50:02 AM	Bubbler valve closed
1/13/2011	11:50:02 AM	Main Vac valve opened
1/13/2011	11:50:02 AM	Bypass valve opened
1/13/2011	11:50:02 AM	Helium MFC set to  0.000000
1/13/2011	11:50:02 AM	H2 MFC set to  0.000000
1/13/2011	11:50:02 AM	BCl3 MFC set to  0.000000
1/13/2011	11:50:02 AM	PHl3 MFC set to  0.000000
1/13/2011	11:50:02 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:50:02 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:50:02 AM	Tube furnace set to 0
1/13/2011	11:51:02 AM	H2 valve closed
1/13/2011	11:51:02 AM	BCl3 valve closed
1/13/2011	11:51:02 AM	PH3 valve closed
1/13/2011	11:51:02 AM	SiCl4 pre valve closed
1/13/2011	11:51:02 AM	SiCl4 post valve closed
1/13/2011	11:51:02 AM	Bubbler valve closed
1/13/2011	11:51:02 AM	Helium valve opened
1/13/2011	11:51:02 AM	Main Vac valve opened
1/13/2011	11:51:02 AM	Bypass valve opened
1/13/2011	11:51:02 AM	Helium MFC set to  100.000000
1/13/2011	11:51:02 AM	H2 MFC set to  0.000000
1/13/2011	11:51:02 AM	BCl3 MFC set to  0.000000
1/13/2011	11:51:02 AM	PHl3 MFC set to  0.000000
1/13/2011	11:51:02 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:51:02 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:51:02 AM	Tube furnace set to 0
1/13/2011	11:52:02 AM	Helium valve closed
1/13/2011	11:52:02 AM	H2 valve closed
1/13/2011	11:52:02 AM	BCl3 valve closed
1/13/2011	11:52:02 AM	PH3 valve closed
1/13/2011	11:52:02 AM	SiCl4 pre valve closed
1/13/2011	11:52:02 AM	SiCl4 post valve closed
1/13/2011	11:52:02 AM	Bubbler valve closed
1/13/2011	11:52:02 AM	Main Vac valve opened
1/13/2011	11:52:02 AM	Bypass valve opened
1/13/2011	11:52:02 AM	Helium MFC set to  0.000000
1/13/2011	11:52:02 AM	H2 MFC set to  0.000000
1/13/2011	11:52:02 AM	BCl3 MFC set to  0.000000
1/13/2011	11:52:02 AM	PHl3 MFC set to  0.000000
1/13/2011	11:52:02 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:52:02 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:52:02 AM	Tube furnace set to 0
1/13/2011	11:52:03 AM	Run finished at 11:52 AM
1/13/2011	11:52:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	11:54:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/13/2011	11:54:00 AM	Recipe started at 11:54 AM
1/13/2011	11:54:00 AM	Helium valve closed
1/13/2011	11:54:00 AM	H2 valve closed
1/13/2011	11:54:00 AM	BCl3 valve closed
1/13/2011	11:54:00 AM	PH3 valve closed
1/13/2011	11:54:00 AM	SiCl4 pre valve closed
1/13/2011	11:54:00 AM	SiCl4 post valve closed
1/13/2011	11:54:00 AM	Main Vac valve closed
1/13/2011	11:54:00 AM	Bypass valve closed
1/13/2011	11:54:00 AM	Bubbler valve closed
1/13/2011	11:54:00 AM	Helium MFC set to  0.000000
1/13/2011	11:54:00 AM	H2 MFC set to  0.000000
1/13/2011	11:54:00 AM	BCl3 MFC set to  0.000000
1/13/2011	11:54:00 AM	PHl3 MFC set to  0.000000
1/13/2011	11:54:00 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:54:00 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:54:00 AM	Tube furnace set to 0
1/13/2011	11:54:00 AM	Run finished at 11:54 AM
1/13/2011	11:54:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/13/2011	11:54:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	11:54:15 AM	Recipe started at 11:54 AM
1/13/2011	11:54:15 AM	Helium valve closed
1/13/2011	11:54:15 AM	H2 valve closed
1/13/2011	11:54:15 AM	BCl3 valve closed
1/13/2011	11:54:15 AM	PH3 valve closed
1/13/2011	11:54:15 AM	SiCl4 pre valve closed
1/13/2011	11:54:15 AM	SiCl4 post valve closed
1/13/2011	11:54:15 AM	Main Vac valve closed
1/13/2011	11:54:15 AM	Bubbler valve closed
1/13/2011	11:54:15 AM	Bypass valve opened
1/13/2011	11:54:15 AM	Helium MFC set to  0.000000
1/13/2011	11:54:15 AM	H2 MFC set to  0.000000
1/13/2011	11:54:15 AM	BCl3 MFC set to  0.000000
1/13/2011	11:54:15 AM	PHl3 MFC set to  0.000000
1/13/2011	11:54:15 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:54:15 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:54:15 AM	Tube furnace set to 0
1/13/2011	11:54:15 AM	Helium valve closed
1/13/2011	11:54:15 AM	H2 valve closed
1/13/2011	11:54:15 AM	BCl3 valve closed
1/13/2011	11:54:15 AM	PH3 valve closed
1/13/2011	11:54:15 AM	SiCl4 pre valve closed
1/13/2011	11:54:15 AM	SiCl4 post valve closed
1/13/2011	11:54:15 AM	Bubbler valve closed
1/13/2011	11:54:15 AM	Main Vac valve opened
1/13/2011	11:54:15 AM	Bypass valve opened
1/13/2011	11:54:15 AM	Helium MFC set to  0.000000
1/13/2011	11:54:15 AM	H2 MFC set to  0.000000
1/13/2011	11:54:15 AM	BCl3 MFC set to  0.000000
1/13/2011	11:54:15 AM	PHl3 MFC set to  0.000000
1/13/2011	11:54:15 AM	SiCl4 MFC set to  0.000000
1/13/2011	11:54:15 AM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:54:15 AM	Tube furnace set to 0
1/13/2011	11:54:16 AM	Run finished at 11:54 AM
1/13/2011	11:54:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	12:00:13 PM	Recipe started at 12:00 PM
1/13/2011	12:00:13 PM	Helium valve closed
1/13/2011	12:00:13 PM	BCl3 valve closed
1/13/2011	12:00:13 PM	PH3 valve closed
1/13/2011	12:00:13 PM	SiCl4 pre valve closed
1/13/2011	12:00:13 PM	SiCl4 post valve closed
1/13/2011	12:00:13 PM	Main Vac valve closed
1/13/2011	12:00:13 PM	Bypass valve closed
1/13/2011	12:00:13 PM	Bubbler valve closed
1/13/2011	12:00:13 PM	H2 valve opened
1/13/2011	12:00:13 PM	Helium MFC set to  0.000000
1/13/2011	12:00:13 PM	H2 MFC set to  500.000000
1/13/2011	12:00:13 PM	BCl3 MFC set to  0.000000
1/13/2011	12:00:13 PM	PHl3 MFC set to  0.000000
1/13/2011	12:00:13 PM	SiCl4 MFC set to  0.000000
1/13/2011	12:00:13 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	12:00:13 PM	Tube furnace set to 0
1/13/2011	12:01:38 PM	Helium valve closed
1/13/2011	12:01:38 PM	BCl3 valve closed
1/13/2011	12:01:38 PM	PH3 valve closed
1/13/2011	12:01:38 PM	SiCl4 pre valve closed
1/13/2011	12:01:38 PM	SiCl4 post valve closed
1/13/2011	12:01:38 PM	Main Vac valve closed
1/13/2011	12:01:38 PM	Bypass valve closed
1/13/2011	12:01:38 PM	H2 valve opened
1/13/2011	12:01:38 PM	Bubbler valve opened
1/13/2011	12:01:38 PM	Helium MFC set to  0.000000
1/13/2011	12:01:38 PM	H2 MFC set to  500.000000
1/13/2011	12:01:38 PM	BCl3 MFC set to  0.000000
1/13/2011	12:01:38 PM	PHl3 MFC set to  0.000000
1/13/2011	12:01:38 PM	SiCl4 MFC set to  0.000000
1/13/2011	12:01:38 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	12:01:38 PM	Tube furnace set to 1000
1/13/2011	12:21:38 PM	Helium valve closed
1/13/2011	12:21:38 PM	PH3 valve closed
1/13/2011	12:21:38 PM	Main Vac valve closed
1/13/2011	12:21:38 PM	Bypass valve closed
1/13/2011	12:21:38 PM	H2 valve opened
1/13/2011	12:21:38 PM	BCl3 valve opened
1/13/2011	12:21:38 PM	SiCl4 pre valve opened
1/13/2011	12:21:38 PM	SiCl4 post valve opened
1/13/2011	12:21:38 PM	Bubbler valve opened
1/13/2011	12:21:38 PM	Helium MFC set to  0.000000
1/13/2011	12:21:38 PM	H2 MFC set to  500.000000
1/13/2011	12:21:38 PM	BCl3 MFC set to  1.800000
1/13/2011	12:21:38 PM	PHl3 MFC set to  0.000000
1/13/2011	12:21:38 PM	SiCl4 MFC set to  50.000000
1/13/2011	12:21:38 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	12:21:38 PM	Tube furnace set to 1000
1/13/2011	12:36:38 PM	H2 valve closed
1/13/2011	12:36:38 PM	BCl3 valve closed
1/13/2011	12:36:38 PM	PH3 valve closed
1/13/2011	12:36:38 PM	SiCl4 pre valve closed
1/13/2011	12:36:38 PM	SiCl4 post valve closed
1/13/2011	12:36:38 PM	Main Vac valve closed
1/13/2011	12:36:38 PM	Bypass valve closed
1/13/2011	12:36:38 PM	Helium valve opened
1/13/2011	12:36:38 PM	Bubbler valve opened
1/13/2011	12:36:38 PM	Helium MFC set to  500.000000
1/13/2011	12:36:38 PM	H2 MFC set to  0.000000
1/13/2011	12:36:38 PM	BCl3 MFC set to  0.000000
1/13/2011	12:36:38 PM	PHl3 MFC set to  0.000000
1/13/2011	12:36:38 PM	SiCl4 MFC set to  0.000000
1/13/2011	12:36:38 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	12:36:38 PM	Tube furnace set to 0
1/13/2011	12:56:38 PM	Helium valve closed
1/13/2011	12:56:38 PM	H2 valve closed
1/13/2011	12:56:38 PM	BCl3 valve closed
1/13/2011	12:56:38 PM	PH3 valve closed
1/13/2011	12:56:38 PM	SiCl4 pre valve closed
1/13/2011	12:56:38 PM	SiCl4 post valve closed
1/13/2011	12:56:38 PM	Main Vac valve closed
1/13/2011	12:56:38 PM	Bypass valve closed
1/13/2011	12:56:38 PM	Bubbler valve closed
1/13/2011	12:56:38 PM	Helium MFC set to  0.000000
1/13/2011	12:56:38 PM	H2 MFC set to  0.000000
1/13/2011	12:56:38 PM	BCl3 MFC set to  0.000000
1/13/2011	12:56:38 PM	PHl3 MFC set to  0.000000
1/13/2011	12:56:38 PM	SiCl4 MFC set to  0.000000
1/13/2011	12:56:38 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	12:56:38 PM	Tube furnace set to 0
1/13/2011	12:56:39 PM	Run finished at 12:56 PM
1/13/2011	1:22:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2011	1:22:12 PM	Recipe started at 1:22 PM
1/13/2011	1:22:12 PM	H2 valve closed
1/13/2011	1:22:12 PM	BCl3 valve closed
1/13/2011	1:22:12 PM	PH3 valve closed
1/13/2011	1:22:12 PM	SiCl4 pre valve closed
1/13/2011	1:22:12 PM	SiCl4 post valve closed
1/13/2011	1:22:12 PM	Main Vac valve closed
1/13/2011	1:22:12 PM	Bypass valve closed
1/13/2011	1:22:12 PM	Bubbler valve closed
1/13/2011	1:22:12 PM	Helium valve opened
1/13/2011	1:22:12 PM	Helium MFC set to  500.000000
1/13/2011	1:22:12 PM	H2 MFC set to  0.000000
1/13/2011	1:22:12 PM	BCl3 MFC set to  0.000000
1/13/2011	1:22:12 PM	PHl3 MFC set to  0.000000
1/13/2011	1:22:12 PM	SiCl4 MFC set to  0.000000
1/13/2011	1:22:12 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	1:22:12 PM	Tube furnace set to 0
1/13/2011	1:22:19 PM	Helium valve closed
1/13/2011	1:22:19 PM	H2 valve closed
1/13/2011	1:22:19 PM	BCl3 valve closed
1/13/2011	1:22:19 PM	PH3 valve closed
1/13/2011	1:22:19 PM	SiCl4 pre valve closed
1/13/2011	1:22:19 PM	SiCl4 post valve closed
1/13/2011	1:22:19 PM	Main Vac valve closed
1/13/2011	1:22:19 PM	Bypass valve closed
1/13/2011	1:22:19 PM	Bubbler valve closed
1/13/2011	1:22:19 PM	Helium MFC set to  0.000000
1/13/2011	1:22:19 PM	H2 MFC set to  0.000000
1/13/2011	1:22:19 PM	BCl3 MFC set to  0.000000
1/13/2011	1:22:19 PM	PHl3 MFC set to  0.000000
1/13/2011	1:22:19 PM	SiCl4 MFC set to  0.000000
1/13/2011	1:22:19 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	1:22:19 PM	Tube furnace set to 0
1/13/2011	1:22:19 PM	Run finished at 1:22 PM
1/13/2011	1:22:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2011	1:24:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	1:24:37 PM	Recipe started at 1:24 PM
1/13/2011	1:24:37 PM	Helium valve closed
1/13/2011	1:24:37 PM	H2 valve closed
1/13/2011	1:24:37 PM	BCl3 valve closed
1/13/2011	1:24:37 PM	PH3 valve closed
1/13/2011	1:24:37 PM	SiCl4 pre valve closed
1/13/2011	1:24:37 PM	SiCl4 post valve closed
1/13/2011	1:24:37 PM	Main Vac valve closed
1/13/2011	1:24:37 PM	Bubbler valve closed
1/13/2011	1:24:37 PM	Bypass valve opened
1/13/2011	1:24:37 PM	Helium MFC set to  0.000000
1/13/2011	1:24:37 PM	H2 MFC set to  0.000000
1/13/2011	1:24:37 PM	BCl3 MFC set to  0.000000
1/13/2011	1:24:37 PM	PHl3 MFC set to  0.000000
1/13/2011	1:24:37 PM	SiCl4 MFC set to  0.000000
1/13/2011	1:24:37 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	1:24:38 PM	Tube furnace set to 0
1/13/2011	1:25:09 PM	Helium valve closed
1/13/2011	1:25:09 PM	H2 valve closed
1/13/2011	1:25:09 PM	BCl3 valve closed
1/13/2011	1:25:09 PM	PH3 valve closed
1/13/2011	1:25:09 PM	SiCl4 pre valve closed
1/13/2011	1:25:09 PM	SiCl4 post valve closed
1/13/2011	1:25:09 PM	Bubbler valve closed
1/13/2011	1:25:09 PM	Main Vac valve opened
1/13/2011	1:25:09 PM	Bypass valve opened
1/13/2011	1:25:09 PM	Helium MFC set to  0.000000
1/13/2011	1:25:09 PM	H2 MFC set to  0.000000
1/13/2011	1:25:09 PM	BCl3 MFC set to  0.000000
1/13/2011	1:25:09 PM	PHl3 MFC set to  0.000000
1/13/2011	1:25:09 PM	SiCl4 MFC set to  0.000000
1/13/2011	1:25:09 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	1:25:09 PM	Tube furnace set to 0
1/13/2011	1:25:10 PM	Run finished at 1:25 PM
1/13/2011	1:25:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	1:41:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2011	1:41:53 PM	Recipe started at 1:41 PM
1/13/2011	1:41:53 PM	H2 valve closed
1/13/2011	1:41:53 PM	BCl3 valve closed
1/13/2011	1:41:53 PM	PH3 valve closed
1/13/2011	1:41:53 PM	SiCl4 pre valve closed
1/13/2011	1:41:53 PM	SiCl4 post valve closed
1/13/2011	1:41:53 PM	Main Vac valve closed
1/13/2011	1:41:53 PM	Bypass valve closed
1/13/2011	1:41:53 PM	Bubbler valve closed
1/13/2011	1:41:53 PM	Helium valve opened
1/13/2011	1:41:53 PM	Helium MFC set to  500.000000
1/13/2011	1:41:53 PM	H2 MFC set to  0.000000
1/13/2011	1:41:53 PM	BCl3 MFC set to  0.000000
1/13/2011	1:41:53 PM	PHl3 MFC set to  0.000000
1/13/2011	1:41:53 PM	SiCl4 MFC set to  0.000000
1/13/2011	1:41:53 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	1:41:53 PM	Tube furnace set to 0
1/13/2011	1:43:13 PM	Helium valve closed
1/13/2011	1:43:13 PM	H2 valve closed
1/13/2011	1:43:13 PM	BCl3 valve closed
1/13/2011	1:43:13 PM	PH3 valve closed
1/13/2011	1:43:13 PM	SiCl4 pre valve closed
1/13/2011	1:43:13 PM	SiCl4 post valve closed
1/13/2011	1:43:13 PM	Main Vac valve closed
1/13/2011	1:43:13 PM	Bypass valve closed
1/13/2011	1:43:13 PM	Bubbler valve closed
1/13/2011	1:43:13 PM	Helium MFC set to  0.000000
1/13/2011	1:43:13 PM	H2 MFC set to  0.000000
1/13/2011	1:43:13 PM	BCl3 MFC set to  0.000000
1/13/2011	1:43:13 PM	PHl3 MFC set to  0.000000
1/13/2011	1:43:13 PM	SiCl4 MFC set to  0.000000
1/13/2011	1:43:13 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	1:43:14 PM	Tube furnace set to 0
1/13/2011	1:43:14 PM	Run finished at 1:43 PM
1/13/2011	1:43:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2011	1:51:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	1:51:41 PM	Recipe started at 1:51 PM
1/13/2011	1:51:41 PM	Helium valve closed
1/13/2011	1:51:41 PM	H2 valve closed
1/13/2011	1:51:41 PM	BCl3 valve closed
1/13/2011	1:51:41 PM	PH3 valve closed
1/13/2011	1:51:41 PM	SiCl4 pre valve closed
1/13/2011	1:51:41 PM	SiCl4 post valve closed
1/13/2011	1:51:41 PM	Main Vac valve closed
1/13/2011	1:51:41 PM	Bubbler valve closed
1/13/2011	1:51:41 PM	Bypass valve opened
1/13/2011	1:51:41 PM	Helium MFC set to  0.000000
1/13/2011	1:51:41 PM	H2 MFC set to  0.000000
1/13/2011	1:51:41 PM	BCl3 MFC set to  0.000000
1/13/2011	1:51:41 PM	PHl3 MFC set to  0.000000
1/13/2011	1:51:41 PM	SiCl4 MFC set to  0.000000
1/13/2011	1:51:41 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	1:51:41 PM	Tube furnace set to 0
1/13/2011	1:52:13 PM	Helium valve closed
1/13/2011	1:52:13 PM	H2 valve closed
1/13/2011	1:52:13 PM	BCl3 valve closed
1/13/2011	1:52:13 PM	PH3 valve closed
1/13/2011	1:52:13 PM	SiCl4 pre valve closed
1/13/2011	1:52:13 PM	SiCl4 post valve closed
1/13/2011	1:52:13 PM	Bubbler valve closed
1/13/2011	1:52:13 PM	Main Vac valve opened
1/13/2011	1:52:13 PM	Bypass valve opened
1/13/2011	1:52:13 PM	Helium MFC set to  0.000000
1/13/2011	1:52:13 PM	H2 MFC set to  0.000000
1/13/2011	1:52:13 PM	BCl3 MFC set to  0.000000
1/13/2011	1:52:13 PM	PHl3 MFC set to  0.000000
1/13/2011	1:52:13 PM	SiCl4 MFC set to  0.000000
1/13/2011	1:52:13 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	1:52:13 PM	Tube furnace set to 0
1/13/2011	1:52:13 PM	Run finished at 1:52 PM
1/13/2011	1:52:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	1:52:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	1:52:39 PM	Recipe started at 1:52 PM
1/13/2011	1:52:39 PM	Helium valve closed
1/13/2011	1:52:39 PM	H2 valve closed
1/13/2011	1:52:39 PM	BCl3 valve closed
1/13/2011	1:52:39 PM	PH3 valve closed
1/13/2011	1:52:39 PM	SiCl4 pre valve closed
1/13/2011	1:52:39 PM	SiCl4 post valve closed
1/13/2011	1:52:39 PM	Main Vac valve closed
1/13/2011	1:52:39 PM	Bubbler valve closed
1/13/2011	1:52:39 PM	Bypass valve opened
1/13/2011	1:52:39 PM	Helium MFC set to  0.000000
1/13/2011	1:52:39 PM	H2 MFC set to  0.000000
1/13/2011	1:52:39 PM	BCl3 MFC set to  0.000000
1/13/2011	1:52:39 PM	PHl3 MFC set to  0.000000
1/13/2011	1:52:39 PM	SiCl4 MFC set to  0.000000
1/13/2011	1:52:39 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	1:52:39 PM	Tube furnace set to 0
1/13/2011	1:52:40 PM	Helium valve closed
1/13/2011	1:52:40 PM	H2 valve closed
1/13/2011	1:52:40 PM	BCl3 valve closed
1/13/2011	1:52:40 PM	PH3 valve closed
1/13/2011	1:52:40 PM	SiCl4 pre valve closed
1/13/2011	1:52:40 PM	SiCl4 post valve closed
1/13/2011	1:52:40 PM	Bubbler valve closed
1/13/2011	1:52:40 PM	Main Vac valve opened
1/13/2011	1:52:40 PM	Bypass valve opened
1/13/2011	1:52:40 PM	Helium MFC set to  0.000000
1/13/2011	1:52:40 PM	H2 MFC set to  0.000000
1/13/2011	1:52:40 PM	BCl3 MFC set to  0.000000
1/13/2011	1:52:40 PM	PHl3 MFC set to  0.000000
1/13/2011	1:52:40 PM	SiCl4 MFC set to  0.000000
1/13/2011	1:52:40 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	1:52:40 PM	Tube furnace set to 0
1/13/2011	1:53:40 PM	H2 valve closed
1/13/2011	1:53:40 PM	BCl3 valve closed
1/13/2011	1:53:40 PM	PH3 valve closed
1/13/2011	1:53:40 PM	SiCl4 pre valve closed
1/13/2011	1:53:40 PM	SiCl4 post valve closed
1/13/2011	1:53:40 PM	Bubbler valve closed
1/13/2011	1:53:40 PM	Helium valve opened
1/13/2011	1:53:40 PM	Main Vac valve opened
1/13/2011	1:53:40 PM	Bypass valve opened
1/13/2011	1:53:40 PM	Helium MFC set to  100.000000
1/13/2011	1:53:40 PM	H2 MFC set to  0.000000
1/13/2011	1:53:40 PM	BCl3 MFC set to  0.000000
1/13/2011	1:53:40 PM	PHl3 MFC set to  0.000000
1/13/2011	1:53:40 PM	SiCl4 MFC set to  0.000000
1/13/2011	1:53:40 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	1:53:40 PM	Tube furnace set to 0
1/13/2011	1:54:40 PM	Helium valve closed
1/13/2011	1:54:40 PM	H2 valve closed
1/13/2011	1:54:40 PM	BCl3 valve closed
1/13/2011	1:54:40 PM	PH3 valve closed
1/13/2011	1:54:40 PM	SiCl4 pre valve closed
1/13/2011	1:54:40 PM	SiCl4 post valve closed
1/13/2011	1:54:40 PM	Bubbler valve closed
1/13/2011	1:54:40 PM	Main Vac valve opened
1/13/2011	1:54:40 PM	Bypass valve opened
1/13/2011	1:54:40 PM	Helium MFC set to  0.000000
1/13/2011	1:54:40 PM	H2 MFC set to  0.000000
1/13/2011	1:54:40 PM	BCl3 MFC set to  0.000000
1/13/2011	1:54:40 PM	PHl3 MFC set to  0.000000
1/13/2011	1:54:40 PM	SiCl4 MFC set to  0.000000
1/13/2011	1:54:40 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	1:54:40 PM	Tube furnace set to 0
1/13/2011	1:55:40 PM	H2 valve closed
1/13/2011	1:55:40 PM	BCl3 valve closed
1/13/2011	1:55:40 PM	PH3 valve closed
1/13/2011	1:55:40 PM	SiCl4 pre valve closed
1/13/2011	1:55:40 PM	SiCl4 post valve closed
1/13/2011	1:55:40 PM	Bubbler valve closed
1/13/2011	1:55:40 PM	Helium valve opened
1/13/2011	1:55:40 PM	Main Vac valve opened
1/13/2011	1:55:40 PM	Bypass valve opened
1/13/2011	1:55:40 PM	Helium MFC set to  100.000000
1/13/2011	1:55:40 PM	H2 MFC set to  0.000000
1/13/2011	1:55:40 PM	BCl3 MFC set to  0.000000
1/13/2011	1:55:40 PM	PHl3 MFC set to  0.000000
1/13/2011	1:55:40 PM	SiCl4 MFC set to  0.000000
1/13/2011	1:55:40 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	1:55:40 PM	Tube furnace set to 0
1/13/2011	1:56:40 PM	Helium valve closed
1/13/2011	1:56:40 PM	H2 valve closed
1/13/2011	1:56:40 PM	BCl3 valve closed
1/13/2011	1:56:40 PM	PH3 valve closed
1/13/2011	1:56:40 PM	SiCl4 pre valve closed
1/13/2011	1:56:40 PM	SiCl4 post valve closed
1/13/2011	1:56:40 PM	Bubbler valve closed
1/13/2011	1:56:40 PM	Main Vac valve opened
1/13/2011	1:56:40 PM	Bypass valve opened
1/13/2011	1:56:40 PM	Helium MFC set to  0.000000
1/13/2011	1:56:40 PM	H2 MFC set to  0.000000
1/13/2011	1:56:40 PM	BCl3 MFC set to  0.000000
1/13/2011	1:56:40 PM	PHl3 MFC set to  0.000000
1/13/2011	1:56:40 PM	SiCl4 MFC set to  0.000000
1/13/2011	1:56:40 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	1:56:41 PM	Tube furnace set to 0
1/13/2011	1:57:41 PM	H2 valve closed
1/13/2011	1:57:41 PM	BCl3 valve closed
1/13/2011	1:57:41 PM	PH3 valve closed
1/13/2011	1:57:41 PM	SiCl4 pre valve closed
1/13/2011	1:57:41 PM	SiCl4 post valve closed
1/13/2011	1:57:41 PM	Bubbler valve closed
1/13/2011	1:57:41 PM	Helium valve opened
1/13/2011	1:57:41 PM	Main Vac valve opened
1/13/2011	1:57:41 PM	Bypass valve opened
1/13/2011	1:57:41 PM	Helium MFC set to  100.000000
1/13/2011	1:57:41 PM	H2 MFC set to  0.000000
1/13/2011	1:57:41 PM	BCl3 MFC set to  0.000000
1/13/2011	1:57:41 PM	PHl3 MFC set to  0.000000
1/13/2011	1:57:41 PM	SiCl4 MFC set to  0.000000
1/13/2011	1:57:41 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	1:57:41 PM	Tube furnace set to 0
1/13/2011	1:58:41 PM	Helium valve closed
1/13/2011	1:58:41 PM	H2 valve closed
1/13/2011	1:58:41 PM	BCl3 valve closed
1/13/2011	1:58:41 PM	PH3 valve closed
1/13/2011	1:58:41 PM	SiCl4 pre valve closed
1/13/2011	1:58:41 PM	SiCl4 post valve closed
1/13/2011	1:58:41 PM	Bubbler valve closed
1/13/2011	1:58:41 PM	Main Vac valve opened
1/13/2011	1:58:41 PM	Bypass valve opened
1/13/2011	1:58:41 PM	Helium MFC set to  0.000000
1/13/2011	1:58:41 PM	H2 MFC set to  0.000000
1/13/2011	1:58:41 PM	BCl3 MFC set to  0.000000
1/13/2011	1:58:41 PM	PHl3 MFC set to  0.000000
1/13/2011	1:58:41 PM	SiCl4 MFC set to  0.000000
1/13/2011	1:58:41 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	1:58:41 PM	Tube furnace set to 0
1/13/2011	1:59:41 PM	H2 valve closed
1/13/2011	1:59:41 PM	BCl3 valve closed
1/13/2011	1:59:41 PM	PH3 valve closed
1/13/2011	1:59:41 PM	SiCl4 pre valve closed
1/13/2011	1:59:41 PM	SiCl4 post valve closed
1/13/2011	1:59:41 PM	Bubbler valve closed
1/13/2011	1:59:41 PM	Helium valve opened
1/13/2011	1:59:41 PM	Main Vac valve opened
1/13/2011	1:59:41 PM	Bypass valve opened
1/13/2011	1:59:41 PM	Helium MFC set to  100.000000
1/13/2011	1:59:41 PM	H2 MFC set to  0.000000
1/13/2011	1:59:41 PM	BCl3 MFC set to  0.000000
1/13/2011	1:59:41 PM	PHl3 MFC set to  0.000000
1/13/2011	1:59:41 PM	SiCl4 MFC set to  0.000000
1/13/2011	1:59:41 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	1:59:41 PM	Tube furnace set to 0
1/13/2011	2:00:41 PM	Helium valve closed
1/13/2011	2:00:41 PM	H2 valve closed
1/13/2011	2:00:41 PM	BCl3 valve closed
1/13/2011	2:00:41 PM	PH3 valve closed
1/13/2011	2:00:41 PM	SiCl4 pre valve closed
1/13/2011	2:00:41 PM	SiCl4 post valve closed
1/13/2011	2:00:41 PM	Bubbler valve closed
1/13/2011	2:00:41 PM	Main Vac valve opened
1/13/2011	2:00:41 PM	Bypass valve opened
1/13/2011	2:00:41 PM	Helium MFC set to  0.000000
1/13/2011	2:00:41 PM	H2 MFC set to  0.000000
1/13/2011	2:00:41 PM	BCl3 MFC set to  0.000000
1/13/2011	2:00:41 PM	PHl3 MFC set to  0.000000
1/13/2011	2:00:41 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:00:41 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:00:41 PM	Tube furnace set to 0
1/13/2011	2:01:41 PM	H2 valve closed
1/13/2011	2:01:41 PM	BCl3 valve closed
1/13/2011	2:01:41 PM	PH3 valve closed
1/13/2011	2:01:41 PM	SiCl4 pre valve closed
1/13/2011	2:01:41 PM	SiCl4 post valve closed
1/13/2011	2:01:41 PM	Bubbler valve closed
1/13/2011	2:01:41 PM	Helium valve opened
1/13/2011	2:01:41 PM	Main Vac valve opened
1/13/2011	2:01:41 PM	Bypass valve opened
1/13/2011	2:01:41 PM	Helium MFC set to  100.000000
1/13/2011	2:01:41 PM	H2 MFC set to  0.000000
1/13/2011	2:01:41 PM	BCl3 MFC set to  0.000000
1/13/2011	2:01:41 PM	PHl3 MFC set to  0.000000
1/13/2011	2:01:41 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:01:41 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:01:42 PM	Tube furnace set to 0
1/13/2011	2:02:42 PM	Helium valve closed
1/13/2011	2:02:42 PM	H2 valve closed
1/13/2011	2:02:42 PM	BCl3 valve closed
1/13/2011	2:02:42 PM	PH3 valve closed
1/13/2011	2:02:42 PM	SiCl4 pre valve closed
1/13/2011	2:02:42 PM	SiCl4 post valve closed
1/13/2011	2:02:42 PM	Bubbler valve closed
1/13/2011	2:02:42 PM	Main Vac valve opened
1/13/2011	2:02:42 PM	Bypass valve opened
1/13/2011	2:02:42 PM	Helium MFC set to  0.000000
1/13/2011	2:02:42 PM	H2 MFC set to  0.000000
1/13/2011	2:02:42 PM	BCl3 MFC set to  0.000000
1/13/2011	2:02:42 PM	PHl3 MFC set to  0.000000
1/13/2011	2:02:42 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:02:42 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:02:42 PM	Tube furnace set to 0
1/13/2011	2:03:42 PM	H2 valve closed
1/13/2011	2:03:42 PM	BCl3 valve closed
1/13/2011	2:03:42 PM	PH3 valve closed
1/13/2011	2:03:42 PM	SiCl4 pre valve closed
1/13/2011	2:03:42 PM	SiCl4 post valve closed
1/13/2011	2:03:42 PM	Bubbler valve closed
1/13/2011	2:03:42 PM	Helium valve opened
1/13/2011	2:03:42 PM	Main Vac valve opened
1/13/2011	2:03:42 PM	Bypass valve opened
1/13/2011	2:03:42 PM	Helium MFC set to  100.000000
1/13/2011	2:03:42 PM	H2 MFC set to  0.000000
1/13/2011	2:03:42 PM	BCl3 MFC set to  0.000000
1/13/2011	2:03:42 PM	PHl3 MFC set to  0.000000
1/13/2011	2:03:42 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:03:42 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:03:42 PM	Tube furnace set to 0
1/13/2011	2:04:42 PM	Helium valve closed
1/13/2011	2:04:42 PM	H2 valve closed
1/13/2011	2:04:42 PM	BCl3 valve closed
1/13/2011	2:04:42 PM	PH3 valve closed
1/13/2011	2:04:42 PM	SiCl4 pre valve closed
1/13/2011	2:04:42 PM	SiCl4 post valve closed
1/13/2011	2:04:42 PM	Bubbler valve closed
1/13/2011	2:04:42 PM	Main Vac valve opened
1/13/2011	2:04:42 PM	Bypass valve opened
1/13/2011	2:04:42 PM	Helium MFC set to  0.000000
1/13/2011	2:04:42 PM	H2 MFC set to  0.000000
1/13/2011	2:04:42 PM	BCl3 MFC set to  0.000000
1/13/2011	2:04:42 PM	PHl3 MFC set to  0.000000
1/13/2011	2:04:42 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:04:42 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:04:42 PM	Tube furnace set to 0
1/13/2011	2:05:42 PM	H2 valve closed
1/13/2011	2:05:42 PM	BCl3 valve closed
1/13/2011	2:05:42 PM	PH3 valve closed
1/13/2011	2:05:42 PM	SiCl4 pre valve closed
1/13/2011	2:05:42 PM	SiCl4 post valve closed
1/13/2011	2:05:42 PM	Bubbler valve closed
1/13/2011	2:05:42 PM	Helium valve opened
1/13/2011	2:05:42 PM	Main Vac valve opened
1/13/2011	2:05:42 PM	Bypass valve opened
1/13/2011	2:05:42 PM	Helium MFC set to  100.000000
1/13/2011	2:05:42 PM	H2 MFC set to  0.000000
1/13/2011	2:05:42 PM	BCl3 MFC set to  0.000000
1/13/2011	2:05:42 PM	PHl3 MFC set to  0.000000
1/13/2011	2:05:42 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:05:42 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:05:42 PM	Tube furnace set to 0
1/13/2011	2:06:42 PM	Helium valve closed
1/13/2011	2:06:42 PM	H2 valve closed
1/13/2011	2:06:42 PM	BCl3 valve closed
1/13/2011	2:06:42 PM	PH3 valve closed
1/13/2011	2:06:42 PM	SiCl4 pre valve closed
1/13/2011	2:06:42 PM	SiCl4 post valve closed
1/13/2011	2:06:42 PM	Bubbler valve closed
1/13/2011	2:06:42 PM	Main Vac valve opened
1/13/2011	2:06:42 PM	Bypass valve opened
1/13/2011	2:06:42 PM	Helium MFC set to  0.000000
1/13/2011	2:06:42 PM	H2 MFC set to  0.000000
1/13/2011	2:06:42 PM	BCl3 MFC set to  0.000000
1/13/2011	2:06:42 PM	PHl3 MFC set to  0.000000
1/13/2011	2:06:42 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:06:42 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:06:43 PM	Tube furnace set to 0
1/13/2011	2:07:43 PM	H2 valve closed
1/13/2011	2:07:43 PM	BCl3 valve closed
1/13/2011	2:07:43 PM	PH3 valve closed
1/13/2011	2:07:43 PM	SiCl4 pre valve closed
1/13/2011	2:07:43 PM	SiCl4 post valve closed
1/13/2011	2:07:43 PM	Bubbler valve closed
1/13/2011	2:07:43 PM	Helium valve opened
1/13/2011	2:07:43 PM	Main Vac valve opened
1/13/2011	2:07:43 PM	Bypass valve opened
1/13/2011	2:07:43 PM	Helium MFC set to  100.000000
1/13/2011	2:07:43 PM	H2 MFC set to  0.000000
1/13/2011	2:07:43 PM	BCl3 MFC set to  0.000000
1/13/2011	2:07:43 PM	PHl3 MFC set to  0.000000
1/13/2011	2:07:43 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:07:43 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:07:43 PM	Tube furnace set to 0
1/13/2011	2:08:43 PM	Helium valve closed
1/13/2011	2:08:43 PM	H2 valve closed
1/13/2011	2:08:43 PM	BCl3 valve closed
1/13/2011	2:08:43 PM	PH3 valve closed
1/13/2011	2:08:43 PM	SiCl4 pre valve closed
1/13/2011	2:08:43 PM	SiCl4 post valve closed
1/13/2011	2:08:43 PM	Bubbler valve closed
1/13/2011	2:08:43 PM	Main Vac valve opened
1/13/2011	2:08:43 PM	Bypass valve opened
1/13/2011	2:08:43 PM	Helium MFC set to  0.000000
1/13/2011	2:08:43 PM	H2 MFC set to  0.000000
1/13/2011	2:08:43 PM	BCl3 MFC set to  0.000000
1/13/2011	2:08:43 PM	PHl3 MFC set to  0.000000
1/13/2011	2:08:43 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:08:43 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:08:43 PM	Tube furnace set to 0
1/13/2011	2:09:43 PM	H2 valve closed
1/13/2011	2:09:43 PM	BCl3 valve closed
1/13/2011	2:09:43 PM	PH3 valve closed
1/13/2011	2:09:43 PM	SiCl4 pre valve closed
1/13/2011	2:09:43 PM	SiCl4 post valve closed
1/13/2011	2:09:43 PM	Bubbler valve closed
1/13/2011	2:09:43 PM	Helium valve opened
1/13/2011	2:09:43 PM	Main Vac valve opened
1/13/2011	2:09:43 PM	Bypass valve opened
1/13/2011	2:09:43 PM	Helium MFC set to  100.000000
1/13/2011	2:09:43 PM	H2 MFC set to  0.000000
1/13/2011	2:09:43 PM	BCl3 MFC set to  0.000000
1/13/2011	2:09:43 PM	PHl3 MFC set to  0.000000
1/13/2011	2:09:43 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:09:43 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:09:43 PM	Tube furnace set to 0
1/13/2011	2:10:43 PM	Helium valve closed
1/13/2011	2:10:43 PM	H2 valve closed
1/13/2011	2:10:43 PM	BCl3 valve closed
1/13/2011	2:10:43 PM	PH3 valve closed
1/13/2011	2:10:43 PM	SiCl4 pre valve closed
1/13/2011	2:10:43 PM	SiCl4 post valve closed
1/13/2011	2:10:43 PM	Bubbler valve closed
1/13/2011	2:10:43 PM	Main Vac valve opened
1/13/2011	2:10:43 PM	Bypass valve opened
1/13/2011	2:10:43 PM	Helium MFC set to  0.000000
1/13/2011	2:10:43 PM	H2 MFC set to  0.000000
1/13/2011	2:10:43 PM	BCl3 MFC set to  0.000000
1/13/2011	2:10:43 PM	PHl3 MFC set to  0.000000
1/13/2011	2:10:43 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:10:43 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:10:43 PM	Tube furnace set to 0
1/13/2011	2:11:43 PM	H2 valve closed
1/13/2011	2:11:43 PM	BCl3 valve closed
1/13/2011	2:11:43 PM	PH3 valve closed
1/13/2011	2:11:43 PM	SiCl4 pre valve closed
1/13/2011	2:11:43 PM	SiCl4 post valve closed
1/13/2011	2:11:43 PM	Bubbler valve closed
1/13/2011	2:11:43 PM	Helium valve opened
1/13/2011	2:11:43 PM	Main Vac valve opened
1/13/2011	2:11:43 PM	Bypass valve opened
1/13/2011	2:11:43 PM	Helium MFC set to  100.000000
1/13/2011	2:11:43 PM	H2 MFC set to  0.000000
1/13/2011	2:11:43 PM	BCl3 MFC set to  0.000000
1/13/2011	2:11:44 PM	PHl3 MFC set to  0.000000
1/13/2011	2:11:44 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:11:44 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:11:44 PM	Tube furnace set to 0
1/13/2011	2:12:44 PM	Helium valve closed
1/13/2011	2:12:44 PM	H2 valve closed
1/13/2011	2:12:44 PM	BCl3 valve closed
1/13/2011	2:12:44 PM	PH3 valve closed
1/13/2011	2:12:44 PM	SiCl4 pre valve closed
1/13/2011	2:12:44 PM	SiCl4 post valve closed
1/13/2011	2:12:44 PM	Bubbler valve closed
1/13/2011	2:12:44 PM	Main Vac valve opened
1/13/2011	2:12:44 PM	Bypass valve opened
1/13/2011	2:12:44 PM	Helium MFC set to  0.000000
1/13/2011	2:12:44 PM	H2 MFC set to  0.000000
1/13/2011	2:12:44 PM	BCl3 MFC set to  0.000000
1/13/2011	2:12:44 PM	PHl3 MFC set to  0.000000
1/13/2011	2:12:44 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:12:44 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:12:44 PM	Tube furnace set to 0
1/13/2011	2:12:45 PM	Run finished at 2:12 PM
1/13/2011	2:12:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	2:25:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	2:25:53 PM	Recipe started at 2:25 PM
1/13/2011	2:25:53 PM	Helium valve closed
1/13/2011	2:25:53 PM	H2 valve closed
1/13/2011	2:25:53 PM	BCl3 valve closed
1/13/2011	2:25:53 PM	PH3 valve closed
1/13/2011	2:25:53 PM	SiCl4 pre valve closed
1/13/2011	2:25:53 PM	SiCl4 post valve closed
1/13/2011	2:25:53 PM	Main Vac valve closed
1/13/2011	2:25:53 PM	Bubbler valve closed
1/13/2011	2:25:53 PM	Bypass valve opened
1/13/2011	2:25:53 PM	Helium MFC set to  0.000000
1/13/2011	2:25:53 PM	H2 MFC set to  0.000000
1/13/2011	2:25:53 PM	BCl3 MFC set to  0.000000
1/13/2011	2:25:53 PM	PHl3 MFC set to  0.000000
1/13/2011	2:25:53 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:25:53 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:25:53 PM	Tube furnace set to 0
1/13/2011	2:25:53 PM	Helium valve closed
1/13/2011	2:25:53 PM	H2 valve closed
1/13/2011	2:25:53 PM	BCl3 valve closed
1/13/2011	2:25:53 PM	PH3 valve closed
1/13/2011	2:25:53 PM	SiCl4 pre valve closed
1/13/2011	2:25:53 PM	SiCl4 post valve closed
1/13/2011	2:25:53 PM	Bubbler valve closed
1/13/2011	2:25:53 PM	Main Vac valve opened
1/13/2011	2:25:53 PM	Bypass valve opened
1/13/2011	2:25:53 PM	Helium MFC set to  0.000000
1/13/2011	2:25:53 PM	H2 MFC set to  0.000000
1/13/2011	2:25:53 PM	BCl3 MFC set to  0.000000
1/13/2011	2:25:53 PM	PHl3 MFC set to  0.000000
1/13/2011	2:25:53 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:25:53 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:25:53 PM	Tube furnace set to 0
1/13/2011	2:26:53 PM	H2 valve closed
1/13/2011	2:26:53 PM	BCl3 valve closed
1/13/2011	2:26:53 PM	PH3 valve closed
1/13/2011	2:26:53 PM	SiCl4 pre valve closed
1/13/2011	2:26:53 PM	SiCl4 post valve closed
1/13/2011	2:26:53 PM	Bubbler valve closed
1/13/2011	2:26:53 PM	Helium valve opened
1/13/2011	2:26:53 PM	Main Vac valve opened
1/13/2011	2:26:53 PM	Bypass valve opened
1/13/2011	2:26:53 PM	Helium MFC set to  100.000000
1/13/2011	2:26:53 PM	H2 MFC set to  0.000000
1/13/2011	2:26:53 PM	BCl3 MFC set to  0.000000
1/13/2011	2:26:53 PM	PHl3 MFC set to  0.000000
1/13/2011	2:26:53 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:26:53 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:26:54 PM	Tube furnace set to 0
1/13/2011	2:27:54 PM	Helium valve closed
1/13/2011	2:27:54 PM	H2 valve closed
1/13/2011	2:27:54 PM	BCl3 valve closed
1/13/2011	2:27:54 PM	PH3 valve closed
1/13/2011	2:27:54 PM	SiCl4 pre valve closed
1/13/2011	2:27:54 PM	SiCl4 post valve closed
1/13/2011	2:27:54 PM	Bubbler valve closed
1/13/2011	2:27:54 PM	Main Vac valve opened
1/13/2011	2:27:54 PM	Bypass valve opened
1/13/2011	2:27:54 PM	Helium MFC set to  0.000000
1/13/2011	2:27:54 PM	H2 MFC set to  0.000000
1/13/2011	2:27:54 PM	BCl3 MFC set to  0.000000
1/13/2011	2:27:54 PM	PHl3 MFC set to  0.000000
1/13/2011	2:27:54 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:27:54 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:27:54 PM	Tube furnace set to 0
1/13/2011	2:28:54 PM	H2 valve closed
1/13/2011	2:28:54 PM	BCl3 valve closed
1/13/2011	2:28:54 PM	PH3 valve closed
1/13/2011	2:28:54 PM	SiCl4 pre valve closed
1/13/2011	2:28:54 PM	SiCl4 post valve closed
1/13/2011	2:28:54 PM	Bubbler valve closed
1/13/2011	2:28:54 PM	Helium valve opened
1/13/2011	2:28:54 PM	Main Vac valve opened
1/13/2011	2:28:54 PM	Bypass valve opened
1/13/2011	2:28:54 PM	Helium MFC set to  100.000000
1/13/2011	2:28:54 PM	H2 MFC set to  0.000000
1/13/2011	2:28:54 PM	BCl3 MFC set to  0.000000
1/13/2011	2:28:54 PM	PHl3 MFC set to  0.000000
1/13/2011	2:28:54 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:28:54 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:28:54 PM	Tube furnace set to 0
1/13/2011	2:29:54 PM	Helium valve closed
1/13/2011	2:29:54 PM	H2 valve closed
1/13/2011	2:29:54 PM	BCl3 valve closed
1/13/2011	2:29:54 PM	PH3 valve closed
1/13/2011	2:29:54 PM	SiCl4 pre valve closed
1/13/2011	2:29:54 PM	SiCl4 post valve closed
1/13/2011	2:29:54 PM	Bubbler valve closed
1/13/2011	2:29:54 PM	Main Vac valve opened
1/13/2011	2:29:54 PM	Bypass valve opened
1/13/2011	2:29:54 PM	Helium MFC set to  0.000000
1/13/2011	2:29:54 PM	H2 MFC set to  0.000000
1/13/2011	2:29:54 PM	BCl3 MFC set to  0.000000
1/13/2011	2:29:54 PM	PHl3 MFC set to  0.000000
1/13/2011	2:29:54 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:29:54 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:29:54 PM	Tube furnace set to 0
1/13/2011	2:30:54 PM	H2 valve closed
1/13/2011	2:30:54 PM	BCl3 valve closed
1/13/2011	2:30:54 PM	PH3 valve closed
1/13/2011	2:30:54 PM	SiCl4 pre valve closed
1/13/2011	2:30:54 PM	SiCl4 post valve closed
1/13/2011	2:30:54 PM	Bubbler valve closed
1/13/2011	2:30:54 PM	Helium valve opened
1/13/2011	2:30:54 PM	Main Vac valve opened
1/13/2011	2:30:54 PM	Bypass valve opened
1/13/2011	2:30:54 PM	Helium MFC set to  100.000000
1/13/2011	2:30:54 PM	H2 MFC set to  0.000000
1/13/2011	2:30:54 PM	BCl3 MFC set to  0.000000
1/13/2011	2:30:54 PM	PHl3 MFC set to  0.000000
1/13/2011	2:30:54 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:30:54 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:30:54 PM	Tube furnace set to 0
1/13/2011	2:31:54 PM	Helium valve closed
1/13/2011	2:31:54 PM	H2 valve closed
1/13/2011	2:31:54 PM	BCl3 valve closed
1/13/2011	2:31:54 PM	PH3 valve closed
1/13/2011	2:31:54 PM	SiCl4 pre valve closed
1/13/2011	2:31:54 PM	SiCl4 post valve closed
1/13/2011	2:31:54 PM	Bubbler valve closed
1/13/2011	2:31:54 PM	Main Vac valve opened
1/13/2011	2:31:54 PM	Bypass valve opened
1/13/2011	2:31:54 PM	Helium MFC set to  0.000000
1/13/2011	2:31:54 PM	H2 MFC set to  0.000000
1/13/2011	2:31:54 PM	BCl3 MFC set to  0.000000
1/13/2011	2:31:54 PM	PHl3 MFC set to  0.000000
1/13/2011	2:31:54 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:31:54 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:31:55 PM	Tube furnace set to 0
1/13/2011	2:32:55 PM	H2 valve closed
1/13/2011	2:32:55 PM	BCl3 valve closed
1/13/2011	2:32:55 PM	PH3 valve closed
1/13/2011	2:32:55 PM	SiCl4 pre valve closed
1/13/2011	2:32:55 PM	SiCl4 post valve closed
1/13/2011	2:32:55 PM	Bubbler valve closed
1/13/2011	2:32:55 PM	Helium valve opened
1/13/2011	2:32:55 PM	Main Vac valve opened
1/13/2011	2:32:55 PM	Bypass valve opened
1/13/2011	2:32:55 PM	Helium MFC set to  100.000000
1/13/2011	2:32:55 PM	H2 MFC set to  0.000000
1/13/2011	2:32:55 PM	BCl3 MFC set to  0.000000
1/13/2011	2:32:55 PM	PHl3 MFC set to  0.000000
1/13/2011	2:32:55 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:32:55 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:32:55 PM	Tube furnace set to 0
1/13/2011	2:33:55 PM	Helium valve closed
1/13/2011	2:33:55 PM	H2 valve closed
1/13/2011	2:33:55 PM	BCl3 valve closed
1/13/2011	2:33:55 PM	PH3 valve closed
1/13/2011	2:33:55 PM	SiCl4 pre valve closed
1/13/2011	2:33:55 PM	SiCl4 post valve closed
1/13/2011	2:33:55 PM	Bubbler valve closed
1/13/2011	2:33:55 PM	Main Vac valve opened
1/13/2011	2:33:55 PM	Bypass valve opened
1/13/2011	2:33:55 PM	Helium MFC set to  0.000000
1/13/2011	2:33:55 PM	H2 MFC set to  0.000000
1/13/2011	2:33:55 PM	BCl3 MFC set to  0.000000
1/13/2011	2:33:55 PM	PHl3 MFC set to  0.000000
1/13/2011	2:33:55 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:33:55 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:33:55 PM	Tube furnace set to 0
1/13/2011	2:34:55 PM	H2 valve closed
1/13/2011	2:34:55 PM	BCl3 valve closed
1/13/2011	2:34:55 PM	PH3 valve closed
1/13/2011	2:34:55 PM	SiCl4 pre valve closed
1/13/2011	2:34:55 PM	SiCl4 post valve closed
1/13/2011	2:34:55 PM	Bubbler valve closed
1/13/2011	2:34:55 PM	Helium valve opened
1/13/2011	2:34:55 PM	Main Vac valve opened
1/13/2011	2:34:55 PM	Bypass valve opened
1/13/2011	2:34:55 PM	Helium MFC set to  100.000000
1/13/2011	2:34:55 PM	H2 MFC set to  0.000000
1/13/2011	2:34:55 PM	BCl3 MFC set to  0.000000
1/13/2011	2:34:55 PM	PHl3 MFC set to  0.000000
1/13/2011	2:34:55 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:34:55 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:34:55 PM	Tube furnace set to 0
1/13/2011	2:35:55 PM	Helium valve closed
1/13/2011	2:35:55 PM	H2 valve closed
1/13/2011	2:35:55 PM	BCl3 valve closed
1/13/2011	2:35:55 PM	PH3 valve closed
1/13/2011	2:35:55 PM	SiCl4 pre valve closed
1/13/2011	2:35:55 PM	SiCl4 post valve closed
1/13/2011	2:35:55 PM	Bubbler valve closed
1/13/2011	2:35:55 PM	Main Vac valve opened
1/13/2011	2:35:55 PM	Bypass valve opened
1/13/2011	2:35:55 PM	Helium MFC set to  0.000000
1/13/2011	2:35:55 PM	H2 MFC set to  0.000000
1/13/2011	2:35:55 PM	BCl3 MFC set to  0.000000
1/13/2011	2:35:55 PM	PHl3 MFC set to  0.000000
1/13/2011	2:35:55 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:35:55 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:35:55 PM	Tube furnace set to 0
1/13/2011	2:36:55 PM	H2 valve closed
1/13/2011	2:36:55 PM	BCl3 valve closed
1/13/2011	2:36:55 PM	PH3 valve closed
1/13/2011	2:36:55 PM	SiCl4 pre valve closed
1/13/2011	2:36:55 PM	SiCl4 post valve closed
1/13/2011	2:36:55 PM	Bubbler valve closed
1/13/2011	2:36:55 PM	Helium valve opened
1/13/2011	2:36:55 PM	Main Vac valve opened
1/13/2011	2:36:55 PM	Bypass valve opened
1/13/2011	2:36:55 PM	Helium MFC set to  100.000000
1/13/2011	2:36:55 PM	H2 MFC set to  0.000000
1/13/2011	2:36:55 PM	BCl3 MFC set to  0.000000
1/13/2011	2:36:55 PM	PHl3 MFC set to  0.000000
1/13/2011	2:36:55 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:36:55 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:36:56 PM	Tube furnace set to 0
1/13/2011	2:37:56 PM	Helium valve closed
1/13/2011	2:37:56 PM	H2 valve closed
1/13/2011	2:37:56 PM	BCl3 valve closed
1/13/2011	2:37:56 PM	PH3 valve closed
1/13/2011	2:37:56 PM	SiCl4 pre valve closed
1/13/2011	2:37:56 PM	SiCl4 post valve closed
1/13/2011	2:37:56 PM	Bubbler valve closed
1/13/2011	2:37:56 PM	Main Vac valve opened
1/13/2011	2:37:56 PM	Bypass valve opened
1/13/2011	2:37:56 PM	Helium MFC set to  0.000000
1/13/2011	2:37:56 PM	H2 MFC set to  0.000000
1/13/2011	2:37:56 PM	BCl3 MFC set to  0.000000
1/13/2011	2:37:56 PM	PHl3 MFC set to  0.000000
1/13/2011	2:37:56 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:37:56 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:37:56 PM	Tube furnace set to 0
1/13/2011	2:38:56 PM	H2 valve closed
1/13/2011	2:38:56 PM	BCl3 valve closed
1/13/2011	2:38:56 PM	PH3 valve closed
1/13/2011	2:38:56 PM	SiCl4 pre valve closed
1/13/2011	2:38:56 PM	SiCl4 post valve closed
1/13/2011	2:38:56 PM	Bubbler valve closed
1/13/2011	2:38:56 PM	Helium valve opened
1/13/2011	2:38:56 PM	Main Vac valve opened
1/13/2011	2:38:56 PM	Bypass valve opened
1/13/2011	2:38:56 PM	Helium MFC set to  100.000000
1/13/2011	2:38:56 PM	H2 MFC set to  0.000000
1/13/2011	2:38:56 PM	BCl3 MFC set to  0.000000
1/13/2011	2:38:56 PM	PHl3 MFC set to  0.000000
1/13/2011	2:38:56 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:38:56 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:38:56 PM	Tube furnace set to 0
1/13/2011	2:39:56 PM	Helium valve closed
1/13/2011	2:39:56 PM	H2 valve closed
1/13/2011	2:39:56 PM	BCl3 valve closed
1/13/2011	2:39:56 PM	PH3 valve closed
1/13/2011	2:39:56 PM	SiCl4 pre valve closed
1/13/2011	2:39:56 PM	SiCl4 post valve closed
1/13/2011	2:39:56 PM	Bubbler valve closed
1/13/2011	2:39:56 PM	Main Vac valve opened
1/13/2011	2:39:56 PM	Bypass valve opened
1/13/2011	2:39:56 PM	Helium MFC set to  0.000000
1/13/2011	2:39:56 PM	H2 MFC set to  0.000000
1/13/2011	2:39:56 PM	BCl3 MFC set to  0.000000
1/13/2011	2:39:56 PM	PHl3 MFC set to  0.000000
1/13/2011	2:39:56 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:39:56 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:39:56 PM	Tube furnace set to 0
1/13/2011	2:40:56 PM	H2 valve closed
1/13/2011	2:40:56 PM	BCl3 valve closed
1/13/2011	2:40:56 PM	PH3 valve closed
1/13/2011	2:40:56 PM	SiCl4 pre valve closed
1/13/2011	2:40:56 PM	SiCl4 post valve closed
1/13/2011	2:40:56 PM	Bubbler valve closed
1/13/2011	2:40:56 PM	Helium valve opened
1/13/2011	2:40:56 PM	Main Vac valve opened
1/13/2011	2:40:56 PM	Bypass valve opened
1/13/2011	2:40:56 PM	Helium MFC set to  100.000000
1/13/2011	2:40:56 PM	H2 MFC set to  0.000000
1/13/2011	2:40:56 PM	BCl3 MFC set to  0.000000
1/13/2011	2:40:56 PM	PHl3 MFC set to  0.000000
1/13/2011	2:40:56 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:40:56 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:40:56 PM	Tube furnace set to 0
1/13/2011	2:41:56 PM	Helium valve closed
1/13/2011	2:41:56 PM	H2 valve closed
1/13/2011	2:41:56 PM	BCl3 valve closed
1/13/2011	2:41:56 PM	PH3 valve closed
1/13/2011	2:41:56 PM	SiCl4 pre valve closed
1/13/2011	2:41:56 PM	SiCl4 post valve closed
1/13/2011	2:41:56 PM	Bubbler valve closed
1/13/2011	2:41:56 PM	Main Vac valve opened
1/13/2011	2:41:56 PM	Bypass valve opened
1/13/2011	2:41:56 PM	Helium MFC set to  0.000000
1/13/2011	2:41:56 PM	H2 MFC set to  0.000000
1/13/2011	2:41:56 PM	BCl3 MFC set to  0.000000
1/13/2011	2:41:56 PM	PHl3 MFC set to  0.000000
1/13/2011	2:41:56 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:41:56 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:41:57 PM	Tube furnace set to 0
1/13/2011	2:42:57 PM	H2 valve closed
1/13/2011	2:42:57 PM	BCl3 valve closed
1/13/2011	2:42:57 PM	PH3 valve closed
1/13/2011	2:42:57 PM	SiCl4 pre valve closed
1/13/2011	2:42:57 PM	SiCl4 post valve closed
1/13/2011	2:42:57 PM	Bubbler valve closed
1/13/2011	2:42:57 PM	Helium valve opened
1/13/2011	2:42:57 PM	Main Vac valve opened
1/13/2011	2:42:57 PM	Bypass valve opened
1/13/2011	2:42:57 PM	Helium MFC set to  100.000000
1/13/2011	2:42:57 PM	H2 MFC set to  0.000000
1/13/2011	2:42:57 PM	BCl3 MFC set to  0.000000
1/13/2011	2:42:57 PM	PHl3 MFC set to  0.000000
1/13/2011	2:42:57 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:42:57 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:42:57 PM	Tube furnace set to 0
1/13/2011	2:43:57 PM	Helium valve closed
1/13/2011	2:43:57 PM	H2 valve closed
1/13/2011	2:43:57 PM	BCl3 valve closed
1/13/2011	2:43:57 PM	PH3 valve closed
1/13/2011	2:43:57 PM	SiCl4 pre valve closed
1/13/2011	2:43:57 PM	SiCl4 post valve closed
1/13/2011	2:43:57 PM	Bubbler valve closed
1/13/2011	2:43:57 PM	Main Vac valve opened
1/13/2011	2:43:57 PM	Bypass valve opened
1/13/2011	2:43:57 PM	Helium MFC set to  0.000000
1/13/2011	2:43:57 PM	H2 MFC set to  0.000000
1/13/2011	2:43:57 PM	BCl3 MFC set to  0.000000
1/13/2011	2:43:57 PM	PHl3 MFC set to  0.000000
1/13/2011	2:43:57 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:43:57 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:43:57 PM	Tube furnace set to 0
1/13/2011	2:44:57 PM	H2 valve closed
1/13/2011	2:44:57 PM	BCl3 valve closed
1/13/2011	2:44:57 PM	PH3 valve closed
1/13/2011	2:44:57 PM	SiCl4 pre valve closed
1/13/2011	2:44:57 PM	SiCl4 post valve closed
1/13/2011	2:44:57 PM	Bubbler valve closed
1/13/2011	2:44:57 PM	Helium valve opened
1/13/2011	2:44:57 PM	Main Vac valve opened
1/13/2011	2:44:57 PM	Bypass valve opened
1/13/2011	2:44:57 PM	Helium MFC set to  100.000000
1/13/2011	2:44:57 PM	H2 MFC set to  0.000000
1/13/2011	2:44:57 PM	BCl3 MFC set to  0.000000
1/13/2011	2:44:57 PM	PHl3 MFC set to  0.000000
1/13/2011	2:44:57 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:44:57 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:44:57 PM	Tube furnace set to 0
1/13/2011	2:45:57 PM	Helium valve closed
1/13/2011	2:45:57 PM	H2 valve closed
1/13/2011	2:45:57 PM	BCl3 valve closed
1/13/2011	2:45:57 PM	PH3 valve closed
1/13/2011	2:45:57 PM	SiCl4 pre valve closed
1/13/2011	2:45:57 PM	SiCl4 post valve closed
1/13/2011	2:45:57 PM	Bubbler valve closed
1/13/2011	2:45:57 PM	Main Vac valve opened
1/13/2011	2:45:57 PM	Bypass valve opened
1/13/2011	2:45:57 PM	Helium MFC set to  0.000000
1/13/2011	2:45:57 PM	H2 MFC set to  0.000000
1/13/2011	2:45:57 PM	BCl3 MFC set to  0.000000
1/13/2011	2:45:57 PM	PHl3 MFC set to  0.000000
1/13/2011	2:45:57 PM	SiCl4 MFC set to  0.000000
1/13/2011	2:45:57 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	2:45:58 PM	Tube furnace set to 0
1/13/2011	2:45:59 PM	Run finished at 2:45 PM
1/13/2011	2:45:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	3:00:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/13/2011	3:00:18 PM	Recipe started at 3:00 PM
1/13/2011	3:00:18 PM	Helium valve closed
1/13/2011	3:00:18 PM	H2 valve closed
1/13/2011	3:00:18 PM	BCl3 valve closed
1/13/2011	3:00:18 PM	PH3 valve closed
1/13/2011	3:00:18 PM	SiCl4 pre valve closed
1/13/2011	3:00:18 PM	SiCl4 post valve closed
1/13/2011	3:00:18 PM	Main Vac valve closed
1/13/2011	3:00:18 PM	Bypass valve closed
1/13/2011	3:00:18 PM	Bubbler valve closed
1/13/2011	3:00:18 PM	Helium MFC set to  0.000000
1/13/2011	3:00:18 PM	H2 MFC set to  0.000000
1/13/2011	3:00:18 PM	BCl3 MFC set to  0.000000
1/13/2011	3:00:18 PM	PHl3 MFC set to  0.000000
1/13/2011	3:00:18 PM	SiCl4 MFC set to  0.000000
1/13/2011	3:00:18 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	3:00:18 PM	Tube furnace set to 0
1/13/2011	3:00:19 PM	Run finished at 3:00 PM
1/13/2011	3:00:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/13/2011	3:00:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	3:00:41 PM	Recipe started at 3:00 PM
1/13/2011	3:00:41 PM	Helium valve closed
1/13/2011	3:00:41 PM	H2 valve closed
1/13/2011	3:00:41 PM	BCl3 valve closed
1/13/2011	3:00:41 PM	PH3 valve closed
1/13/2011	3:00:41 PM	SiCl4 pre valve closed
1/13/2011	3:00:41 PM	SiCl4 post valve closed
1/13/2011	3:00:41 PM	Main Vac valve closed
1/13/2011	3:00:41 PM	Bubbler valve closed
1/13/2011	3:00:41 PM	Bypass valve opened
1/13/2011	3:00:41 PM	Helium MFC set to  0.000000
1/13/2011	3:00:41 PM	H2 MFC set to  0.000000
1/13/2011	3:00:41 PM	BCl3 MFC set to  0.000000
1/13/2011	3:00:41 PM	PHl3 MFC set to  0.000000
1/13/2011	3:00:41 PM	SiCl4 MFC set to  0.000000
1/13/2011	3:00:41 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	3:00:41 PM	Tube furnace set to 0
1/13/2011	3:00:41 PM	Helium valve closed
1/13/2011	3:00:41 PM	H2 valve closed
1/13/2011	3:00:41 PM	BCl3 valve closed
1/13/2011	3:00:41 PM	PH3 valve closed
1/13/2011	3:00:41 PM	SiCl4 pre valve closed
1/13/2011	3:00:41 PM	SiCl4 post valve closed
1/13/2011	3:00:41 PM	Bubbler valve closed
1/13/2011	3:00:41 PM	Main Vac valve opened
1/13/2011	3:00:41 PM	Bypass valve opened
1/13/2011	3:00:41 PM	Helium MFC set to  0.000000
1/13/2011	3:00:41 PM	H2 MFC set to  0.000000
1/13/2011	3:00:41 PM	BCl3 MFC set to  0.000000
1/13/2011	3:00:41 PM	PHl3 MFC set to  0.000000
1/13/2011	3:00:41 PM	SiCl4 MFC set to  0.000000
1/13/2011	3:00:41 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	3:00:41 PM	Tube furnace set to 0
1/13/2011	3:00:41 PM	Run finished at 3:00 PM
1/13/2011	3:00:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	3:01:12 PM	Recipe started at 3:01 PM
1/13/2011	3:01:12 PM	Helium valve closed
1/13/2011	3:01:12 PM	BCl3 valve closed
1/13/2011	3:01:12 PM	PH3 valve closed
1/13/2011	3:01:12 PM	SiCl4 pre valve closed
1/13/2011	3:01:12 PM	SiCl4 post valve closed
1/13/2011	3:01:12 PM	Main Vac valve closed
1/13/2011	3:01:12 PM	Bypass valve closed
1/13/2011	3:01:12 PM	Bubbler valve closed
1/13/2011	3:01:12 PM	H2 valve opened
1/13/2011	3:01:12 PM	Helium MFC set to  0.000000
1/13/2011	3:01:12 PM	H2 MFC set to  500.000000
1/13/2011	3:01:12 PM	BCl3 MFC set to  0.000000
1/13/2011	3:01:12 PM	PHl3 MFC set to  0.000000
1/13/2011	3:01:12 PM	SiCl4 MFC set to  0.000000
1/13/2011	3:01:12 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	3:01:12 PM	Tube furnace set to 0
1/13/2011	3:02:34 PM	Helium valve closed
1/13/2011	3:02:34 PM	BCl3 valve closed
1/13/2011	3:02:34 PM	PH3 valve closed
1/13/2011	3:02:34 PM	SiCl4 pre valve closed
1/13/2011	3:02:34 PM	SiCl4 post valve closed
1/13/2011	3:02:34 PM	Main Vac valve closed
1/13/2011	3:02:34 PM	Bypass valve closed
1/13/2011	3:02:34 PM	H2 valve opened
1/13/2011	3:02:34 PM	Bubbler valve opened
1/13/2011	3:02:34 PM	Helium MFC set to  0.000000
1/13/2011	3:02:34 PM	H2 MFC set to  500.000000
1/13/2011	3:02:34 PM	BCl3 MFC set to  0.000000
1/13/2011	3:02:34 PM	PHl3 MFC set to  0.000000
1/13/2011	3:02:34 PM	SiCl4 MFC set to  0.000000
1/13/2011	3:02:34 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	3:02:34 PM	Tube furnace set to 1000
1/13/2011	3:22:34 PM	Helium valve closed
1/13/2011	3:22:34 PM	PH3 valve closed
1/13/2011	3:22:34 PM	Main Vac valve closed
1/13/2011	3:22:34 PM	Bypass valve closed
1/13/2011	3:22:34 PM	H2 valve opened
1/13/2011	3:22:34 PM	BCl3 valve opened
1/13/2011	3:22:35 PM	SiCl4 pre valve opened
1/13/2011	3:22:35 PM	SiCl4 post valve opened
1/13/2011	3:22:35 PM	Bubbler valve opened
1/13/2011	3:22:35 PM	Helium MFC set to  0.000000
1/13/2011	3:22:35 PM	H2 MFC set to  500.000000
1/13/2011	3:22:35 PM	BCl3 MFC set to  1.800000
1/13/2011	3:22:35 PM	PHl3 MFC set to  0.000000
1/13/2011	3:22:35 PM	SiCl4 MFC set to  50.000000
1/13/2011	3:22:35 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	3:22:35 PM	Tube furnace set to 1000
1/13/2011	3:42:35 PM	H2 valve closed
1/13/2011	3:42:35 PM	BCl3 valve closed
1/13/2011	3:42:35 PM	PH3 valve closed
1/13/2011	3:42:35 PM	SiCl4 pre valve closed
1/13/2011	3:42:35 PM	SiCl4 post valve closed
1/13/2011	3:42:35 PM	Main Vac valve closed
1/13/2011	3:42:35 PM	Bypass valve closed
1/13/2011	3:42:35 PM	Helium valve opened
1/13/2011	3:42:35 PM	Bubbler valve opened
1/13/2011	3:42:35 PM	Helium MFC set to  500.000000
1/13/2011	3:42:35 PM	H2 MFC set to  0.000000
1/13/2011	3:42:35 PM	BCl3 MFC set to  0.000000
1/13/2011	3:42:35 PM	PHl3 MFC set to  0.000000
1/13/2011	3:42:35 PM	SiCl4 MFC set to  0.000000
1/13/2011	3:42:35 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	3:42:35 PM	Tube furnace set to 0
1/13/2011	4:02:35 PM	Helium valve closed
1/13/2011	4:02:35 PM	H2 valve closed
1/13/2011	4:02:35 PM	BCl3 valve closed
1/13/2011	4:02:35 PM	PH3 valve closed
1/13/2011	4:02:35 PM	SiCl4 pre valve closed
1/13/2011	4:02:35 PM	SiCl4 post valve closed
1/13/2011	4:02:35 PM	Main Vac valve closed
1/13/2011	4:02:35 PM	Bypass valve closed
1/13/2011	4:02:35 PM	Bubbler valve closed
1/13/2011	4:02:35 PM	Helium MFC set to  0.000000
1/13/2011	4:02:35 PM	H2 MFC set to  0.000000
1/13/2011	4:02:35 PM	BCl3 MFC set to  0.000000
1/13/2011	4:02:35 PM	PHl3 MFC set to  0.000000
1/13/2011	4:02:35 PM	SiCl4 MFC set to  0.000000
1/13/2011	4:02:35 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	4:02:35 PM	Tube furnace set to 0
1/13/2011	4:02:35 PM	Run finished at 4:02 PM
1/13/2011	5:03:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2011	5:03:09 PM	Recipe started at 5:03 PM
1/13/2011	5:03:09 PM	H2 valve closed
1/13/2011	5:03:09 PM	BCl3 valve closed
1/13/2011	5:03:09 PM	PH3 valve closed
1/13/2011	5:03:09 PM	SiCl4 pre valve closed
1/13/2011	5:03:09 PM	SiCl4 post valve closed
1/13/2011	5:03:09 PM	Main Vac valve closed
1/13/2011	5:03:09 PM	Bypass valve closed
1/13/2011	5:03:09 PM	Bubbler valve closed
1/13/2011	5:03:09 PM	Helium valve opened
1/13/2011	5:03:09 PM	Helium MFC set to  500.000000
1/13/2011	5:03:09 PM	H2 MFC set to  0.000000
1/13/2011	5:03:09 PM	BCl3 MFC set to  0.000000
1/13/2011	5:03:09 PM	PHl3 MFC set to  0.000000
1/13/2011	5:03:09 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:03:09 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:03:09 PM	Tube furnace set to 0
1/13/2011	5:03:18 PM	Helium valve closed
1/13/2011	5:03:18 PM	H2 valve closed
1/13/2011	5:03:18 PM	BCl3 valve closed
1/13/2011	5:03:18 PM	PH3 valve closed
1/13/2011	5:03:18 PM	SiCl4 pre valve closed
1/13/2011	5:03:18 PM	SiCl4 post valve closed
1/13/2011	5:03:18 PM	Main Vac valve closed
1/13/2011	5:03:18 PM	Bypass valve closed
1/13/2011	5:03:18 PM	Bubbler valve closed
1/13/2011	5:03:18 PM	Helium MFC set to  0.000000
1/13/2011	5:03:18 PM	H2 MFC set to  0.000000
1/13/2011	5:03:18 PM	BCl3 MFC set to  0.000000
1/13/2011	5:03:18 PM	PHl3 MFC set to  0.000000
1/13/2011	5:03:18 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:03:18 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:03:19 PM	Tube furnace set to 0
1/13/2011	5:03:19 PM	Run finished at 5:03 PM
1/13/2011	5:03:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2011	5:08:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	5:08:57 PM	Recipe started at 5:08 PM
1/13/2011	5:08:57 PM	Helium valve closed
1/13/2011	5:08:57 PM	H2 valve closed
1/13/2011	5:08:57 PM	BCl3 valve closed
1/13/2011	5:08:57 PM	PH3 valve closed
1/13/2011	5:08:57 PM	SiCl4 pre valve closed
1/13/2011	5:08:57 PM	SiCl4 post valve closed
1/13/2011	5:08:57 PM	Main Vac valve closed
1/13/2011	5:08:57 PM	Bubbler valve closed
1/13/2011	5:08:57 PM	Bypass valve opened
1/13/2011	5:08:57 PM	Helium MFC set to  0.000000
1/13/2011	5:08:57 PM	H2 MFC set to  0.000000
1/13/2011	5:08:57 PM	BCl3 MFC set to  0.000000
1/13/2011	5:08:57 PM	PHl3 MFC set to  0.000000
1/13/2011	5:08:57 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:08:57 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:08:58 PM	Tube furnace set to 0
1/13/2011	5:09:30 PM	Helium valve closed
1/13/2011	5:09:30 PM	H2 valve closed
1/13/2011	5:09:30 PM	BCl3 valve closed
1/13/2011	5:09:30 PM	PH3 valve closed
1/13/2011	5:09:30 PM	SiCl4 pre valve closed
1/13/2011	5:09:30 PM	SiCl4 post valve closed
1/13/2011	5:09:30 PM	Bubbler valve closed
1/13/2011	5:09:30 PM	Main Vac valve opened
1/13/2011	5:09:30 PM	Bypass valve opened
1/13/2011	5:09:30 PM	Helium MFC set to  0.000000
1/13/2011	5:09:30 PM	H2 MFC set to  0.000000
1/13/2011	5:09:30 PM	BCl3 MFC set to  0.000000
1/13/2011	5:09:30 PM	PHl3 MFC set to  0.000000
1/13/2011	5:09:30 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:09:30 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:09:31 PM	Tube furnace set to 0
1/13/2011	5:09:31 PM	Run finished at 5:09 PM
1/13/2011	5:09:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	5:09:41 PM	Tube furnace set to 150
1/13/2011	5:10:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	5:11:11 PM	Recipe started at 5:11 PM
1/13/2011	5:11:11 PM	Helium valve closed
1/13/2011	5:11:11 PM	H2 valve closed
1/13/2011	5:11:11 PM	BCl3 valve closed
1/13/2011	5:11:11 PM	PH3 valve closed
1/13/2011	5:11:11 PM	SiCl4 pre valve closed
1/13/2011	5:11:11 PM	SiCl4 post valve closed
1/13/2011	5:11:11 PM	Main Vac valve closed
1/13/2011	5:11:11 PM	Bubbler valve closed
1/13/2011	5:11:11 PM	Bypass valve opened
1/13/2011	5:11:11 PM	Helium MFC set to  0.000000
1/13/2011	5:11:11 PM	H2 MFC set to  0.000000
1/13/2011	5:11:11 PM	BCl3 MFC set to  0.000000
1/13/2011	5:11:11 PM	PHl3 MFC set to  0.000000
1/13/2011	5:11:11 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:11:11 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:11:12 PM	Tube furnace set to 0
1/13/2011	5:11:12 PM	Helium valve closed
1/13/2011	5:11:12 PM	H2 valve closed
1/13/2011	5:11:12 PM	BCl3 valve closed
1/13/2011	5:11:12 PM	PH3 valve closed
1/13/2011	5:11:12 PM	SiCl4 pre valve closed
1/13/2011	5:11:12 PM	SiCl4 post valve closed
1/13/2011	5:11:12 PM	Bubbler valve closed
1/13/2011	5:11:12 PM	Main Vac valve opened
1/13/2011	5:11:12 PM	Bypass valve opened
1/13/2011	5:11:12 PM	Helium MFC set to  0.000000
1/13/2011	5:11:12 PM	H2 MFC set to  0.000000
1/13/2011	5:11:12 PM	BCl3 MFC set to  0.000000
1/13/2011	5:11:12 PM	PHl3 MFC set to  0.000000
1/13/2011	5:11:12 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:11:12 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:11:12 PM	Tube furnace set to 0
1/13/2011	5:12:12 PM	H2 valve closed
1/13/2011	5:12:12 PM	BCl3 valve closed
1/13/2011	5:12:12 PM	PH3 valve closed
1/13/2011	5:12:12 PM	SiCl4 pre valve closed
1/13/2011	5:12:12 PM	SiCl4 post valve closed
1/13/2011	5:12:12 PM	Bubbler valve closed
1/13/2011	5:12:12 PM	Helium valve opened
1/13/2011	5:12:12 PM	Main Vac valve opened
1/13/2011	5:12:12 PM	Bypass valve opened
1/13/2011	5:12:12 PM	Helium MFC set to  100.000000
1/13/2011	5:12:12 PM	H2 MFC set to  0.000000
1/13/2011	5:12:12 PM	BCl3 MFC set to  0.000000
1/13/2011	5:12:12 PM	PHl3 MFC set to  0.000000
1/13/2011	5:12:12 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:12:12 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:12:12 PM	Tube furnace set to 0
1/13/2011	5:13:12 PM	Helium valve closed
1/13/2011	5:13:12 PM	H2 valve closed
1/13/2011	5:13:12 PM	BCl3 valve closed
1/13/2011	5:13:12 PM	PH3 valve closed
1/13/2011	5:13:12 PM	SiCl4 pre valve closed
1/13/2011	5:13:12 PM	SiCl4 post valve closed
1/13/2011	5:13:12 PM	Bubbler valve closed
1/13/2011	5:13:12 PM	Main Vac valve opened
1/13/2011	5:13:12 PM	Bypass valve opened
1/13/2011	5:13:12 PM	Helium MFC set to  0.000000
1/13/2011	5:13:12 PM	H2 MFC set to  0.000000
1/13/2011	5:13:12 PM	BCl3 MFC set to  0.000000
1/13/2011	5:13:12 PM	PHl3 MFC set to  0.000000
1/13/2011	5:13:12 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:13:12 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:13:12 PM	Tube furnace set to 0
1/13/2011	5:14:12 PM	H2 valve closed
1/13/2011	5:14:12 PM	BCl3 valve closed
1/13/2011	5:14:12 PM	PH3 valve closed
1/13/2011	5:14:12 PM	SiCl4 pre valve closed
1/13/2011	5:14:12 PM	SiCl4 post valve closed
1/13/2011	5:14:12 PM	Bubbler valve closed
1/13/2011	5:14:12 PM	Helium valve opened
1/13/2011	5:14:12 PM	Main Vac valve opened
1/13/2011	5:14:12 PM	Bypass valve opened
1/13/2011	5:14:12 PM	Helium MFC set to  100.000000
1/13/2011	5:14:12 PM	H2 MFC set to  0.000000
1/13/2011	5:14:12 PM	BCl3 MFC set to  0.000000
1/13/2011	5:14:12 PM	PHl3 MFC set to  0.000000
1/13/2011	5:14:12 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:14:12 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:14:13 PM	Tube furnace set to 0
1/13/2011	5:15:13 PM	Helium valve closed
1/13/2011	5:15:13 PM	H2 valve closed
1/13/2011	5:15:13 PM	BCl3 valve closed
1/13/2011	5:15:13 PM	PH3 valve closed
1/13/2011	5:15:13 PM	SiCl4 pre valve closed
1/13/2011	5:15:13 PM	SiCl4 post valve closed
1/13/2011	5:15:13 PM	Bubbler valve closed
1/13/2011	5:15:13 PM	Main Vac valve opened
1/13/2011	5:15:13 PM	Bypass valve opened
1/13/2011	5:15:13 PM	Helium MFC set to  0.000000
1/13/2011	5:15:13 PM	H2 MFC set to  0.000000
1/13/2011	5:15:13 PM	BCl3 MFC set to  0.000000
1/13/2011	5:15:13 PM	PHl3 MFC set to  0.000000
1/13/2011	5:15:13 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:15:13 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:15:13 PM	Tube furnace set to 0
1/13/2011	5:16:13 PM	H2 valve closed
1/13/2011	5:16:13 PM	BCl3 valve closed
1/13/2011	5:16:13 PM	PH3 valve closed
1/13/2011	5:16:13 PM	SiCl4 pre valve closed
1/13/2011	5:16:13 PM	SiCl4 post valve closed
1/13/2011	5:16:13 PM	Bubbler valve closed
1/13/2011	5:16:13 PM	Helium valve opened
1/13/2011	5:16:13 PM	Main Vac valve opened
1/13/2011	5:16:13 PM	Bypass valve opened
1/13/2011	5:16:13 PM	Helium MFC set to  100.000000
1/13/2011	5:16:13 PM	H2 MFC set to  0.000000
1/13/2011	5:16:13 PM	BCl3 MFC set to  0.000000
1/13/2011	5:16:13 PM	PHl3 MFC set to  0.000000
1/13/2011	5:16:13 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:16:13 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:16:13 PM	Tube furnace set to 0
1/13/2011	5:17:13 PM	Helium valve closed
1/13/2011	5:17:13 PM	H2 valve closed
1/13/2011	5:17:13 PM	BCl3 valve closed
1/13/2011	5:17:13 PM	PH3 valve closed
1/13/2011	5:17:13 PM	SiCl4 pre valve closed
1/13/2011	5:17:13 PM	SiCl4 post valve closed
1/13/2011	5:17:13 PM	Bubbler valve closed
1/13/2011	5:17:13 PM	Main Vac valve opened
1/13/2011	5:17:13 PM	Bypass valve opened
1/13/2011	5:17:13 PM	Helium MFC set to  0.000000
1/13/2011	5:17:13 PM	H2 MFC set to  0.000000
1/13/2011	5:17:13 PM	BCl3 MFC set to  0.000000
1/13/2011	5:17:13 PM	PHl3 MFC set to  0.000000
1/13/2011	5:17:13 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:17:13 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:17:13 PM	Tube furnace set to 0
1/13/2011	5:18:13 PM	H2 valve closed
1/13/2011	5:18:13 PM	BCl3 valve closed
1/13/2011	5:18:13 PM	PH3 valve closed
1/13/2011	5:18:13 PM	SiCl4 pre valve closed
1/13/2011	5:18:13 PM	SiCl4 post valve closed
1/13/2011	5:18:13 PM	Bubbler valve closed
1/13/2011	5:18:13 PM	Helium valve opened
1/13/2011	5:18:13 PM	Main Vac valve opened
1/13/2011	5:18:13 PM	Bypass valve opened
1/13/2011	5:18:13 PM	Helium MFC set to  100.000000
1/13/2011	5:18:13 PM	H2 MFC set to  0.000000
1/13/2011	5:18:13 PM	BCl3 MFC set to  0.000000
1/13/2011	5:18:13 PM	PHl3 MFC set to  0.000000
1/13/2011	5:18:13 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:18:13 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:18:13 PM	Tube furnace set to 0
1/13/2011	5:19:13 PM	Helium valve closed
1/13/2011	5:19:13 PM	H2 valve closed
1/13/2011	5:19:13 PM	BCl3 valve closed
1/13/2011	5:19:13 PM	PH3 valve closed
1/13/2011	5:19:13 PM	SiCl4 pre valve closed
1/13/2011	5:19:13 PM	SiCl4 post valve closed
1/13/2011	5:19:13 PM	Bubbler valve closed
1/13/2011	5:19:13 PM	Main Vac valve opened
1/13/2011	5:19:13 PM	Bypass valve opened
1/13/2011	5:19:13 PM	Helium MFC set to  0.000000
1/13/2011	5:19:13 PM	H2 MFC set to  0.000000
1/13/2011	5:19:13 PM	BCl3 MFC set to  0.000000
1/13/2011	5:19:13 PM	PHl3 MFC set to  0.000000
1/13/2011	5:19:13 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:19:13 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:19:14 PM	Tube furnace set to 0
1/13/2011	5:20:14 PM	H2 valve closed
1/13/2011	5:20:14 PM	BCl3 valve closed
1/13/2011	5:20:14 PM	PH3 valve closed
1/13/2011	5:20:14 PM	SiCl4 pre valve closed
1/13/2011	5:20:14 PM	SiCl4 post valve closed
1/13/2011	5:20:14 PM	Bubbler valve closed
1/13/2011	5:20:14 PM	Helium valve opened
1/13/2011	5:20:14 PM	Main Vac valve opened
1/13/2011	5:20:14 PM	Bypass valve opened
1/13/2011	5:20:14 PM	Helium MFC set to  100.000000
1/13/2011	5:20:14 PM	H2 MFC set to  0.000000
1/13/2011	5:20:14 PM	BCl3 MFC set to  0.000000
1/13/2011	5:20:14 PM	PHl3 MFC set to  0.000000
1/13/2011	5:20:14 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:20:14 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:20:14 PM	Tube furnace set to 0
1/13/2011	5:21:14 PM	Helium valve closed
1/13/2011	5:21:14 PM	H2 valve closed
1/13/2011	5:21:14 PM	BCl3 valve closed
1/13/2011	5:21:14 PM	PH3 valve closed
1/13/2011	5:21:14 PM	SiCl4 pre valve closed
1/13/2011	5:21:14 PM	SiCl4 post valve closed
1/13/2011	5:21:14 PM	Bubbler valve closed
1/13/2011	5:21:14 PM	Main Vac valve opened
1/13/2011	5:21:14 PM	Bypass valve opened
1/13/2011	5:21:14 PM	Helium MFC set to  0.000000
1/13/2011	5:21:14 PM	H2 MFC set to  0.000000
1/13/2011	5:21:14 PM	BCl3 MFC set to  0.000000
1/13/2011	5:21:14 PM	PHl3 MFC set to  0.000000
1/13/2011	5:21:14 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:21:14 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:21:14 PM	Tube furnace set to 0
1/13/2011	5:22:14 PM	H2 valve closed
1/13/2011	5:22:14 PM	BCl3 valve closed
1/13/2011	5:22:14 PM	PH3 valve closed
1/13/2011	5:22:14 PM	SiCl4 pre valve closed
1/13/2011	5:22:14 PM	SiCl4 post valve closed
1/13/2011	5:22:14 PM	Bubbler valve closed
1/13/2011	5:22:14 PM	Helium valve opened
1/13/2011	5:22:14 PM	Main Vac valve opened
1/13/2011	5:22:14 PM	Bypass valve opened
1/13/2011	5:22:14 PM	Helium MFC set to  100.000000
1/13/2011	5:22:14 PM	H2 MFC set to  0.000000
1/13/2011	5:22:14 PM	BCl3 MFC set to  0.000000
1/13/2011	5:22:14 PM	PHl3 MFC set to  0.000000
1/13/2011	5:22:14 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:22:14 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:22:14 PM	Tube furnace set to 0
1/13/2011	5:23:14 PM	Helium valve closed
1/13/2011	5:23:14 PM	H2 valve closed
1/13/2011	5:23:14 PM	BCl3 valve closed
1/13/2011	5:23:14 PM	PH3 valve closed
1/13/2011	5:23:14 PM	SiCl4 pre valve closed
1/13/2011	5:23:14 PM	SiCl4 post valve closed
1/13/2011	5:23:14 PM	Bubbler valve closed
1/13/2011	5:23:14 PM	Main Vac valve opened
1/13/2011	5:23:14 PM	Bypass valve opened
1/13/2011	5:23:14 PM	Helium MFC set to  0.000000
1/13/2011	5:23:14 PM	H2 MFC set to  0.000000
1/13/2011	5:23:14 PM	BCl3 MFC set to  0.000000
1/13/2011	5:23:14 PM	PHl3 MFC set to  0.000000
1/13/2011	5:23:14 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:23:14 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:23:15 PM	Tube furnace set to 0
1/13/2011	5:24:15 PM	H2 valve closed
1/13/2011	5:24:15 PM	BCl3 valve closed
1/13/2011	5:24:15 PM	PH3 valve closed
1/13/2011	5:24:15 PM	SiCl4 pre valve closed
1/13/2011	5:24:15 PM	SiCl4 post valve closed
1/13/2011	5:24:15 PM	Bubbler valve closed
1/13/2011	5:24:15 PM	Helium valve opened
1/13/2011	5:24:15 PM	Main Vac valve opened
1/13/2011	5:24:15 PM	Bypass valve opened
1/13/2011	5:24:15 PM	Helium MFC set to  100.000000
1/13/2011	5:24:15 PM	H2 MFC set to  0.000000
1/13/2011	5:24:15 PM	BCl3 MFC set to  0.000000
1/13/2011	5:24:15 PM	PHl3 MFC set to  0.000000
1/13/2011	5:24:15 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:24:15 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:24:15 PM	Tube furnace set to 0
1/13/2011	5:25:15 PM	Helium valve closed
1/13/2011	5:25:15 PM	H2 valve closed
1/13/2011	5:25:15 PM	BCl3 valve closed
1/13/2011	5:25:15 PM	PH3 valve closed
1/13/2011	5:25:15 PM	SiCl4 pre valve closed
1/13/2011	5:25:15 PM	SiCl4 post valve closed
1/13/2011	5:25:15 PM	Bubbler valve closed
1/13/2011	5:25:15 PM	Main Vac valve opened
1/13/2011	5:25:15 PM	Bypass valve opened
1/13/2011	5:25:15 PM	Helium MFC set to  0.000000
1/13/2011	5:25:15 PM	H2 MFC set to  0.000000
1/13/2011	5:25:15 PM	BCl3 MFC set to  0.000000
1/13/2011	5:25:15 PM	PHl3 MFC set to  0.000000
1/13/2011	5:25:15 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:25:15 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:25:15 PM	Tube furnace set to 0
1/13/2011	5:26:15 PM	H2 valve closed
1/13/2011	5:26:15 PM	BCl3 valve closed
1/13/2011	5:26:15 PM	PH3 valve closed
1/13/2011	5:26:15 PM	SiCl4 pre valve closed
1/13/2011	5:26:15 PM	SiCl4 post valve closed
1/13/2011	5:26:15 PM	Bubbler valve closed
1/13/2011	5:26:15 PM	Helium valve opened
1/13/2011	5:26:15 PM	Main Vac valve opened
1/13/2011	5:26:15 PM	Bypass valve opened
1/13/2011	5:26:15 PM	Helium MFC set to  100.000000
1/13/2011	5:26:15 PM	H2 MFC set to  0.000000
1/13/2011	5:26:15 PM	BCl3 MFC set to  0.000000
1/13/2011	5:26:15 PM	PHl3 MFC set to  0.000000
1/13/2011	5:26:15 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:26:15 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:26:15 PM	Tube furnace set to 0
1/13/2011	5:27:15 PM	Helium valve closed
1/13/2011	5:27:15 PM	H2 valve closed
1/13/2011	5:27:15 PM	BCl3 valve closed
1/13/2011	5:27:15 PM	PH3 valve closed
1/13/2011	5:27:15 PM	SiCl4 pre valve closed
1/13/2011	5:27:15 PM	SiCl4 post valve closed
1/13/2011	5:27:15 PM	Bubbler valve closed
1/13/2011	5:27:15 PM	Main Vac valve opened
1/13/2011	5:27:15 PM	Bypass valve opened
1/13/2011	5:27:15 PM	Helium MFC set to  0.000000
1/13/2011	5:27:15 PM	H2 MFC set to  0.000000
1/13/2011	5:27:15 PM	BCl3 MFC set to  0.000000
1/13/2011	5:27:15 PM	PHl3 MFC set to  0.000000
1/13/2011	5:27:15 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:27:15 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:27:15 PM	Tube furnace set to 0
1/13/2011	5:28:15 PM	H2 valve closed
1/13/2011	5:28:15 PM	BCl3 valve closed
1/13/2011	5:28:15 PM	PH3 valve closed
1/13/2011	5:28:15 PM	SiCl4 pre valve closed
1/13/2011	5:28:15 PM	SiCl4 post valve closed
1/13/2011	5:28:15 PM	Bubbler valve closed
1/13/2011	5:28:15 PM	Helium valve opened
1/13/2011	5:28:15 PM	Main Vac valve opened
1/13/2011	5:28:15 PM	Bypass valve opened
1/13/2011	5:28:15 PM	Helium MFC set to  100.000000
1/13/2011	5:28:15 PM	H2 MFC set to  0.000000
1/13/2011	5:28:15 PM	BCl3 MFC set to  0.000000
1/13/2011	5:28:15 PM	PHl3 MFC set to  0.000000
1/13/2011	5:28:15 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:28:15 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:28:16 PM	Tube furnace set to 0
1/13/2011	5:29:16 PM	Helium valve closed
1/13/2011	5:29:16 PM	H2 valve closed
1/13/2011	5:29:16 PM	BCl3 valve closed
1/13/2011	5:29:16 PM	PH3 valve closed
1/13/2011	5:29:16 PM	SiCl4 pre valve closed
1/13/2011	5:29:16 PM	SiCl4 post valve closed
1/13/2011	5:29:16 PM	Bubbler valve closed
1/13/2011	5:29:16 PM	Main Vac valve opened
1/13/2011	5:29:16 PM	Bypass valve opened
1/13/2011	5:29:16 PM	Helium MFC set to  0.000000
1/13/2011	5:29:16 PM	H2 MFC set to  0.000000
1/13/2011	5:29:16 PM	BCl3 MFC set to  0.000000
1/13/2011	5:29:16 PM	PHl3 MFC set to  0.000000
1/13/2011	5:29:16 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:29:16 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:29:16 PM	Tube furnace set to 0
1/13/2011	5:30:16 PM	H2 valve closed
1/13/2011	5:30:16 PM	BCl3 valve closed
1/13/2011	5:30:16 PM	PH3 valve closed
1/13/2011	5:30:16 PM	SiCl4 pre valve closed
1/13/2011	5:30:16 PM	SiCl4 post valve closed
1/13/2011	5:30:16 PM	Bubbler valve closed
1/13/2011	5:30:16 PM	Helium valve opened
1/13/2011	5:30:16 PM	Main Vac valve opened
1/13/2011	5:30:16 PM	Bypass valve opened
1/13/2011	5:30:16 PM	Helium MFC set to  100.000000
1/13/2011	5:30:16 PM	H2 MFC set to  0.000000
1/13/2011	5:30:16 PM	BCl3 MFC set to  0.000000
1/13/2011	5:30:16 PM	PHl3 MFC set to  0.000000
1/13/2011	5:30:16 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:30:16 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:30:16 PM	Tube furnace set to 0
1/13/2011	5:31:16 PM	Helium valve closed
1/13/2011	5:31:16 PM	H2 valve closed
1/13/2011	5:31:16 PM	BCl3 valve closed
1/13/2011	5:31:16 PM	PH3 valve closed
1/13/2011	5:31:16 PM	SiCl4 pre valve closed
1/13/2011	5:31:16 PM	SiCl4 post valve closed
1/13/2011	5:31:16 PM	Bubbler valve closed
1/13/2011	5:31:16 PM	Main Vac valve opened
1/13/2011	5:31:16 PM	Bypass valve opened
1/13/2011	5:31:16 PM	Helium MFC set to  0.000000
1/13/2011	5:31:16 PM	H2 MFC set to  0.000000
1/13/2011	5:31:16 PM	BCl3 MFC set to  0.000000
1/13/2011	5:31:16 PM	PHl3 MFC set to  0.000000
1/13/2011	5:31:16 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:31:16 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:31:16 PM	Tube furnace set to 0
1/13/2011	5:31:17 PM	Run finished at 5:31 PM
1/13/2011	5:31:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	5:36:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/13/2011	5:36:59 PM	Recipe started at 5:36 PM
1/13/2011	5:36:59 PM	Helium valve closed
1/13/2011	5:36:59 PM	H2 valve closed
1/13/2011	5:36:59 PM	BCl3 valve closed
1/13/2011	5:36:59 PM	PH3 valve closed
1/13/2011	5:36:59 PM	SiCl4 pre valve closed
1/13/2011	5:36:59 PM	SiCl4 post valve closed
1/13/2011	5:36:59 PM	Main Vac valve closed
1/13/2011	5:36:59 PM	Bypass valve closed
1/13/2011	5:36:59 PM	Bubbler valve closed
1/13/2011	5:36:59 PM	Helium MFC set to  0.000000
1/13/2011	5:36:59 PM	H2 MFC set to  0.000000
1/13/2011	5:36:59 PM	BCl3 MFC set to  0.000000
1/13/2011	5:36:59 PM	PHl3 MFC set to  0.000000
1/13/2011	5:36:59 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:36:59 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:36:59 PM	Tube furnace set to 0
1/13/2011	5:36:59 PM	Run finished at 5:36 PM
1/13/2011	5:36:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/13/2011	5:37:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	5:37:34 PM	Recipe started at 5:37 PM
1/13/2011	5:37:34 PM	Helium valve closed
1/13/2011	5:37:34 PM	H2 valve closed
1/13/2011	5:37:34 PM	BCl3 valve closed
1/13/2011	5:37:34 PM	PH3 valve closed
1/13/2011	5:37:34 PM	SiCl4 pre valve closed
1/13/2011	5:37:34 PM	SiCl4 post valve closed
1/13/2011	5:37:34 PM	Main Vac valve closed
1/13/2011	5:37:34 PM	Bubbler valve closed
1/13/2011	5:37:34 PM	Bypass valve opened
1/13/2011	5:37:34 PM	Helium MFC set to  0.000000
1/13/2011	5:37:34 PM	H2 MFC set to  0.000000
1/13/2011	5:37:34 PM	BCl3 MFC set to  0.000000
1/13/2011	5:37:34 PM	PHl3 MFC set to  0.000000
1/13/2011	5:37:34 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:37:34 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:37:34 PM	Tube furnace set to 0
1/13/2011	5:37:34 PM	Helium valve closed
1/13/2011	5:37:34 PM	H2 valve closed
1/13/2011	5:37:34 PM	BCl3 valve closed
1/13/2011	5:37:34 PM	PH3 valve closed
1/13/2011	5:37:34 PM	SiCl4 pre valve closed
1/13/2011	5:37:34 PM	SiCl4 post valve closed
1/13/2011	5:37:34 PM	Bubbler valve closed
1/13/2011	5:37:34 PM	Main Vac valve opened
1/13/2011	5:37:34 PM	Bypass valve opened
1/13/2011	5:37:34 PM	Helium MFC set to  0.000000
1/13/2011	5:37:34 PM	H2 MFC set to  0.000000
1/13/2011	5:37:34 PM	BCl3 MFC set to  0.000000
1/13/2011	5:37:34 PM	PHl3 MFC set to  0.000000
1/13/2011	5:37:34 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:37:34 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:37:34 PM	Tube furnace set to 0
1/13/2011	5:37:35 PM	Run finished at 5:37 PM
1/13/2011	5:37:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	5:38:32 PM	Recipe started at 5:38 PM
1/13/2011	5:38:32 PM	Helium valve closed
1/13/2011	5:38:32 PM	BCl3 valve closed
1/13/2011	5:38:32 PM	PH3 valve closed
1/13/2011	5:38:32 PM	SiCl4 pre valve closed
1/13/2011	5:38:32 PM	SiCl4 post valve closed
1/13/2011	5:38:32 PM	Main Vac valve closed
1/13/2011	5:38:32 PM	Bypass valve closed
1/13/2011	5:38:32 PM	Bubbler valve closed
1/13/2011	5:38:32 PM	H2 valve opened
1/13/2011	5:38:32 PM	Helium MFC set to  0.000000
1/13/2011	5:38:32 PM	H2 MFC set to  500.000000
1/13/2011	5:38:32 PM	BCl3 MFC set to  0.000000
1/13/2011	5:38:32 PM	PHl3 MFC set to  0.000000
1/13/2011	5:38:32 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:38:32 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:38:32 PM	Tube furnace set to 0
1/13/2011	5:39:53 PM	Helium valve closed
1/13/2011	5:39:53 PM	BCl3 valve closed
1/13/2011	5:39:53 PM	PH3 valve closed
1/13/2011	5:39:53 PM	SiCl4 pre valve closed
1/13/2011	5:39:53 PM	SiCl4 post valve closed
1/13/2011	5:39:53 PM	Main Vac valve closed
1/13/2011	5:39:53 PM	Bypass valve closed
1/13/2011	5:39:53 PM	H2 valve opened
1/13/2011	5:39:53 PM	Bubbler valve opened
1/13/2011	5:39:53 PM	Helium MFC set to  0.000000
1/13/2011	5:39:53 PM	H2 MFC set to  500.000000
1/13/2011	5:39:53 PM	BCl3 MFC set to  0.000000
1/13/2011	5:39:53 PM	PHl3 MFC set to  0.000000
1/13/2011	5:39:53 PM	SiCl4 MFC set to  0.000000
1/13/2011	5:39:53 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:39:53 PM	Tube furnace set to 1000
1/13/2011	5:59:53 PM	Helium valve closed
1/13/2011	5:59:53 PM	PH3 valve closed
1/13/2011	5:59:53 PM	Main Vac valve closed
1/13/2011	5:59:53 PM	Bypass valve closed
1/13/2011	5:59:53 PM	H2 valve opened
1/13/2011	5:59:53 PM	BCl3 valve opened
1/13/2011	5:59:53 PM	SiCl4 pre valve opened
1/13/2011	5:59:53 PM	SiCl4 post valve opened
1/13/2011	5:59:53 PM	Bubbler valve opened
1/13/2011	5:59:53 PM	Helium MFC set to  0.000000
1/13/2011	5:59:53 PM	H2 MFC set to  500.000000
1/13/2011	5:59:53 PM	BCl3 MFC set to  1.800000
1/13/2011	5:59:53 PM	PHl3 MFC set to  0.000000
1/13/2011	5:59:53 PM	SiCl4 MFC set to  50.000000
1/13/2011	5:59:53 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	5:59:53 PM	Tube furnace set to 1000
1/13/2011	6:19:53 PM	H2 valve closed
1/13/2011	6:19:53 PM	BCl3 valve closed
1/13/2011	6:19:53 PM	PH3 valve closed
1/13/2011	6:19:53 PM	SiCl4 pre valve closed
1/13/2011	6:19:53 PM	SiCl4 post valve closed
1/13/2011	6:19:53 PM	Main Vac valve closed
1/13/2011	6:19:53 PM	Bypass valve closed
1/13/2011	6:19:53 PM	Helium valve opened
1/13/2011	6:19:53 PM	Bubbler valve opened
1/13/2011	6:19:53 PM	Helium MFC set to  500.000000
1/13/2011	6:19:53 PM	H2 MFC set to  0.000000
1/13/2011	6:19:53 PM	BCl3 MFC set to  0.000000
1/13/2011	6:19:53 PM	PHl3 MFC set to  0.000000
1/13/2011	6:19:53 PM	SiCl4 MFC set to  0.000000
1/13/2011	6:19:53 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	6:19:54 PM	Tube furnace set to 0
1/13/2011	6:39:54 PM	Helium valve closed
1/13/2011	6:39:54 PM	H2 valve closed
1/13/2011	6:39:54 PM	BCl3 valve closed
1/13/2011	6:39:54 PM	PH3 valve closed
1/13/2011	6:39:54 PM	SiCl4 pre valve closed
1/13/2011	6:39:54 PM	SiCl4 post valve closed
1/13/2011	6:39:54 PM	Main Vac valve closed
1/13/2011	6:39:54 PM	Bypass valve closed
1/13/2011	6:39:54 PM	Bubbler valve closed
1/13/2011	6:39:54 PM	Helium MFC set to  0.000000
1/13/2011	6:39:54 PM	H2 MFC set to  0.000000
1/13/2011	6:39:54 PM	BCl3 MFC set to  0.000000
1/13/2011	6:39:54 PM	PHl3 MFC set to  0.000000
1/13/2011	6:39:54 PM	SiCl4 MFC set to  0.000000
1/13/2011	6:39:54 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	6:39:54 PM	Tube furnace set to 0
1/13/2011	6:39:54 PM	Run finished at 6:39 PM
1/13/2011	7:29:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2011	7:29:41 PM	Recipe started at 7:29 PM
1/13/2011	7:29:41 PM	H2 valve closed
1/13/2011	7:29:41 PM	BCl3 valve closed
1/13/2011	7:29:41 PM	PH3 valve closed
1/13/2011	7:29:41 PM	SiCl4 pre valve closed
1/13/2011	7:29:41 PM	SiCl4 post valve closed
1/13/2011	7:29:41 PM	Main Vac valve closed
1/13/2011	7:29:41 PM	Bypass valve closed
1/13/2011	7:29:41 PM	Bubbler valve closed
1/13/2011	7:29:41 PM	Helium valve opened
1/13/2011	7:29:41 PM	Helium MFC set to  500.000000
1/13/2011	7:29:41 PM	H2 MFC set to  0.000000
1/13/2011	7:29:41 PM	BCl3 MFC set to  0.000000
1/13/2011	7:29:41 PM	PHl3 MFC set to  0.000000
1/13/2011	7:29:41 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:29:41 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:29:41 PM	Tube furnace set to 0
1/13/2011	7:29:45 PM	Helium valve closed
1/13/2011	7:29:45 PM	H2 valve closed
1/13/2011	7:29:45 PM	BCl3 valve closed
1/13/2011	7:29:45 PM	PH3 valve closed
1/13/2011	7:29:45 PM	SiCl4 pre valve closed
1/13/2011	7:29:45 PM	SiCl4 post valve closed
1/13/2011	7:29:45 PM	Main Vac valve closed
1/13/2011	7:29:45 PM	Bypass valve closed
1/13/2011	7:29:45 PM	Bubbler valve closed
1/13/2011	7:29:45 PM	Helium MFC set to  0.000000
1/13/2011	7:29:45 PM	H2 MFC set to  0.000000
1/13/2011	7:29:45 PM	BCl3 MFC set to  0.000000
1/13/2011	7:29:45 PM	PHl3 MFC set to  0.000000
1/13/2011	7:29:45 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:29:45 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:29:45 PM	Tube furnace set to 0
1/13/2011	7:29:45 PM	Run finished at 7:29 PM
1/13/2011	7:29:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2011	7:39:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	7:39:05 PM	Recipe started at 7:39 PM
1/13/2011	7:39:05 PM	Helium valve closed
1/13/2011	7:39:05 PM	H2 valve closed
1/13/2011	7:39:05 PM	BCl3 valve closed
1/13/2011	7:39:05 PM	PH3 valve closed
1/13/2011	7:39:05 PM	SiCl4 pre valve closed
1/13/2011	7:39:05 PM	SiCl4 post valve closed
1/13/2011	7:39:05 PM	Main Vac valve closed
1/13/2011	7:39:05 PM	Bubbler valve closed
1/13/2011	7:39:05 PM	Bypass valve opened
1/13/2011	7:39:05 PM	Helium MFC set to  0.000000
1/13/2011	7:39:05 PM	H2 MFC set to  0.000000
1/13/2011	7:39:05 PM	BCl3 MFC set to  0.000000
1/13/2011	7:39:05 PM	PHl3 MFC set to  0.000000
1/13/2011	7:39:05 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:39:05 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:39:06 PM	Tube furnace set to 0
1/13/2011	7:39:38 PM	Helium valve closed
1/13/2011	7:39:38 PM	H2 valve closed
1/13/2011	7:39:38 PM	BCl3 valve closed
1/13/2011	7:39:38 PM	PH3 valve closed
1/13/2011	7:39:38 PM	SiCl4 pre valve closed
1/13/2011	7:39:38 PM	SiCl4 post valve closed
1/13/2011	7:39:38 PM	Bubbler valve closed
1/13/2011	7:39:38 PM	Main Vac valve opened
1/13/2011	7:39:38 PM	Bypass valve opened
1/13/2011	7:39:38 PM	Helium MFC set to  0.000000
1/13/2011	7:39:38 PM	H2 MFC set to  0.000000
1/13/2011	7:39:38 PM	BCl3 MFC set to  0.000000
1/13/2011	7:39:38 PM	PHl3 MFC set to  0.000000
1/13/2011	7:39:38 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:39:38 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:39:39 PM	Tube furnace set to 0
1/13/2011	7:39:39 PM	Run finished at 7:39 PM
1/13/2011	7:39:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	7:42:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	7:42:17 PM	Recipe started at 7:42 PM
1/13/2011	7:42:17 PM	Helium valve closed
1/13/2011	7:42:17 PM	H2 valve closed
1/13/2011	7:42:17 PM	BCl3 valve closed
1/13/2011	7:42:17 PM	PH3 valve closed
1/13/2011	7:42:17 PM	SiCl4 pre valve closed
1/13/2011	7:42:17 PM	SiCl4 post valve closed
1/13/2011	7:42:17 PM	Main Vac valve closed
1/13/2011	7:42:17 PM	Bubbler valve closed
1/13/2011	7:42:17 PM	Bypass valve opened
1/13/2011	7:42:17 PM	Helium MFC set to  0.000000
1/13/2011	7:42:17 PM	H2 MFC set to  0.000000
1/13/2011	7:42:17 PM	BCl3 MFC set to  0.000000
1/13/2011	7:42:17 PM	PHl3 MFC set to  0.000000
1/13/2011	7:42:17 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:42:17 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:42:18 PM	Tube furnace set to 0
1/13/2011	7:42:18 PM	Helium valve closed
1/13/2011	7:42:18 PM	H2 valve closed
1/13/2011	7:42:18 PM	BCl3 valve closed
1/13/2011	7:42:18 PM	PH3 valve closed
1/13/2011	7:42:18 PM	SiCl4 pre valve closed
1/13/2011	7:42:18 PM	SiCl4 post valve closed
1/13/2011	7:42:18 PM	Bubbler valve closed
1/13/2011	7:42:18 PM	Main Vac valve opened
1/13/2011	7:42:18 PM	Bypass valve opened
1/13/2011	7:42:18 PM	Helium MFC set to  0.000000
1/13/2011	7:42:18 PM	H2 MFC set to  0.000000
1/13/2011	7:42:18 PM	BCl3 MFC set to  0.000000
1/13/2011	7:42:18 PM	PHl3 MFC set to  0.000000
1/13/2011	7:42:18 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:42:18 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:42:18 PM	Tube furnace set to 0
1/13/2011	7:43:18 PM	H2 valve closed
1/13/2011	7:43:18 PM	BCl3 valve closed
1/13/2011	7:43:18 PM	PH3 valve closed
1/13/2011	7:43:18 PM	SiCl4 pre valve closed
1/13/2011	7:43:18 PM	SiCl4 post valve closed
1/13/2011	7:43:18 PM	Bubbler valve closed
1/13/2011	7:43:18 PM	Helium valve opened
1/13/2011	7:43:18 PM	Main Vac valve opened
1/13/2011	7:43:18 PM	Bypass valve opened
1/13/2011	7:43:18 PM	Helium MFC set to  100.000000
1/13/2011	7:43:18 PM	H2 MFC set to  0.000000
1/13/2011	7:43:18 PM	BCl3 MFC set to  0.000000
1/13/2011	7:43:18 PM	PHl3 MFC set to  0.000000
1/13/2011	7:43:18 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:43:18 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:43:18 PM	Tube furnace set to 0
1/13/2011	7:44:18 PM	Helium valve closed
1/13/2011	7:44:18 PM	H2 valve closed
1/13/2011	7:44:18 PM	BCl3 valve closed
1/13/2011	7:44:18 PM	PH3 valve closed
1/13/2011	7:44:18 PM	SiCl4 pre valve closed
1/13/2011	7:44:18 PM	SiCl4 post valve closed
1/13/2011	7:44:18 PM	Bubbler valve closed
1/13/2011	7:44:18 PM	Main Vac valve opened
1/13/2011	7:44:18 PM	Bypass valve opened
1/13/2011	7:44:18 PM	Helium MFC set to  0.000000
1/13/2011	7:44:18 PM	H2 MFC set to  0.000000
1/13/2011	7:44:18 PM	BCl3 MFC set to  0.000000
1/13/2011	7:44:18 PM	PHl3 MFC set to  0.000000
1/13/2011	7:44:18 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:44:18 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:44:18 PM	Tube furnace set to 0
1/13/2011	7:45:19 PM	H2 valve closed
1/13/2011	7:45:19 PM	BCl3 valve closed
1/13/2011	7:45:19 PM	PH3 valve closed
1/13/2011	7:45:19 PM	SiCl4 pre valve closed
1/13/2011	7:45:19 PM	SiCl4 post valve closed
1/13/2011	7:45:19 PM	Bubbler valve closed
1/13/2011	7:45:19 PM	Helium valve opened
1/13/2011	7:45:19 PM	Main Vac valve opened
1/13/2011	7:45:19 PM	Bypass valve opened
1/13/2011	7:45:19 PM	Helium MFC set to  100.000000
1/13/2011	7:45:19 PM	H2 MFC set to  0.000000
1/13/2011	7:45:19 PM	BCl3 MFC set to  0.000000
1/13/2011	7:45:19 PM	PHl3 MFC set to  0.000000
1/13/2011	7:45:19 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:45:19 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:45:19 PM	Tube furnace set to 0
1/13/2011	7:46:19 PM	Helium valve closed
1/13/2011	7:46:19 PM	H2 valve closed
1/13/2011	7:46:19 PM	BCl3 valve closed
1/13/2011	7:46:19 PM	PH3 valve closed
1/13/2011	7:46:19 PM	SiCl4 pre valve closed
1/13/2011	7:46:19 PM	SiCl4 post valve closed
1/13/2011	7:46:19 PM	Bubbler valve closed
1/13/2011	7:46:19 PM	Main Vac valve opened
1/13/2011	7:46:19 PM	Bypass valve opened
1/13/2011	7:46:19 PM	Helium MFC set to  0.000000
1/13/2011	7:46:19 PM	H2 MFC set to  0.000000
1/13/2011	7:46:19 PM	BCl3 MFC set to  0.000000
1/13/2011	7:46:19 PM	PHl3 MFC set to  0.000000
1/13/2011	7:46:19 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:46:19 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:46:19 PM	Tube furnace set to 0
1/13/2011	7:47:19 PM	H2 valve closed
1/13/2011	7:47:19 PM	BCl3 valve closed
1/13/2011	7:47:19 PM	PH3 valve closed
1/13/2011	7:47:19 PM	SiCl4 pre valve closed
1/13/2011	7:47:19 PM	SiCl4 post valve closed
1/13/2011	7:47:19 PM	Bubbler valve closed
1/13/2011	7:47:19 PM	Helium valve opened
1/13/2011	7:47:19 PM	Main Vac valve opened
1/13/2011	7:47:19 PM	Bypass valve opened
1/13/2011	7:47:19 PM	Helium MFC set to  100.000000
1/13/2011	7:47:19 PM	H2 MFC set to  0.000000
1/13/2011	7:47:19 PM	BCl3 MFC set to  0.000000
1/13/2011	7:47:19 PM	PHl3 MFC set to  0.000000
1/13/2011	7:47:19 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:47:19 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:47:19 PM	Tube furnace set to 0
1/13/2011	7:48:19 PM	Helium valve closed
1/13/2011	7:48:19 PM	H2 valve closed
1/13/2011	7:48:19 PM	BCl3 valve closed
1/13/2011	7:48:19 PM	PH3 valve closed
1/13/2011	7:48:19 PM	SiCl4 pre valve closed
1/13/2011	7:48:19 PM	SiCl4 post valve closed
1/13/2011	7:48:19 PM	Bubbler valve closed
1/13/2011	7:48:19 PM	Main Vac valve opened
1/13/2011	7:48:19 PM	Bypass valve opened
1/13/2011	7:48:19 PM	Helium MFC set to  0.000000
1/13/2011	7:48:19 PM	H2 MFC set to  0.000000
1/13/2011	7:48:19 PM	BCl3 MFC set to  0.000000
1/13/2011	7:48:19 PM	PHl3 MFC set to  0.000000
1/13/2011	7:48:19 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:48:19 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:48:19 PM	Tube furnace set to 0
1/13/2011	7:49:19 PM	H2 valve closed
1/13/2011	7:49:19 PM	BCl3 valve closed
1/13/2011	7:49:19 PM	PH3 valve closed
1/13/2011	7:49:19 PM	SiCl4 pre valve closed
1/13/2011	7:49:19 PM	SiCl4 post valve closed
1/13/2011	7:49:19 PM	Bubbler valve closed
1/13/2011	7:49:19 PM	Helium valve opened
1/13/2011	7:49:19 PM	Main Vac valve opened
1/13/2011	7:49:19 PM	Bypass valve opened
1/13/2011	7:49:19 PM	Helium MFC set to  100.000000
1/13/2011	7:49:19 PM	H2 MFC set to  0.000000
1/13/2011	7:49:19 PM	BCl3 MFC set to  0.000000
1/13/2011	7:49:19 PM	PHl3 MFC set to  0.000000
1/13/2011	7:49:19 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:49:19 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:49:19 PM	Tube furnace set to 0
1/13/2011	7:50:20 PM	Helium valve closed
1/13/2011	7:50:20 PM	H2 valve closed
1/13/2011	7:50:20 PM	BCl3 valve closed
1/13/2011	7:50:20 PM	PH3 valve closed
1/13/2011	7:50:20 PM	SiCl4 pre valve closed
1/13/2011	7:50:20 PM	SiCl4 post valve closed
1/13/2011	7:50:20 PM	Bubbler valve closed
1/13/2011	7:50:20 PM	Main Vac valve opened
1/13/2011	7:50:20 PM	Bypass valve opened
1/13/2011	7:50:20 PM	Helium MFC set to  0.000000
1/13/2011	7:50:20 PM	H2 MFC set to  0.000000
1/13/2011	7:50:20 PM	BCl3 MFC set to  0.000000
1/13/2011	7:50:20 PM	PHl3 MFC set to  0.000000
1/13/2011	7:50:20 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:50:20 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:50:20 PM	Tube furnace set to 0
1/13/2011	7:51:20 PM	H2 valve closed
1/13/2011	7:51:20 PM	BCl3 valve closed
1/13/2011	7:51:20 PM	PH3 valve closed
1/13/2011	7:51:20 PM	SiCl4 pre valve closed
1/13/2011	7:51:20 PM	SiCl4 post valve closed
1/13/2011	7:51:20 PM	Bubbler valve closed
1/13/2011	7:51:20 PM	Helium valve opened
1/13/2011	7:51:20 PM	Main Vac valve opened
1/13/2011	7:51:20 PM	Bypass valve opened
1/13/2011	7:51:20 PM	Helium MFC set to  100.000000
1/13/2011	7:51:20 PM	H2 MFC set to  0.000000
1/13/2011	7:51:20 PM	BCl3 MFC set to  0.000000
1/13/2011	7:51:20 PM	PHl3 MFC set to  0.000000
1/13/2011	7:51:20 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:51:20 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:51:20 PM	Tube furnace set to 0
1/13/2011	7:52:20 PM	Helium valve closed
1/13/2011	7:52:20 PM	H2 valve closed
1/13/2011	7:52:20 PM	BCl3 valve closed
1/13/2011	7:52:20 PM	PH3 valve closed
1/13/2011	7:52:20 PM	SiCl4 pre valve closed
1/13/2011	7:52:20 PM	SiCl4 post valve closed
1/13/2011	7:52:20 PM	Bubbler valve closed
1/13/2011	7:52:20 PM	Main Vac valve opened
1/13/2011	7:52:20 PM	Bypass valve opened
1/13/2011	7:52:20 PM	Helium MFC set to  0.000000
1/13/2011	7:52:20 PM	H2 MFC set to  0.000000
1/13/2011	7:52:20 PM	BCl3 MFC set to  0.000000
1/13/2011	7:52:20 PM	PHl3 MFC set to  0.000000
1/13/2011	7:52:20 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:52:20 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:52:20 PM	Tube furnace set to 0
1/13/2011	7:53:20 PM	H2 valve closed
1/13/2011	7:53:20 PM	BCl3 valve closed
1/13/2011	7:53:20 PM	PH3 valve closed
1/13/2011	7:53:20 PM	SiCl4 pre valve closed
1/13/2011	7:53:20 PM	SiCl4 post valve closed
1/13/2011	7:53:20 PM	Bubbler valve closed
1/13/2011	7:53:20 PM	Helium valve opened
1/13/2011	7:53:20 PM	Main Vac valve opened
1/13/2011	7:53:20 PM	Bypass valve opened
1/13/2011	7:53:20 PM	Helium MFC set to  100.000000
1/13/2011	7:53:20 PM	H2 MFC set to  0.000000
1/13/2011	7:53:20 PM	BCl3 MFC set to  0.000000
1/13/2011	7:53:20 PM	PHl3 MFC set to  0.000000
1/13/2011	7:53:20 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:53:20 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:53:20 PM	Tube furnace set to 0
1/13/2011	7:54:20 PM	Helium valve closed
1/13/2011	7:54:20 PM	H2 valve closed
1/13/2011	7:54:20 PM	BCl3 valve closed
1/13/2011	7:54:20 PM	PH3 valve closed
1/13/2011	7:54:20 PM	SiCl4 pre valve closed
1/13/2011	7:54:20 PM	SiCl4 post valve closed
1/13/2011	7:54:20 PM	Bubbler valve closed
1/13/2011	7:54:20 PM	Main Vac valve opened
1/13/2011	7:54:20 PM	Bypass valve opened
1/13/2011	7:54:20 PM	Helium MFC set to  0.000000
1/13/2011	7:54:20 PM	H2 MFC set to  0.000000
1/13/2011	7:54:20 PM	BCl3 MFC set to  0.000000
1/13/2011	7:54:20 PM	PHl3 MFC set to  0.000000
1/13/2011	7:54:20 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:54:20 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:54:21 PM	Tube furnace set to 0
1/13/2011	7:55:12 PM	Run aborted at 7:55 PM
1/13/2011	7:55:12 PM	Helium valve closed
1/13/2011	7:55:12 PM	H2 valve closed
1/13/2011	7:55:12 PM	BCl3 valve closed
1/13/2011	7:55:12 PM	PH3 valve closed
1/13/2011	7:55:12 PM	SiCl4 pre valve closed
1/13/2011	7:55:12 PM	SiCl4 post valve closed
1/13/2011	7:55:12 PM	Bypass valve closed
1/13/2011	7:55:12 PM	Main Vac valve closed
1/13/2011	7:55:12 PM	Bubbler valve closed
1/13/2011	7:55:12 PM	Helium MFC set to  0.000000
1/13/2011	7:55:12 PM	H2 MFC set to  0.000000
1/13/2011	7:55:12 PM	BCl3 MFC set to  0.000000
1/13/2011	7:55:12 PM	PHl3 MFC set to  0.000000
1/13/2011	7:55:12 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:55:12 PM	Tube furnace set to 0
1/13/2011	7:55:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	7:55:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	7:55:25 PM	Recipe started at 7:55 PM
1/13/2011	7:55:25 PM	Helium valve closed
1/13/2011	7:55:25 PM	H2 valve closed
1/13/2011	7:55:25 PM	BCl3 valve closed
1/13/2011	7:55:25 PM	PH3 valve closed
1/13/2011	7:55:25 PM	SiCl4 pre valve closed
1/13/2011	7:55:25 PM	SiCl4 post valve closed
1/13/2011	7:55:25 PM	Main Vac valve closed
1/13/2011	7:55:25 PM	Bubbler valve closed
1/13/2011	7:55:25 PM	Bypass valve opened
1/13/2011	7:55:25 PM	Helium MFC set to  0.000000
1/13/2011	7:55:25 PM	H2 MFC set to  0.000000
1/13/2011	7:55:25 PM	BCl3 MFC set to  0.000000
1/13/2011	7:55:25 PM	PHl3 MFC set to  0.000000
1/13/2011	7:55:25 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:55:25 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:55:25 PM	Tube furnace set to 0
1/13/2011	7:55:26 PM	Helium valve closed
1/13/2011	7:55:26 PM	H2 valve closed
1/13/2011	7:55:26 PM	BCl3 valve closed
1/13/2011	7:55:26 PM	PH3 valve closed
1/13/2011	7:55:26 PM	SiCl4 pre valve closed
1/13/2011	7:55:26 PM	SiCl4 post valve closed
1/13/2011	7:55:26 PM	Bubbler valve closed
1/13/2011	7:55:26 PM	Main Vac valve opened
1/13/2011	7:55:26 PM	Bypass valve opened
1/13/2011	7:55:26 PM	Helium MFC set to  0.000000
1/13/2011	7:55:26 PM	H2 MFC set to  0.000000
1/13/2011	7:55:26 PM	BCl3 MFC set to  0.000000
1/13/2011	7:55:26 PM	PHl3 MFC set to  0.000000
1/13/2011	7:55:26 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:55:26 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:55:26 PM	Tube furnace set to 0
1/13/2011	7:55:26 PM	Run finished at 7:55 PM
1/13/2011	7:55:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	7:56:38 PM	Recipe started at 7:56 PM
1/13/2011	7:56:38 PM	Helium valve closed
1/13/2011	7:56:38 PM	BCl3 valve closed
1/13/2011	7:56:38 PM	PH3 valve closed
1/13/2011	7:56:38 PM	SiCl4 pre valve closed
1/13/2011	7:56:38 PM	SiCl4 post valve closed
1/13/2011	7:56:38 PM	Main Vac valve closed
1/13/2011	7:56:38 PM	Bypass valve closed
1/13/2011	7:56:38 PM	Bubbler valve closed
1/13/2011	7:56:38 PM	H2 valve opened
1/13/2011	7:56:38 PM	Helium MFC set to  0.000000
1/13/2011	7:56:38 PM	H2 MFC set to  500.000000
1/13/2011	7:56:38 PM	BCl3 MFC set to  0.000000
1/13/2011	7:56:38 PM	PHl3 MFC set to  0.000000
1/13/2011	7:56:38 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:56:38 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:56:38 PM	Tube furnace set to 0
1/13/2011	7:57:58 PM	Helium valve closed
1/13/2011	7:57:58 PM	BCl3 valve closed
1/13/2011	7:57:58 PM	PH3 valve closed
1/13/2011	7:57:58 PM	SiCl4 pre valve closed
1/13/2011	7:57:58 PM	SiCl4 post valve closed
1/13/2011	7:57:58 PM	Main Vac valve closed
1/13/2011	7:57:58 PM	Bypass valve closed
1/13/2011	7:57:58 PM	H2 valve opened
1/13/2011	7:57:58 PM	Bubbler valve opened
1/13/2011	7:57:58 PM	Helium MFC set to  0.000000
1/13/2011	7:57:58 PM	H2 MFC set to  500.000000
1/13/2011	7:57:58 PM	BCl3 MFC set to  0.000000
1/13/2011	7:57:58 PM	PHl3 MFC set to  0.000000
1/13/2011	7:57:58 PM	SiCl4 MFC set to  0.000000
1/13/2011	7:57:58 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	7:57:58 PM	Tube furnace set to 1000
1/13/2011	8:17:58 PM	Helium valve closed
1/13/2011	8:17:58 PM	PH3 valve closed
1/13/2011	8:17:58 PM	Main Vac valve closed
1/13/2011	8:17:58 PM	Bypass valve closed
1/13/2011	8:17:58 PM	H2 valve opened
1/13/2011	8:17:58 PM	BCl3 valve opened
1/13/2011	8:17:58 PM	SiCl4 pre valve opened
1/13/2011	8:17:58 PM	SiCl4 post valve opened
1/13/2011	8:17:58 PM	Bubbler valve opened
1/13/2011	8:17:58 PM	Helium MFC set to  0.000000
1/13/2011	8:17:58 PM	H2 MFC set to  500.000000
1/13/2011	8:17:58 PM	BCl3 MFC set to  1.800000
1/13/2011	8:17:58 PM	PHl3 MFC set to  0.000000
1/13/2011	8:17:58 PM	SiCl4 MFC set to  50.000000
1/13/2011	8:17:58 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	8:17:58 PM	Tube furnace set to 1000
1/13/2011	8:42:58 PM	H2 valve closed
1/13/2011	8:42:58 PM	BCl3 valve closed
1/13/2011	8:42:58 PM	PH3 valve closed
1/13/2011	8:42:58 PM	SiCl4 pre valve closed
1/13/2011	8:42:58 PM	SiCl4 post valve closed
1/13/2011	8:42:58 PM	Main Vac valve closed
1/13/2011	8:42:58 PM	Bypass valve closed
1/13/2011	8:42:58 PM	Helium valve opened
1/13/2011	8:42:58 PM	Bubbler valve opened
1/13/2011	8:42:58 PM	Helium MFC set to  500.000000
1/13/2011	8:42:58 PM	H2 MFC set to  0.000000
1/13/2011	8:42:58 PM	BCl3 MFC set to  0.000000
1/13/2011	8:42:58 PM	PHl3 MFC set to  0.000000
1/13/2011	8:42:58 PM	SiCl4 MFC set to  0.000000
1/13/2011	8:42:58 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	8:42:58 PM	Tube furnace set to 0
1/13/2011	9:02:58 PM	Helium valve closed
1/13/2011	9:02:58 PM	H2 valve closed
1/13/2011	9:02:58 PM	BCl3 valve closed
1/13/2011	9:02:58 PM	PH3 valve closed
1/13/2011	9:02:59 PM	SiCl4 pre valve closed
1/13/2011	9:02:59 PM	SiCl4 post valve closed
1/13/2011	9:02:59 PM	Main Vac valve closed
1/13/2011	9:02:59 PM	Bypass valve closed
1/13/2011	9:02:59 PM	Bubbler valve closed
1/13/2011	9:02:59 PM	Helium MFC set to  0.000000
1/13/2011	9:02:59 PM	H2 MFC set to  0.000000
1/13/2011	9:02:59 PM	BCl3 MFC set to  0.000000
1/13/2011	9:02:59 PM	PHl3 MFC set to  0.000000
1/13/2011	9:02:59 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:02:59 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:02:59 PM	Tube furnace set to 0
1/13/2011	9:02:59 PM	Run finished at 9:02 PM
1/13/2011	9:29:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2011	9:29:27 PM	Recipe started at 9:29 PM
1/13/2011	9:29:27 PM	H2 valve closed
1/13/2011	9:29:27 PM	BCl3 valve closed
1/13/2011	9:29:27 PM	PH3 valve closed
1/13/2011	9:29:27 PM	SiCl4 pre valve closed
1/13/2011	9:29:27 PM	SiCl4 post valve closed
1/13/2011	9:29:27 PM	Main Vac valve closed
1/13/2011	9:29:27 PM	Bypass valve closed
1/13/2011	9:29:27 PM	Bubbler valve closed
1/13/2011	9:29:27 PM	Helium valve opened
1/13/2011	9:29:27 PM	Helium MFC set to  500.000000
1/13/2011	9:29:27 PM	H2 MFC set to  0.000000
1/13/2011	9:29:27 PM	BCl3 MFC set to  0.000000
1/13/2011	9:29:27 PM	PHl3 MFC set to  0.000000
1/13/2011	9:29:27 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:29:27 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:29:27 PM	Tube furnace set to 0
1/13/2011	9:29:35 PM	Helium valve closed
1/13/2011	9:29:35 PM	H2 valve closed
1/13/2011	9:29:35 PM	BCl3 valve closed
1/13/2011	9:29:35 PM	PH3 valve closed
1/13/2011	9:29:35 PM	SiCl4 pre valve closed
1/13/2011	9:29:35 PM	SiCl4 post valve closed
1/13/2011	9:29:35 PM	Main Vac valve closed
1/13/2011	9:29:35 PM	Bypass valve closed
1/13/2011	9:29:35 PM	Bubbler valve closed
1/13/2011	9:29:35 PM	Helium MFC set to  0.000000
1/13/2011	9:29:35 PM	H2 MFC set to  0.000000
1/13/2011	9:29:35 PM	BCl3 MFC set to  0.000000
1/13/2011	9:29:35 PM	PHl3 MFC set to  0.000000
1/13/2011	9:29:35 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:29:35 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:29:35 PM	Tube furnace set to 0
1/13/2011	9:29:35 PM	Run finished at 9:29 PM
1/13/2011	9:29:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2011	9:39:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	9:39:22 PM	Recipe started at 9:39 PM
1/13/2011	9:39:22 PM	Helium valve closed
1/13/2011	9:39:22 PM	H2 valve closed
1/13/2011	9:39:22 PM	BCl3 valve closed
1/13/2011	9:39:22 PM	PH3 valve closed
1/13/2011	9:39:22 PM	SiCl4 pre valve closed
1/13/2011	9:39:22 PM	SiCl4 post valve closed
1/13/2011	9:39:22 PM	Main Vac valve closed
1/13/2011	9:39:22 PM	Bubbler valve closed
1/13/2011	9:39:22 PM	Bypass valve opened
1/13/2011	9:39:22 PM	Helium MFC set to  0.000000
1/13/2011	9:39:22 PM	H2 MFC set to  0.000000
1/13/2011	9:39:22 PM	BCl3 MFC set to  0.000000
1/13/2011	9:39:22 PM	PHl3 MFC set to  0.000000
1/13/2011	9:39:22 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:39:22 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:39:22 PM	Tube furnace set to 0
1/13/2011	9:39:55 PM	Helium valve closed
1/13/2011	9:39:55 PM	H2 valve closed
1/13/2011	9:39:55 PM	BCl3 valve closed
1/13/2011	9:39:55 PM	PH3 valve closed
1/13/2011	9:39:55 PM	SiCl4 pre valve closed
1/13/2011	9:39:55 PM	SiCl4 post valve closed
1/13/2011	9:39:55 PM	Bubbler valve closed
1/13/2011	9:39:55 PM	Main Vac valve opened
1/13/2011	9:39:55 PM	Bypass valve opened
1/13/2011	9:39:55 PM	Helium MFC set to  0.000000
1/13/2011	9:39:55 PM	H2 MFC set to  0.000000
1/13/2011	9:39:55 PM	BCl3 MFC set to  0.000000
1/13/2011	9:39:55 PM	PHl3 MFC set to  0.000000
1/13/2011	9:39:55 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:39:55 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:39:55 PM	Tube furnace set to 0
1/13/2011	9:39:56 PM	Run finished at 9:39 PM
1/13/2011	9:39:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	9:40:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	9:40:42 PM	Recipe started at 9:40 PM
1/13/2011	9:40:42 PM	Helium valve closed
1/13/2011	9:40:42 PM	H2 valve closed
1/13/2011	9:40:42 PM	BCl3 valve closed
1/13/2011	9:40:42 PM	PH3 valve closed
1/13/2011	9:40:42 PM	SiCl4 pre valve closed
1/13/2011	9:40:42 PM	SiCl4 post valve closed
1/13/2011	9:40:42 PM	Main Vac valve closed
1/13/2011	9:40:42 PM	Bubbler valve closed
1/13/2011	9:40:42 PM	Bypass valve opened
1/13/2011	9:40:42 PM	Helium MFC set to  0.000000
1/13/2011	9:40:42 PM	H2 MFC set to  0.000000
1/13/2011	9:40:42 PM	BCl3 MFC set to  0.000000
1/13/2011	9:40:42 PM	PHl3 MFC set to  0.000000
1/13/2011	9:40:42 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:40:42 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:40:42 PM	Tube furnace set to 0
1/13/2011	9:40:43 PM	Helium valve closed
1/13/2011	9:40:43 PM	H2 valve closed
1/13/2011	9:40:43 PM	BCl3 valve closed
1/13/2011	9:40:43 PM	PH3 valve closed
1/13/2011	9:40:43 PM	SiCl4 pre valve closed
1/13/2011	9:40:43 PM	SiCl4 post valve closed
1/13/2011	9:40:43 PM	Bubbler valve closed
1/13/2011	9:40:43 PM	Main Vac valve opened
1/13/2011	9:40:43 PM	Bypass valve opened
1/13/2011	9:40:43 PM	Helium MFC set to  0.000000
1/13/2011	9:40:43 PM	H2 MFC set to  0.000000
1/13/2011	9:40:43 PM	BCl3 MFC set to  0.000000
1/13/2011	9:40:43 PM	PHl3 MFC set to  0.000000
1/13/2011	9:40:43 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:40:43 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:40:43 PM	Tube furnace set to 0
1/13/2011	9:41:43 PM	H2 valve closed
1/13/2011	9:41:43 PM	BCl3 valve closed
1/13/2011	9:41:43 PM	PH3 valve closed
1/13/2011	9:41:43 PM	SiCl4 pre valve closed
1/13/2011	9:41:43 PM	SiCl4 post valve closed
1/13/2011	9:41:43 PM	Bubbler valve closed
1/13/2011	9:41:43 PM	Helium valve opened
1/13/2011	9:41:43 PM	Main Vac valve opened
1/13/2011	9:41:43 PM	Bypass valve opened
1/13/2011	9:41:43 PM	Helium MFC set to  100.000000
1/13/2011	9:41:43 PM	H2 MFC set to  0.000000
1/13/2011	9:41:43 PM	BCl3 MFC set to  0.000000
1/13/2011	9:41:43 PM	PHl3 MFC set to  0.000000
1/13/2011	9:41:43 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:41:43 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:41:43 PM	Tube furnace set to 0
1/13/2011	9:42:43 PM	Helium valve closed
1/13/2011	9:42:43 PM	H2 valve closed
1/13/2011	9:42:43 PM	BCl3 valve closed
1/13/2011	9:42:43 PM	PH3 valve closed
1/13/2011	9:42:43 PM	SiCl4 pre valve closed
1/13/2011	9:42:43 PM	SiCl4 post valve closed
1/13/2011	9:42:43 PM	Bubbler valve closed
1/13/2011	9:42:43 PM	Main Vac valve opened
1/13/2011	9:42:43 PM	Bypass valve opened
1/13/2011	9:42:43 PM	Helium MFC set to  0.000000
1/13/2011	9:42:43 PM	H2 MFC set to  0.000000
1/13/2011	9:42:43 PM	BCl3 MFC set to  0.000000
1/13/2011	9:42:43 PM	PHl3 MFC set to  0.000000
1/13/2011	9:42:43 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:42:43 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:42:43 PM	Tube furnace set to 0
1/13/2011	9:43:43 PM	H2 valve closed
1/13/2011	9:43:43 PM	BCl3 valve closed
1/13/2011	9:43:43 PM	PH3 valve closed
1/13/2011	9:43:43 PM	SiCl4 pre valve closed
1/13/2011	9:43:43 PM	SiCl4 post valve closed
1/13/2011	9:43:43 PM	Bubbler valve closed
1/13/2011	9:43:43 PM	Helium valve opened
1/13/2011	9:43:43 PM	Main Vac valve opened
1/13/2011	9:43:43 PM	Bypass valve opened
1/13/2011	9:43:43 PM	Helium MFC set to  100.000000
1/13/2011	9:43:43 PM	H2 MFC set to  0.000000
1/13/2011	9:43:43 PM	BCl3 MFC set to  0.000000
1/13/2011	9:43:43 PM	PHl3 MFC set to  0.000000
1/13/2011	9:43:43 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:43:43 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:43:44 PM	Tube furnace set to 0
1/13/2011	9:44:44 PM	Helium valve closed
1/13/2011	9:44:44 PM	H2 valve closed
1/13/2011	9:44:44 PM	BCl3 valve closed
1/13/2011	9:44:44 PM	PH3 valve closed
1/13/2011	9:44:44 PM	SiCl4 pre valve closed
1/13/2011	9:44:44 PM	SiCl4 post valve closed
1/13/2011	9:44:44 PM	Bubbler valve closed
1/13/2011	9:44:44 PM	Main Vac valve opened
1/13/2011	9:44:44 PM	Bypass valve opened
1/13/2011	9:44:44 PM	Helium MFC set to  0.000000
1/13/2011	9:44:44 PM	H2 MFC set to  0.000000
1/13/2011	9:44:44 PM	BCl3 MFC set to  0.000000
1/13/2011	9:44:44 PM	PHl3 MFC set to  0.000000
1/13/2011	9:44:44 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:44:44 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:44:44 PM	Tube furnace set to 0
1/13/2011	9:45:44 PM	H2 valve closed
1/13/2011	9:45:44 PM	BCl3 valve closed
1/13/2011	9:45:44 PM	PH3 valve closed
1/13/2011	9:45:44 PM	SiCl4 pre valve closed
1/13/2011	9:45:44 PM	SiCl4 post valve closed
1/13/2011	9:45:44 PM	Bubbler valve closed
1/13/2011	9:45:44 PM	Helium valve opened
1/13/2011	9:45:44 PM	Main Vac valve opened
1/13/2011	9:45:44 PM	Bypass valve opened
1/13/2011	9:45:44 PM	Helium MFC set to  100.000000
1/13/2011	9:45:44 PM	H2 MFC set to  0.000000
1/13/2011	9:45:44 PM	BCl3 MFC set to  0.000000
1/13/2011	9:45:44 PM	PHl3 MFC set to  0.000000
1/13/2011	9:45:44 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:45:44 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:45:44 PM	Tube furnace set to 0
1/13/2011	9:46:44 PM	Helium valve closed
1/13/2011	9:46:44 PM	H2 valve closed
1/13/2011	9:46:44 PM	BCl3 valve closed
1/13/2011	9:46:44 PM	PH3 valve closed
1/13/2011	9:46:44 PM	SiCl4 pre valve closed
1/13/2011	9:46:44 PM	SiCl4 post valve closed
1/13/2011	9:46:44 PM	Bubbler valve closed
1/13/2011	9:46:44 PM	Main Vac valve opened
1/13/2011	9:46:44 PM	Bypass valve opened
1/13/2011	9:46:44 PM	Helium MFC set to  0.000000
1/13/2011	9:46:44 PM	H2 MFC set to  0.000000
1/13/2011	9:46:44 PM	BCl3 MFC set to  0.000000
1/13/2011	9:46:44 PM	PHl3 MFC set to  0.000000
1/13/2011	9:46:44 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:46:44 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:46:44 PM	Tube furnace set to 0
1/13/2011	9:47:44 PM	H2 valve closed
1/13/2011	9:47:44 PM	BCl3 valve closed
1/13/2011	9:47:44 PM	PH3 valve closed
1/13/2011	9:47:44 PM	SiCl4 pre valve closed
1/13/2011	9:47:44 PM	SiCl4 post valve closed
1/13/2011	9:47:44 PM	Bubbler valve closed
1/13/2011	9:47:44 PM	Helium valve opened
1/13/2011	9:47:44 PM	Main Vac valve opened
1/13/2011	9:47:44 PM	Bypass valve opened
1/13/2011	9:47:44 PM	Helium MFC set to  100.000000
1/13/2011	9:47:44 PM	H2 MFC set to  0.000000
1/13/2011	9:47:44 PM	BCl3 MFC set to  0.000000
1/13/2011	9:47:44 PM	PHl3 MFC set to  0.000000
1/13/2011	9:47:44 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:47:44 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:47:44 PM	Tube furnace set to 0
1/13/2011	9:48:44 PM	Helium valve closed
1/13/2011	9:48:44 PM	H2 valve closed
1/13/2011	9:48:44 PM	BCl3 valve closed
1/13/2011	9:48:44 PM	PH3 valve closed
1/13/2011	9:48:44 PM	SiCl4 pre valve closed
1/13/2011	9:48:44 PM	SiCl4 post valve closed
1/13/2011	9:48:44 PM	Bubbler valve closed
1/13/2011	9:48:44 PM	Main Vac valve opened
1/13/2011	9:48:44 PM	Bypass valve opened
1/13/2011	9:48:44 PM	Helium MFC set to  0.000000
1/13/2011	9:48:44 PM	H2 MFC set to  0.000000
1/13/2011	9:48:44 PM	BCl3 MFC set to  0.000000
1/13/2011	9:48:44 PM	PHl3 MFC set to  0.000000
1/13/2011	9:48:44 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:48:44 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:48:45 PM	Tube furnace set to 0
1/13/2011	9:49:45 PM	H2 valve closed
1/13/2011	9:49:45 PM	BCl3 valve closed
1/13/2011	9:49:45 PM	PH3 valve closed
1/13/2011	9:49:45 PM	SiCl4 pre valve closed
1/13/2011	9:49:45 PM	SiCl4 post valve closed
1/13/2011	9:49:45 PM	Bubbler valve closed
1/13/2011	9:49:45 PM	Helium valve opened
1/13/2011	9:49:45 PM	Main Vac valve opened
1/13/2011	9:49:45 PM	Bypass valve opened
1/13/2011	9:49:45 PM	Helium MFC set to  100.000000
1/13/2011	9:49:45 PM	H2 MFC set to  0.000000
1/13/2011	9:49:45 PM	BCl3 MFC set to  0.000000
1/13/2011	9:49:45 PM	PHl3 MFC set to  0.000000
1/13/2011	9:49:45 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:49:45 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:49:45 PM	Tube furnace set to 0
1/13/2011	9:50:45 PM	Helium valve closed
1/13/2011	9:50:45 PM	H2 valve closed
1/13/2011	9:50:45 PM	BCl3 valve closed
1/13/2011	9:50:45 PM	PH3 valve closed
1/13/2011	9:50:45 PM	SiCl4 pre valve closed
1/13/2011	9:50:45 PM	SiCl4 post valve closed
1/13/2011	9:50:45 PM	Bubbler valve closed
1/13/2011	9:50:45 PM	Main Vac valve opened
1/13/2011	9:50:45 PM	Bypass valve opened
1/13/2011	9:50:45 PM	Helium MFC set to  0.000000
1/13/2011	9:50:45 PM	H2 MFC set to  0.000000
1/13/2011	9:50:45 PM	BCl3 MFC set to  0.000000
1/13/2011	9:50:45 PM	PHl3 MFC set to  0.000000
1/13/2011	9:50:45 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:50:45 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:50:45 PM	Tube furnace set to 0
1/13/2011	9:51:45 PM	H2 valve closed
1/13/2011	9:51:45 PM	BCl3 valve closed
1/13/2011	9:51:45 PM	PH3 valve closed
1/13/2011	9:51:45 PM	SiCl4 pre valve closed
1/13/2011	9:51:45 PM	SiCl4 post valve closed
1/13/2011	9:51:45 PM	Bubbler valve closed
1/13/2011	9:51:45 PM	Helium valve opened
1/13/2011	9:51:45 PM	Main Vac valve opened
1/13/2011	9:51:45 PM	Bypass valve opened
1/13/2011	9:51:45 PM	Helium MFC set to  100.000000
1/13/2011	9:51:45 PM	H2 MFC set to  0.000000
1/13/2011	9:51:45 PM	BCl3 MFC set to  0.000000
1/13/2011	9:51:45 PM	PHl3 MFC set to  0.000000
1/13/2011	9:51:45 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:51:45 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:51:45 PM	Tube furnace set to 0
1/13/2011	9:52:45 PM	Helium valve closed
1/13/2011	9:52:45 PM	H2 valve closed
1/13/2011	9:52:45 PM	BCl3 valve closed
1/13/2011	9:52:45 PM	PH3 valve closed
1/13/2011	9:52:45 PM	SiCl4 pre valve closed
1/13/2011	9:52:45 PM	SiCl4 post valve closed
1/13/2011	9:52:45 PM	Bubbler valve closed
1/13/2011	9:52:45 PM	Main Vac valve opened
1/13/2011	9:52:45 PM	Bypass valve opened
1/13/2011	9:52:45 PM	Helium MFC set to  0.000000
1/13/2011	9:52:45 PM	H2 MFC set to  0.000000
1/13/2011	9:52:45 PM	BCl3 MFC set to  0.000000
1/13/2011	9:52:45 PM	PHl3 MFC set to  0.000000
1/13/2011	9:52:45 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:52:45 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:52:45 PM	Tube furnace set to 0
1/13/2011	9:53:45 PM	H2 valve closed
1/13/2011	9:53:45 PM	BCl3 valve closed
1/13/2011	9:53:45 PM	PH3 valve closed
1/13/2011	9:53:45 PM	SiCl4 pre valve closed
1/13/2011	9:53:45 PM	SiCl4 post valve closed
1/13/2011	9:53:45 PM	Bubbler valve closed
1/13/2011	9:53:45 PM	Helium valve opened
1/13/2011	9:53:45 PM	Main Vac valve opened
1/13/2011	9:53:45 PM	Bypass valve opened
1/13/2011	9:53:45 PM	Helium MFC set to  100.000000
1/13/2011	9:53:45 PM	H2 MFC set to  0.000000
1/13/2011	9:53:45 PM	BCl3 MFC set to  0.000000
1/13/2011	9:53:45 PM	PHl3 MFC set to  0.000000
1/13/2011	9:53:45 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:53:45 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:53:46 PM	Tube furnace set to 0
1/13/2011	9:54:46 PM	Helium valve closed
1/13/2011	9:54:46 PM	H2 valve closed
1/13/2011	9:54:46 PM	BCl3 valve closed
1/13/2011	9:54:46 PM	PH3 valve closed
1/13/2011	9:54:46 PM	SiCl4 pre valve closed
1/13/2011	9:54:46 PM	SiCl4 post valve closed
1/13/2011	9:54:46 PM	Bubbler valve closed
1/13/2011	9:54:46 PM	Main Vac valve opened
1/13/2011	9:54:46 PM	Bypass valve opened
1/13/2011	9:54:46 PM	Helium MFC set to  0.000000
1/13/2011	9:54:46 PM	H2 MFC set to  0.000000
1/13/2011	9:54:46 PM	BCl3 MFC set to  0.000000
1/13/2011	9:54:46 PM	PHl3 MFC set to  0.000000
1/13/2011	9:54:46 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:54:46 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:54:46 PM	Tube furnace set to 0
1/13/2011	9:55:46 PM	H2 valve closed
1/13/2011	9:55:46 PM	BCl3 valve closed
1/13/2011	9:55:46 PM	PH3 valve closed
1/13/2011	9:55:46 PM	SiCl4 pre valve closed
1/13/2011	9:55:46 PM	SiCl4 post valve closed
1/13/2011	9:55:46 PM	Bubbler valve closed
1/13/2011	9:55:46 PM	Helium valve opened
1/13/2011	9:55:46 PM	Main Vac valve opened
1/13/2011	9:55:46 PM	Bypass valve opened
1/13/2011	9:55:46 PM	Helium MFC set to  100.000000
1/13/2011	9:55:46 PM	H2 MFC set to  0.000000
1/13/2011	9:55:46 PM	BCl3 MFC set to  0.000000
1/13/2011	9:55:46 PM	PHl3 MFC set to  0.000000
1/13/2011	9:55:46 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:55:46 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:55:46 PM	Tube furnace set to 0
1/13/2011	9:56:46 PM	Helium valve closed
1/13/2011	9:56:46 PM	H2 valve closed
1/13/2011	9:56:46 PM	BCl3 valve closed
1/13/2011	9:56:46 PM	PH3 valve closed
1/13/2011	9:56:46 PM	SiCl4 pre valve closed
1/13/2011	9:56:46 PM	SiCl4 post valve closed
1/13/2011	9:56:46 PM	Bubbler valve closed
1/13/2011	9:56:46 PM	Main Vac valve opened
1/13/2011	9:56:46 PM	Bypass valve opened
1/13/2011	9:56:46 PM	Helium MFC set to  0.000000
1/13/2011	9:56:46 PM	H2 MFC set to  0.000000
1/13/2011	9:56:46 PM	BCl3 MFC set to  0.000000
1/13/2011	9:56:46 PM	PHl3 MFC set to  0.000000
1/13/2011	9:56:46 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:56:46 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:56:46 PM	Tube furnace set to 0
1/13/2011	9:57:46 PM	H2 valve closed
1/13/2011	9:57:46 PM	BCl3 valve closed
1/13/2011	9:57:46 PM	PH3 valve closed
1/13/2011	9:57:46 PM	SiCl4 pre valve closed
1/13/2011	9:57:46 PM	SiCl4 post valve closed
1/13/2011	9:57:46 PM	Bubbler valve closed
1/13/2011	9:57:46 PM	Helium valve opened
1/13/2011	9:57:46 PM	Main Vac valve opened
1/13/2011	9:57:46 PM	Bypass valve opened
1/13/2011	9:57:46 PM	Helium MFC set to  100.000000
1/13/2011	9:57:46 PM	H2 MFC set to  0.000000
1/13/2011	9:57:46 PM	BCl3 MFC set to  0.000000
1/13/2011	9:57:46 PM	PHl3 MFC set to  0.000000
1/13/2011	9:57:46 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:57:46 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:57:46 PM	Tube furnace set to 0
1/13/2011	9:58:46 PM	Helium valve closed
1/13/2011	9:58:46 PM	H2 valve closed
1/13/2011	9:58:46 PM	BCl3 valve closed
1/13/2011	9:58:46 PM	PH3 valve closed
1/13/2011	9:58:46 PM	SiCl4 pre valve closed
1/13/2011	9:58:46 PM	SiCl4 post valve closed
1/13/2011	9:58:46 PM	Bubbler valve closed
1/13/2011	9:58:46 PM	Main Vac valve opened
1/13/2011	9:58:46 PM	Bypass valve opened
1/13/2011	9:58:46 PM	Helium MFC set to  0.000000
1/13/2011	9:58:46 PM	H2 MFC set to  0.000000
1/13/2011	9:58:46 PM	BCl3 MFC set to  0.000000
1/13/2011	9:58:46 PM	PHl3 MFC set to  0.000000
1/13/2011	9:58:46 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:58:46 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:58:47 PM	Tube furnace set to 0
1/13/2011	9:59:47 PM	H2 valve closed
1/13/2011	9:59:47 PM	BCl3 valve closed
1/13/2011	9:59:47 PM	PH3 valve closed
1/13/2011	9:59:47 PM	SiCl4 pre valve closed
1/13/2011	9:59:47 PM	SiCl4 post valve closed
1/13/2011	9:59:47 PM	Bubbler valve closed
1/13/2011	9:59:47 PM	Helium valve opened
1/13/2011	9:59:47 PM	Main Vac valve opened
1/13/2011	9:59:47 PM	Bypass valve opened
1/13/2011	9:59:47 PM	Helium MFC set to  100.000000
1/13/2011	9:59:47 PM	H2 MFC set to  0.000000
1/13/2011	9:59:47 PM	BCl3 MFC set to  0.000000
1/13/2011	9:59:47 PM	PHl3 MFC set to  0.000000
1/13/2011	9:59:47 PM	SiCl4 MFC set to  0.000000
1/13/2011	9:59:47 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	9:59:47 PM	Tube furnace set to 0
1/13/2011	10:00:47 PM	Helium valve closed
1/13/2011	10:00:47 PM	H2 valve closed
1/13/2011	10:00:47 PM	BCl3 valve closed
1/13/2011	10:00:47 PM	PH3 valve closed
1/13/2011	10:00:47 PM	SiCl4 pre valve closed
1/13/2011	10:00:47 PM	SiCl4 post valve closed
1/13/2011	10:00:47 PM	Bubbler valve closed
1/13/2011	10:00:47 PM	Main Vac valve opened
1/13/2011	10:00:47 PM	Bypass valve opened
1/13/2011	10:00:47 PM	Helium MFC set to  0.000000
1/13/2011	10:00:47 PM	H2 MFC set to  0.000000
1/13/2011	10:00:47 PM	BCl3 MFC set to  0.000000
1/13/2011	10:00:47 PM	PHl3 MFC set to  0.000000
1/13/2011	10:00:47 PM	SiCl4 MFC set to  0.000000
1/13/2011	10:00:47 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:00:47 PM	Tube furnace set to 0
1/13/2011	10:00:48 PM	Run finished at 10:00 PM
1/13/2011	10:00:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	10:14:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/13/2011	10:14:07 PM	Recipe started at 10:14 PM
1/13/2011	10:14:07 PM	Helium valve closed
1/13/2011	10:14:07 PM	H2 valve closed
1/13/2011	10:14:07 PM	BCl3 valve closed
1/13/2011	10:14:07 PM	PH3 valve closed
1/13/2011	10:14:07 PM	SiCl4 pre valve closed
1/13/2011	10:14:07 PM	SiCl4 post valve closed
1/13/2011	10:14:07 PM	Main Vac valve closed
1/13/2011	10:14:07 PM	Bypass valve closed
1/13/2011	10:14:07 PM	Bubbler valve closed
1/13/2011	10:14:07 PM	Helium MFC set to  0.000000
1/13/2011	10:14:07 PM	H2 MFC set to  0.000000
1/13/2011	10:14:07 PM	BCl3 MFC set to  0.000000
1/13/2011	10:14:07 PM	PHl3 MFC set to  0.000000
1/13/2011	10:14:07 PM	SiCl4 MFC set to  0.000000
1/13/2011	10:14:07 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:14:07 PM	Tube furnace set to 0
1/13/2011	10:14:07 PM	Run finished at 10:14 PM
1/13/2011	10:14:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/13/2011	10:14:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	10:14:30 PM	Recipe started at 10:14 PM
1/13/2011	10:14:30 PM	Helium valve closed
1/13/2011	10:14:30 PM	H2 valve closed
1/13/2011	10:14:30 PM	BCl3 valve closed
1/13/2011	10:14:30 PM	PH3 valve closed
1/13/2011	10:14:30 PM	SiCl4 pre valve closed
1/13/2011	10:14:30 PM	SiCl4 post valve closed
1/13/2011	10:14:30 PM	Main Vac valve closed
1/13/2011	10:14:30 PM	Bubbler valve closed
1/13/2011	10:14:30 PM	Bypass valve opened
1/13/2011	10:14:30 PM	Helium MFC set to  0.000000
1/13/2011	10:14:30 PM	H2 MFC set to  0.000000
1/13/2011	10:14:30 PM	BCl3 MFC set to  0.000000
1/13/2011	10:14:30 PM	PHl3 MFC set to  0.000000
1/13/2011	10:14:30 PM	SiCl4 MFC set to  0.000000
1/13/2011	10:14:30 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:14:30 PM	Tube furnace set to 0
1/13/2011	10:14:31 PM	Helium valve closed
1/13/2011	10:14:31 PM	H2 valve closed
1/13/2011	10:14:31 PM	BCl3 valve closed
1/13/2011	10:14:31 PM	PH3 valve closed
1/13/2011	10:14:31 PM	SiCl4 pre valve closed
1/13/2011	10:14:31 PM	SiCl4 post valve closed
1/13/2011	10:14:31 PM	Bubbler valve closed
1/13/2011	10:14:31 PM	Main Vac valve opened
1/13/2011	10:14:31 PM	Bypass valve opened
1/13/2011	10:14:31 PM	Helium MFC set to  0.000000
1/13/2011	10:14:31 PM	H2 MFC set to  0.000000
1/13/2011	10:14:31 PM	BCl3 MFC set to  0.000000
1/13/2011	10:14:31 PM	PHl3 MFC set to  0.000000
1/13/2011	10:14:31 PM	SiCl4 MFC set to  0.000000
1/13/2011	10:14:31 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:14:31 PM	Tube furnace set to 0
1/13/2011	10:14:31 PM	Run finished at 10:14 PM
1/13/2011	10:14:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	10:16:14 PM	Recipe started at 10:16 PM
1/13/2011	10:16:14 PM	Helium valve closed
1/13/2011	10:16:14 PM	BCl3 valve closed
1/13/2011	10:16:14 PM	PH3 valve closed
1/13/2011	10:16:14 PM	SiCl4 pre valve closed
1/13/2011	10:16:14 PM	SiCl4 post valve closed
1/13/2011	10:16:14 PM	Main Vac valve closed
1/13/2011	10:16:14 PM	Bypass valve closed
1/13/2011	10:16:14 PM	Bubbler valve closed
1/13/2011	10:16:14 PM	H2 valve opened
1/13/2011	10:16:14 PM	Helium MFC set to  0.000000
1/13/2011	10:16:14 PM	H2 MFC set to  500.000000
1/13/2011	10:16:14 PM	BCl3 MFC set to  0.000000
1/13/2011	10:16:14 PM	PHl3 MFC set to  0.000000
1/13/2011	10:16:14 PM	SiCl4 MFC set to  0.000000
1/13/2011	10:16:14 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:16:14 PM	Tube furnace set to 0
1/13/2011	10:17:35 PM	Helium valve closed
1/13/2011	10:17:35 PM	BCl3 valve closed
1/13/2011	10:17:35 PM	PH3 valve closed
1/13/2011	10:17:35 PM	SiCl4 pre valve closed
1/13/2011	10:17:35 PM	SiCl4 post valve closed
1/13/2011	10:17:35 PM	Main Vac valve closed
1/13/2011	10:17:35 PM	Bypass valve closed
1/13/2011	10:17:35 PM	H2 valve opened
1/13/2011	10:17:35 PM	Bubbler valve opened
1/13/2011	10:17:35 PM	Helium MFC set to  0.000000
1/13/2011	10:17:35 PM	H2 MFC set to  500.000000
1/13/2011	10:17:35 PM	BCl3 MFC set to  0.000000
1/13/2011	10:17:35 PM	PHl3 MFC set to  0.000000
1/13/2011	10:17:35 PM	SiCl4 MFC set to  0.000000
1/13/2011	10:17:35 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:17:35 PM	Tube furnace set to 1000
1/13/2011	10:37:35 PM	Helium valve closed
1/13/2011	10:37:35 PM	PH3 valve closed
1/13/2011	10:37:35 PM	Main Vac valve closed
1/13/2011	10:37:35 PM	Bypass valve closed
1/13/2011	10:37:35 PM	H2 valve opened
1/13/2011	10:37:35 PM	BCl3 valve opened
1/13/2011	10:37:35 PM	SiCl4 pre valve opened
1/13/2011	10:37:35 PM	SiCl4 post valve opened
1/13/2011	10:37:35 PM	Bubbler valve opened
1/13/2011	10:37:35 PM	Helium MFC set to  0.000000
1/13/2011	10:37:35 PM	H2 MFC set to  500.000000
1/13/2011	10:37:35 PM	BCl3 MFC set to  1.800000
1/13/2011	10:37:35 PM	PHl3 MFC set to  0.000000
1/13/2011	10:37:35 PM	SiCl4 MFC set to  50.000000
1/13/2011	10:37:35 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	10:37:35 PM	Tube furnace set to 1000
1/13/2011	11:03:35 PM	H2 valve closed
1/13/2011	11:03:35 PM	BCl3 valve closed
1/13/2011	11:03:35 PM	PH3 valve closed
1/13/2011	11:03:35 PM	SiCl4 pre valve closed
1/13/2011	11:03:35 PM	SiCl4 post valve closed
1/13/2011	11:03:35 PM	Main Vac valve closed
1/13/2011	11:03:35 PM	Bypass valve closed
1/13/2011	11:03:35 PM	Helium valve opened
1/13/2011	11:03:35 PM	Bubbler valve opened
1/13/2011	11:03:35 PM	Helium MFC set to  500.000000
1/13/2011	11:03:35 PM	H2 MFC set to  0.000000
1/13/2011	11:03:35 PM	BCl3 MFC set to  0.000000
1/13/2011	11:03:35 PM	PHl3 MFC set to  0.000000
1/13/2011	11:03:35 PM	SiCl4 MFC set to  0.000000
1/13/2011	11:03:35 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:03:35 PM	Tube furnace set to 0
1/13/2011	11:23:35 PM	Helium valve closed
1/13/2011	11:23:35 PM	H2 valve closed
1/13/2011	11:23:35 PM	BCl3 valve closed
1/13/2011	11:23:35 PM	PH3 valve closed
1/13/2011	11:23:35 PM	SiCl4 pre valve closed
1/13/2011	11:23:35 PM	SiCl4 post valve closed
1/13/2011	11:23:35 PM	Main Vac valve closed
1/13/2011	11:23:35 PM	Bypass valve closed
1/13/2011	11:23:35 PM	Bubbler valve closed
1/13/2011	11:23:35 PM	Helium MFC set to  0.000000
1/13/2011	11:23:35 PM	H2 MFC set to  0.000000
1/13/2011	11:23:35 PM	BCl3 MFC set to  0.000000
1/13/2011	11:23:35 PM	PHl3 MFC set to  0.000000
1/13/2011	11:23:35 PM	SiCl4 MFC set to  0.000000
1/13/2011	11:23:35 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:23:35 PM	Tube furnace set to 0
1/13/2011	11:23:36 PM	Run finished at 11:23 PM
1/13/2011	11:46:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2011	11:46:33 PM	Recipe started at 11:46 PM
1/13/2011	11:46:33 PM	H2 valve closed
1/13/2011	11:46:33 PM	BCl3 valve closed
1/13/2011	11:46:33 PM	PH3 valve closed
1/13/2011	11:46:33 PM	SiCl4 pre valve closed
1/13/2011	11:46:33 PM	SiCl4 post valve closed
1/13/2011	11:46:33 PM	Main Vac valve closed
1/13/2011	11:46:33 PM	Bypass valve closed
1/13/2011	11:46:33 PM	Bubbler valve closed
1/13/2011	11:46:33 PM	Helium valve opened
1/13/2011	11:46:33 PM	Helium MFC set to  500.000000
1/13/2011	11:46:33 PM	H2 MFC set to  0.000000
1/13/2011	11:46:33 PM	BCl3 MFC set to  0.000000
1/13/2011	11:46:33 PM	PHl3 MFC set to  0.000000
1/13/2011	11:46:33 PM	SiCl4 MFC set to  0.000000
1/13/2011	11:46:33 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:46:33 PM	Tube furnace set to 0
1/13/2011	11:46:40 PM	Helium valve closed
1/13/2011	11:46:40 PM	H2 valve closed
1/13/2011	11:46:40 PM	BCl3 valve closed
1/13/2011	11:46:40 PM	PH3 valve closed
1/13/2011	11:46:40 PM	SiCl4 pre valve closed
1/13/2011	11:46:40 PM	SiCl4 post valve closed
1/13/2011	11:46:40 PM	Main Vac valve closed
1/13/2011	11:46:40 PM	Bypass valve closed
1/13/2011	11:46:40 PM	Bubbler valve closed
1/13/2011	11:46:40 PM	Helium MFC set to  0.000000
1/13/2011	11:46:40 PM	H2 MFC set to  0.000000
1/13/2011	11:46:40 PM	BCl3 MFC set to  0.000000
1/13/2011	11:46:40 PM	PHl3 MFC set to  0.000000
1/13/2011	11:46:40 PM	SiCl4 MFC set to  0.000000
1/13/2011	11:46:40 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:46:40 PM	Tube furnace set to 0
1/13/2011	11:46:41 PM	Run finished at 11:46 PM
1/13/2011	11:46:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2011	11:57:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	11:57:10 PM	Recipe started at 11:57 PM
1/13/2011	11:57:10 PM	Helium valve closed
1/13/2011	11:57:10 PM	H2 valve closed
1/13/2011	11:57:10 PM	BCl3 valve closed
1/13/2011	11:57:10 PM	PH3 valve closed
1/13/2011	11:57:10 PM	SiCl4 pre valve closed
1/13/2011	11:57:10 PM	SiCl4 post valve closed
1/13/2011	11:57:10 PM	Main Vac valve closed
1/13/2011	11:57:10 PM	Bubbler valve closed
1/13/2011	11:57:10 PM	Bypass valve opened
1/13/2011	11:57:10 PM	Helium MFC set to  0.000000
1/13/2011	11:57:10 PM	H2 MFC set to  0.000000
1/13/2011	11:57:10 PM	BCl3 MFC set to  0.000000
1/13/2011	11:57:10 PM	PHl3 MFC set to  0.000000
1/13/2011	11:57:10 PM	SiCl4 MFC set to  0.000000
1/13/2011	11:57:10 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:57:10 PM	Tube furnace set to 0
1/13/2011	11:57:43 PM	Helium valve closed
1/13/2011	11:57:43 PM	H2 valve closed
1/13/2011	11:57:43 PM	BCl3 valve closed
1/13/2011	11:57:43 PM	PH3 valve closed
1/13/2011	11:57:43 PM	SiCl4 pre valve closed
1/13/2011	11:57:43 PM	SiCl4 post valve closed
1/13/2011	11:57:43 PM	Bubbler valve closed
1/13/2011	11:57:43 PM	Main Vac valve opened
1/13/2011	11:57:43 PM	Bypass valve opened
1/13/2011	11:57:43 PM	Helium MFC set to  0.000000
1/13/2011	11:57:43 PM	H2 MFC set to  0.000000
1/13/2011	11:57:43 PM	BCl3 MFC set to  0.000000
1/13/2011	11:57:43 PM	PHl3 MFC set to  0.000000
1/13/2011	11:57:43 PM	SiCl4 MFC set to  0.000000
1/13/2011	11:57:43 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:57:44 PM	Tube furnace set to 0
1/13/2011	11:57:44 PM	Run finished at 11:57 PM
1/13/2011	11:57:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2011	11:58:41 PM	Tube furnace set to 200
1/13/2011	11:59:28 PM	Tube furnace set to 0
1/13/2011	11:59:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/13/2011	11:59:48 PM	Recipe started at 11:59 PM
1/13/2011	11:59:48 PM	Helium valve closed
1/13/2011	11:59:48 PM	H2 valve closed
1/13/2011	11:59:48 PM	BCl3 valve closed
1/13/2011	11:59:48 PM	PH3 valve closed
1/13/2011	11:59:48 PM	SiCl4 pre valve closed
1/13/2011	11:59:48 PM	SiCl4 post valve closed
1/13/2011	11:59:48 PM	Main Vac valve closed
1/13/2011	11:59:48 PM	Bubbler valve closed
1/13/2011	11:59:48 PM	Bypass valve opened
1/13/2011	11:59:48 PM	Helium MFC set to  0.000000
1/13/2011	11:59:48 PM	H2 MFC set to  0.000000
1/13/2011	11:59:48 PM	BCl3 MFC set to  0.000000
1/13/2011	11:59:48 PM	PHl3 MFC set to  0.000000
1/13/2011	11:59:48 PM	SiCl4 MFC set to  0.000000
1/13/2011	11:59:48 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:59:48 PM	Tube furnace set to 0
1/13/2011	11:59:48 PM	Helium valve closed
1/13/2011	11:59:48 PM	H2 valve closed
1/13/2011	11:59:48 PM	BCl3 valve closed
1/13/2011	11:59:48 PM	PH3 valve closed
1/13/2011	11:59:48 PM	SiCl4 pre valve closed
1/13/2011	11:59:48 PM	SiCl4 post valve closed
1/13/2011	11:59:48 PM	Bubbler valve closed
1/13/2011	11:59:48 PM	Main Vac valve opened
1/13/2011	11:59:48 PM	Bypass valve opened
1/13/2011	11:59:48 PM	Helium MFC set to  0.000000
1/13/2011	11:59:48 PM	H2 MFC set to  0.000000
1/13/2011	11:59:48 PM	BCl3 MFC set to  0.000000
1/13/2011	11:59:48 PM	PHl3 MFC set to  0.000000
1/13/2011	11:59:48 PM	SiCl4 MFC set to  0.000000
1/13/2011	11:59:48 PM	Bypass solenoid MFC set to  0.000000
1/13/2011	11:59:48 PM	Tube furnace set to 0
